JPH02132015A - Fire door - Google Patents

Abstract

PURPOSE:To dispense with the storage space of a door by constituting a door provided with a conveyance section serving as part of a conveyance path on one side face rotatably between the horizontal conveyance position and the vertical closure position for a conveyance port in the fire door of an automatic conveying system. CONSTITUTION:A fire door 3 is provided rotatably between the vertical position closing a conveyance port 2 and the horizontal position opening the conveyance port 2 by a driving means (not shown in the figure) provided on a support device 4. When the door 3 is set to the horizontal position, a conveyance section 6 integrally formed on the upper face of the door 3 is connected to conveyance paths 5 and 5, and a cargo can be conveyed from the conveyance path 5 to the other conveyance path 5 via the conveyance section 6. No storage space of the fire door is required according to this constitution.

Description

[Detailed Description of the Invention] [Summary] Regarding a fire door installed in the transport route of an automatic transport system in a factory, there is a fire prevention method that eliminates the need to secure storage space for the door on the wall surrounding the transport port that is opened and closed by the door. In order to provide a door, the door is supported rotatably from the horizontal direction to the vertical direction with respect to the transport port installed on the wall, and the transport port can be closed when it is recessed in the vertical direction. , one side of the door is provided with a transport section that rotates horizontally and becomes part of the transport path. [Industrial Application Field] This invention relates to a fire door installed in the transport route of an automatic transport system in a factory. An automatic transport system that automatically transports wafers between each process has been adopted as part of the FA process in semiconductor factories. In such a system, conveyance paths are arranged so as to link various processes, so there are places where it is necessary to install fire doors along the route according to the Fire Service Act.

[Prior Art] Conventionally, a fire door provided in a conveyance route has a door 12 for a conveyance port 11 provided on a wall, as shown in FIG. 6, for example.
The transport port 11 can be opened and closed by raising and lowering the transport port 1, or the door 12 can be opened and closed by sliding the door 12 from side to side with respect to the transport port 1, as shown in FIG.

[Problems to be Solved by the Invention] However, in the opening/closing oval structure as described above, in order to store the door 12, a storage space with the same area as the door 12 is required above or to the side of the transport port 11, and this storage space is It becomes difficult to secure. An object of this invention is to provide a fire door that does not require storage space for the door to be secured on the wall surrounding the transport port that is opened and closed by the door. [Means for Solving the Problems] FIG. 1 is an explanatory diagram of the principle of the present invention.
A door 3 is supported rotatably from the horizontal direction to the vertical direction with respect to the transport port 2 provided in the door. Then, by rotating the door 3 in the vertical direction, the transport port 2 can be closed, and the door 3
A conveyance section 6 that becomes part of the conveyance path 5 in a horizontally rotated state is provided on one side. [Function] When the door 3 is rotated vertically, the transport port 2 is closed, and when the door 3 is rotated horizontally, the transport section 6 is connected to the transport path 5 and becomes a part of the transport path 5.

[Embodiment] An embodiment embodying the present invention will be described below with reference to FIGS. 2 to 5. A conveyance port 2 is formed in a wall 1 provided in a conveyance path. A fireproof door 3 for opening and closing the transport port 2 has one end rotatably supported by a support device 4 provided at the lower edge of the transport port 2. A driving means (not shown) such as a motor or an energy storage spring is connected to the support device 4, and the door 3 is moved from the horizontal state shown in FIG. It is rotated up and down within the range of the vertical state shown in Figure 4,
When rotated to the vertical position, the transport port 2 is closed as shown in FIGS. 4 and 5.

Conveyance 1i! is displayed on the top surface of the door 3 in its horizontal state. 85 is formed, and when the door 3 is rotated in the horizontal direction, the conveyance section 6 is connected to the conveyance path 5 before and after it, as shown in FIGS. 2 and 3. It has become. A transport device 8 transports the carrier 7 containing the wafer.
is transported between each process via a transport path 5 and a transport section 6 on the door 3. Now, when the door 3 that is horizontally formed as described above is rotated in the horizontal direction in its open state, the conveying section 6 becomes a part of the conveying path 5, and when it is rotated in the vertical direction, it closes the conveying port 2. It becomes a fire door. Therefore, there is no need to provide a storage space for the door 3 along the wall surface, and even if storage space cannot be secured around the transport port 2, the door 3 can be easily installed.
[Effects of the Invention] As described in detail below, the present invention provides a fire door that does not require a storage space for the door to be secured on the wall surrounding the transport port that is opened and closed by the door. be effective.

[Brief explanation of drawings]

Figure 1 is an explanatory diagram of the principle of the present invention, Figure 2 is a vertical sectional view of a fire door embodying the present invention in an open state, Figure 3 is a plan view of the same, and Figure 4 is a closed view of the fire door. FIG. 5 is a cross-sectional view, and FIGS. 6 and 7 are perspective views showing a conventional example. In the figure, 1 is a wall surface, 2 is a conveyance port, 3 is a door, and 5 is a conveyance. Perspective view of other fire doors

Claims (1)

[Claims] 1. Close the door (3) to the transport port (2) provided on the wall (1).
) is supported so as to be rotatable from the horizontal direction to the vertical direction, and the transfer port (2) can be closed when it is rotated in the vertical direction, and on one side of the door (3) there is a A fire door characterized by being provided with a conveyance section (6) that becomes a part of a conveyance path (5).