Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP1989039999UpriorityCriticalpatent/JPH07903Y2/ja
Publication of JPH02131636UpublicationCriticalpatent/JPH02131636U/ja
Application grantedgrantedCritical
Publication of JPH07903Y2publicationCriticalpatent/JPH07903Y2/ja
The study of pressure measurement techniques and devices in the range of 10 (exp-1) to 10 (exp-5) torr(2 millipsi to 0. 2 micropsi)(Final Report, 1 Dec. 1989- 9 Jun. 1990)