JPH02131549U - - Google Patents

Info

Publication number
JPH02131549U
JPH02131549U JP3759089U JP3759089U JPH02131549U JP H02131549 U JPH02131549 U JP H02131549U JP 3759089 U JP3759089 U JP 3759089U JP 3759089 U JP3759089 U JP 3759089U JP H02131549 U JPH02131549 U JP H02131549U
Authority
JP
Japan
Prior art keywords
boat
cover part
reaction chamber
contacting
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3759089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3759089U priority Critical patent/JPH02131549U/ja
Publication of JPH02131549U publication Critical patent/JPH02131549U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP3759089U 1989-03-31 1989-03-31 Pending JPH02131549U (US06486227-20021126-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3759089U JPH02131549U (US06486227-20021126-C00005.png) 1989-03-31 1989-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3759089U JPH02131549U (US06486227-20021126-C00005.png) 1989-03-31 1989-03-31

Publications (1)

Publication Number Publication Date
JPH02131549U true JPH02131549U (US06486227-20021126-C00005.png) 1990-11-01

Family

ID=31544844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3759089U Pending JPH02131549U (US06486227-20021126-C00005.png) 1989-03-31 1989-03-31

Country Status (1)

Country Link
JP (1) JPH02131549U (US06486227-20021126-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0555543U (ja) * 1991-12-25 1993-07-23 国際電気株式会社 縦型減圧cvd装置用ボート

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169038A (ja) * 1983-03-16 1984-09-22 Hitachi Ltd ガス放電表示パネル

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169038A (ja) * 1983-03-16 1984-09-22 Hitachi Ltd ガス放電表示パネル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0555543U (ja) * 1991-12-25 1993-07-23 国際電気株式会社 縦型減圧cvd装置用ボート

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