JPH02130785U - - Google Patents
Info
- Publication number
- JPH02130785U JPH02130785U JP3875289U JP3875289U JPH02130785U JP H02130785 U JPH02130785 U JP H02130785U JP 3875289 U JP3875289 U JP 3875289U JP 3875289 U JP3875289 U JP 3875289U JP H02130785 U JPH02130785 U JP H02130785U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- arm
- intermediate chamber
- substrate holder
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989038752U JPH075997Y2 (ja) | 1989-03-31 | 1989-03-31 | アーム旋回形搬送機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989038752U JPH075997Y2 (ja) | 1989-03-31 | 1989-03-31 | アーム旋回形搬送機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02130785U true JPH02130785U (en, 2012) | 1990-10-29 |
| JPH075997Y2 JPH075997Y2 (ja) | 1995-02-15 |
Family
ID=31547043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989038752U Expired - Lifetime JPH075997Y2 (ja) | 1989-03-31 | 1989-03-31 | アーム旋回形搬送機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH075997Y2 (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6071595U (ja) * | 1983-10-25 | 1985-05-20 | 株式会社アマダ | 可動体破損防止装置 |
-
1989
- 1989-03-31 JP JP1989038752U patent/JPH075997Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6071595U (ja) * | 1983-10-25 | 1985-05-20 | 株式会社アマダ | 可動体破損防止装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH075997Y2 (ja) | 1995-02-15 |