JPH02128323A - Method and device for producing magnetic recording medium - Google Patents
Method and device for producing magnetic recording mediumInfo
- Publication number
- JPH02128323A JPH02128323A JP28079988A JP28079988A JPH02128323A JP H02128323 A JPH02128323 A JP H02128323A JP 28079988 A JP28079988 A JP 28079988A JP 28079988 A JP28079988 A JP 28079988A JP H02128323 A JPH02128323 A JP H02128323A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magnetic recording
- thin film
- lubricant
- film layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000000314 lubricant Substances 0.000 claims abstract description 54
- 239000010409 thin film Substances 0.000 claims abstract description 35
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 7
- 238000007740 vapor deposition Methods 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000009751 slip forming Methods 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 8
- 230000007547 defect Effects 0.000 abstract description 5
- 230000015271 coagulation Effects 0.000 abstract 3
- 238000005345 coagulation Methods 0.000 abstract 3
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 50
- 238000001704 evaporation Methods 0.000 description 14
- 230000008020 evaporation Effects 0.000 description 14
- 239000002245 particle Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 6
- 235000014113 dietary fatty acids Nutrition 0.000 description 6
- 229930195729 fatty acid Natural products 0.000 description 6
- 239000000194 fatty acid Substances 0.000 description 6
- 230000002776 aggregation Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 150000004665 fatty acids Chemical class 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 238000005054 agglomeration Methods 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- -1 fatty acid ester Chemical class 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は強磁性金属薄膜型磁気記録媒体の製造方法およ
び装置に関し、特に実用性能向上のため金属薄膜層形成
後にトップコート層として滑剤層を真空蒸着法により均
質の滑剤層を形成する磁気刃
記録媒体の製造)および製造装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method and apparatus for manufacturing a ferromagnetic metal thin film type magnetic recording medium, and in particular, to improve practical performance, a lubricant layer is vacuum-deposited as a top coat layer after forming a metal thin film layer. The present invention relates to a method for manufacturing a magnetic blade recording medium in which a homogeneous lubricant layer is formed by a method and a manufacturing apparatus.
従来の技術
Co、Ni、Feまたはそれらを主成分とする合金を真
空蒸着法、スパッタ法、イオングレーティング等の真空
成膜法によりポリエステルフィルムポリイミドフィルム
などの高分子フィルムや非磁性金属基板などからなる基
板上に形成した強磁性金属薄膜型磁気記録媒体は従来の
塗布型磁気記録媒体に比して記録密度を飛躍的に向上す
ることが可能であるが、この高記録密度化の念めの条件
として、記録再生欠陥を極力減少させるとともに、磁気
ヘッド、記録媒体間のスペーシングロスを極力低減させ
ることが重要であり、また記録媒体としては耐久性をも
兼ね備えていることが必要である。それらを解決するた
め、金属薄膜層形成後トップコートとしての、滑剤層形
成の方法の一つとして、脂肪酸、脂肪酸エステル、脂肪
酸アミド等の滑剤を真空蒸着法にて、形成する方法があ
る。Conventional technology Co, Ni, Fe, or alloys containing these as main components are formed into polyester films, polymer films such as polyimide films, non-magnetic metal substrates, etc. using vacuum film forming methods such as vacuum evaporation, sputtering, and ion grating. A ferromagnetic metal thin film magnetic recording medium formed on a substrate can dramatically improve the recording density compared to conventional coated magnetic recording media, but there are certain prerequisites for achieving this high recording density. Therefore, it is important to reduce recording and reproducing defects as much as possible, as well as to reduce spacing loss between the magnetic head and the recording medium as much as possible, and the recording medium must also have durability. To solve these problems, one method of forming a lubricant layer as a top coat after forming a metal thin film layer is to form a lubricant such as fatty acid, fatty acid ester, fatty acid amide, etc. by vacuum deposition.
以下図面を参照しながら、上述した磁気記録媒体の製造
法の一例について説明する。An example of a method for manufacturing the above-mentioned magnetic recording medium will be described below with reference to the drawings.
第4図は磁気記録媒体の断面構造を、第6図は従来の磁
気記録媒体の製造方法に用いる装置構成の概要を示すも
のである。FIG. 4 shows a cross-sectional structure of a magnetic recording medium, and FIG. 6 shows an outline of an apparatus configuration used in a conventional method of manufacturing a magnetic recording medium.
第4図において、1は非磁性基板、2は真空中成膜法に
より形成される強磁性金属薄膜層、3はバックコーティ
ング層、4はトップコート層としての滑剤層である。In FIG. 4, 1 is a nonmagnetic substrate, 2 is a ferromagnetic metal thin film layer formed by a vacuum deposition method, 3 is a back coating layer, and 4 is a lubricant layer as a top coat layer.
第6図において11はトップコート形成前の磁気記録媒
体であり、ロール状に巻かれている。In FIG. 6, reference numeral 11 denotes a magnetic recording medium before the formation of a top coat, which is wound into a roll.
12.14はパスローラ、13はメインローラであり、
磁気記録媒体を密着搬送している。16はトップコート
形成済の磁気記録媒体であり連続的に巻き取られている
。16は滑剤が充填された蒸発源、17は蒸発源16の
滑剤を間接的に加熱溶融し蒸発させる熱媒槽である。1
8は熱媒循環装置であり、これは熱媒の温度を制御する
とともに、熱媒槽17に熱媒を供給しており、真空槽外
に設けられている。19は防着板であり滑剤の蒸発粒子
が真空槽内の磁気記録媒体、あるいはそれを搬送する構
成要素部品の汚染を防止するために設けられている。2
0は蒸発レートモニターであり、蒸発量を検出して熱媒
循環装置18の熱媒の温度を調整するためのものである
。12.14 is a pass roller, 13 is a main roller,
The magnetic recording medium is conveyed closely. 16 is a magnetic recording medium on which a top coat has been formed and is continuously wound. 16 is an evaporation source filled with a lubricant, and 17 is a heat medium tank that indirectly heats and melts the lubricant in the evaporation source 16 to evaporate it. 1
8 is a heat medium circulation device, which controls the temperature of the heat medium and supplies the heat medium to the heat medium tank 17, and is provided outside the vacuum tank. Reference numeral 19 denotes an adhesion prevention plate, which is provided to prevent evaporated lubricant particles from contaminating the magnetic recording medium in the vacuum chamber or the component parts that convey it. 2
0 is an evaporation rate monitor, which is used to detect the amount of evaporation and adjust the temperature of the heat medium in the heat medium circulation device 18.
以上のように構成された従来の磁気記録媒体の製造装置
について、以下その動作を説明する。The operation of the conventional magnetic recording medium manufacturing apparatus configured as described above will be described below.
強磁性金属薄膜層2を形成し念非磁性体基板上に滑剤層
4を真空蒸着法にて形成する場合、まず滑剤を蒸発源1
6にて溶融させ、規定の蒸発量になった時点で、基板を
搬送させトップコートとして滑剤層4を形成する。When forming the ferromagnetic metal thin film layer 2 and forming the lubricant layer 4 on the non-magnetic substrate by vacuum evaporation, first, the lubricant is applied to the evaporation source 1.
The lubricant layer 4 is melted in step 6, and when a specified amount of evaporation is reached, the substrate is transported and a lubricant layer 4 is formed as a top coat.
発明が解決しようとする課題
しかしながら上記従来の真空蒸着法によりトップコート
として滑剤層を形成する場合、成膜速度を向上させるた
めに滑剤の蒸発速度を上昇させると、滑剤が凝集を起こ
し、均質な滑剤層の形成ができなくなる。また凝集した
滑剤の一部が装置内のローラ等に付着し、装置の汚染を
助長するばかりでなく、ビデオテープレコーダでの記録
再生においても、磁気ヘッド、回転シリンダ、テープ走
行用ポスト等が汚染され、記録再生欠陥として、ドロッ
プアウトが増加するため、成膜速度を上げることが困難
になるという問題があった。Problems to be Solved by the Invention However, when forming a lubricant layer as a top coat using the conventional vacuum evaporation method described above, if the evaporation rate of the lubricant is increased in order to improve the film formation rate, the lubricant will coagulate and become homogeneous. It becomes impossible to form a lubricant layer. In addition, some of the aggregated lubricant adheres to the rollers, etc. inside the device, which not only promotes contamination of the device, but also contaminates the magnetic head, rotating cylinder, tape running post, etc. during recording and playback with a video tape recorder. However, since dropouts increase as recording/reproducing defects, there is a problem in that it becomes difficult to increase the film formation rate.
本発明は上記問題点に鑑み、成膜速度を向上させつつ滑
剤の凝集の少ない、真空蒸着法による磁気記録媒体の製
造方法およびその装置を提供するものである。In view of the above-mentioned problems, the present invention provides a method and apparatus for manufacturing a magnetic recording medium using a vacuum evaporation method, which improves the film formation rate and reduces aggregation of lubricant.
課題を解決するための手段
上記課題を解決するため本発明の磁気記録媒体の製造方
法は、非磁性基板上に強磁性金属薄膜を形成した磁気記
録媒体を一定方向に走行させ、その上にトップコートと
して滑剤層を真空蒸着法により連続的に形成する方法に
おいて、走行する前記磁気記録媒体に対向して電極板を
設け、この電極板と前記強磁性金属薄膜層との間に電位
を印加することを特徴とする。Means for Solving the Problems In order to solve the above problems, the method for manufacturing a magnetic recording medium of the present invention consists of running a magnetic recording medium in which a ferromagnetic metal thin film is formed on a non-magnetic substrate in a fixed direction, and placing a top layer on top of the magnetic recording medium. In a method of continuously forming a lubricant layer as a coating by vacuum evaporation, an electrode plate is provided opposite the running magnetic recording medium, and a potential is applied between the electrode plate and the ferromagnetic metal thin film layer. It is characterized by
また本発明の磁気記録媒体の製造装置は、非磁性基板上
に強磁性金属薄膜層を形成した磁気記録媒体を一定方向
に移送するための移送装置と、前記磁気記録媒体の移送
経路上で前記強磁性金属薄膜層上に真空蒸着法によりト
ップコート層として滑剤層を形成するための蒸着装置と
を備えた磁気記録媒体の製造装置において、前記移送装
置は、前記磁気記録媒体の背面が密着して走行するメイ
ンローラと前記磁気記録媒体の強磁性金属薄膜層側が密
着して走行するパスローラからなり、前記メインローラ
の外周に対向して電極板を設け、さらにこの電極板と前
記バスローラ外周に電圧を印加する電源を設けたことを
特徴とする特許
本発明によれば、強磁性金属薄膜層と電極板の間に電圧
を印加することにより、強磁性金属薄膜層上での蒸着の
エネルギーが高くなり、その結果滑剤粒子の凝集が防止
される。また、滑剤粒子が強磁性金属薄膜層上に到達し
た時には強固に結合し、さらに静電力の作用で滑剤の拡
散が容易に行なわれ、均質な滑剤層を形成する仁とがで
きる。The apparatus for manufacturing a magnetic recording medium of the present invention further includes a transport device for transporting a magnetic recording medium in which a ferromagnetic metal thin film layer is formed on a non-magnetic substrate in a fixed direction, and a A manufacturing apparatus for a magnetic recording medium, which includes a vapor deposition device for forming a lubricant layer as a top coat layer on a ferromagnetic metal thin film layer by vacuum vapor deposition, wherein the transfer device is configured such that the back surface of the magnetic recording medium is in close contact with the magnetic recording medium. It consists of a main roller that runs on the magnetic recording medium and a pass roller that runs in close contact with the ferromagnetic metal thin film layer side of the magnetic recording medium.An electrode plate is provided opposite the outer periphery of the main roller, and a voltage is applied between the electrode plate and the outer periphery of the bus roller. According to the present invention, the energy of vapor deposition on the ferromagnetic metal thin film layer is increased by applying a voltage between the ferromagnetic metal thin film layer and the electrode plate. As a result, agglomeration of lubricant particles is prevented. Further, when the lubricant particles reach the ferromagnetic metal thin film layer, they are firmly bonded, and the lubricant particles are easily diffused by the action of electrostatic force, forming a homogeneous lubricant layer.
従って、凝集した滑剤がローラ等に付着して装置の汚染
を助長することがなくなり、記録再生欠陥としてのドロ
ップアウトの大幅な低減が可能となる。Therefore, the aggregated lubricant does not adhere to the rollers or the like and promote contamination of the apparatus, and dropouts as recording/reproducing defects can be significantly reduced.
実施例
以下本発明の一実施例について図面を参照しながら説明
する。EXAMPLE An example of the present invention will be described below with reference to the drawings.
第1図は本発明の実施例における装置構成の概要を示す
。本実施例において製造される磁気記録媒体の基本構造
は第4図に示す従来のものと同様であり、本実施例では
3〜20μ墓のPITフィルムを非磁性基板1とし、0
.1〜0.2μmのGo−Ni の斜方蒸着により強
磁性金属薄膜層2を形成し、走行性改善のため、裏面に
バックコーティング層3として樹脂とカーボンの混合体
を約0.3〜1μm塗布している。FIG. 1 shows an outline of the device configuration in an embodiment of the present invention. The basic structure of the magnetic recording medium manufactured in this example is the same as that of the conventional one shown in FIG.
.. A ferromagnetic metal thin film layer 2 is formed by oblique evaporation of Go-Ni with a thickness of 1 to 0.2 μm, and a mixture of resin and carbon is coated on the back side with a thickness of approximately 0.3 to 1 μm as a back coating layer 3 to improve running properties. It is being applied.
第1図において、21は滑剤層4形成前の磁気記録媒体
であり滑剤層4形成域へ送り出され、その張力は600
fl輻相当で0.5〜20〜fに制御されている。22
.24はパスローラで磁気記録媒体と密着し回転する。In FIG. 1, 21 is a magnetic recording medium before the formation of the lubricant layer 4, and is sent to the area where the lubricant layer 4 is formed, and its tension is 600.
It is controlled to be 0.5-20-f corresponding to fl radiation. 22
.. A pass roller 24 rotates in close contact with the magnetic recording medium.
23はメインローラで磁気記録媒体を定速(0,1〜2
00m/分)で制御し搬送している。26は滑剤層4形
成済の磁気記録媒体であり、5oots幅相当で0.6
〜20Kgfの張力で連続的に巻きとられており、テー
バ張力の制御も可能である。26は蒸発源であり、この
中には滑剤として、脂肪酸、脂肪酸エステル、脂肪酸ア
ミド等が充填されており、溶融して蒸着される。27は
熱媒槽であり、これによって滑剤を加熱溶融させている
。28は真空槽外に設けられた熱媒循環装置であり、こ
れによって熱媒の温度を制御するとともに熱媒槽27に
熱媒を供給している。29は防着板であり、これにより
滑剤の蒸発粒子が真空槽内の磁気記録媒体あるいはそれ
を搬送する構成要素部品の汚染を防止しており、強磁性
金属薄膜層2に通電するため、絶縁物にて制作されてい
る。30に蒸発レートモニタで、滑剤粒子の蒸発量を検
出し、熱媒循環装置28の熱媒の温度を制御している。23 is a main roller that moves the magnetic recording medium at a constant speed (0, 1 to 2
00m/min). 26 is a magnetic recording medium on which a lubricant layer 4 has been formed, and the width is 0.6 equivalent to 5 oots width.
It is continuously wound with a tension of ~20 Kgf, and the Taber tension can also be controlled. Reference numeral 26 denotes an evaporation source, which is filled with a fatty acid, a fatty acid ester, a fatty acid amide, etc. as a lubricant, and is melted and vapor deposited. A heating medium tank 27 heats and melts the lubricant. 28 is a heat medium circulation device provided outside the vacuum chamber, which controls the temperature of the heat medium and supplies the heat medium to the heat medium tank 27. Reference numeral 29 denotes an anti-adhesion plate, which prevents evaporated lubricant particles from contaminating the magnetic recording medium in the vacuum chamber or the component parts that convey it. It is made of material. An evaporation rate monitor 30 detects the amount of evaporation of lubricant particles and controls the temperature of the heat medium in the heat medium circulation device 28.
31はシャッタであり、所定の蒸発速度に達してから開
放され基板に蒸着が開始される。32は電極板、33は
真空槽外に設けられた電源で、パスローラ22.24を
介して強磁性金属薄膜層2と電極板32との間に電圧を
印加しており、3000Vの容量を有する。・以上のよ
うに構成された本発明の磁気記録媒体δ
の製血および製造装置について、第1図を用いてその動
作を説明する。A shutter 31 is opened after a predetermined evaporation rate is reached, and evaporation begins on the substrate. 32 is an electrode plate, 33 is a power supply provided outside the vacuum chamber, which applies voltage between the ferromagnetic metal thin film layer 2 and the electrode plate 32 via pass rollers 22, 24, and has a capacity of 3000V. . - The operation of the magnetic recording medium δ production and production apparatus of the present invention constructed as described above will be explained with reference to FIG.
滑剤層4形成前の磁気記録媒体は強磁性金属薄膜層2に
トップコートとして滑剤層4を形成するため、パスロー
ラあるいは巻出し、巻取軸より通電されながら連続的に
、メインローラに密着して送られている。また滑剤は熱
媒循環装置28からの熱媒により加熱溶融され蒸発を開
始するが規定の蒸発レートになった時点でシャッタ31
が開放され、磁気記録媒体に滑剤粒子が到達し滑剤層4
が形成される。このとき、強磁性金属薄膜層2と電極板
32との間に電圧を印加しているため蒸着・エネルギー
が向上し、滑剤粒子の凝集を防ぐとともに、強磁性金属
薄膜層2と強固に結合し、また静電力により滑剤粒子は
均一に金属薄膜層に拡散し均質な滑剤層を形成すること
ができる。In order to form the lubricant layer 4 as a top coat on the ferromagnetic metal thin film layer 2, the magnetic recording medium before the lubricant layer 4 is formed is continuously brought into close contact with the main roller while being energized from the pass roller or the unwinding or winding shaft. being sent. The lubricant is heated and melted by the heat medium from the heat medium circulation device 28 and starts to evaporate.
is released, and the lubricant particles reach the magnetic recording medium and form the lubricant layer 4.
is formed. At this time, since a voltage is applied between the ferromagnetic metal thin film layer 2 and the electrode plate 32, the deposition energy is improved, preventing agglomeration of lubricant particles and firmly bonding with the ferromagnetic metal thin film layer 2. Further, the lubricant particles are uniformly diffused into the metal thin film layer by electrostatic force, and a homogeneous lubricant layer can be formed.
第2図は、滑剤層4の形成条件として、非磁性基板1の
幅5ootar、強磁性金属薄膜層2の厚み0.16μ
m゛、メインローラ径1mt形成速度30m/分の場合
において、強磁性金属薄膜層2と電極板32との間に印
加電圧を変化させたときのドロップアウト数の変化を示
す。FIG. 2 shows the conditions for forming the lubricant layer 4: the width of the nonmagnetic substrate 1 is 5ootar, and the thickness of the ferromagnetic metal thin film layer 2 is 0.16μ.
Figure 3 shows the change in the number of dropouts when the voltage applied between the ferromagnetic metal thin film layer 2 and the electrode plate 32 is changed in the case where the main roller diameter is 1 m and the forming speed is 30 m/min.
なお、第2図のグラフの横軸にとり喪印加電圧の単位と
してVを用いている。Note that V is used as the unit of applied voltage on the horizontal axis of the graph in FIG.
またドロップアウト数は回転シリンダ型ビデオテープレ
コーダを用いて、テープ幅8 ff 、相対速度3.8
m / S 、テープ速度1.4cIn/s、)ラッ
クピッチ約20InIで映像信号を10分間記録再生し
たとき、15μs以上の間1sdB以上信号の欠除した
回数の1分間当りの平均値である。The number of dropouts was determined using a rotating cylinder type video tape recorder with a tape width of 8 ff and a relative speed of 3.8.
m/S, tape speed 1.4 cIn/s, tape speed 1.4 cIn/s) When a video signal is recorded and reproduced for 10 minutes at a rack pitch of about 20 InI, it is the average value per minute of the number of times the signal is deleted for 1 sdB or more for 15 μs or more.
第2図のグラフかられかるように、印加電圧が300〜
1200Vの範囲でドロップアウト数の顕著な低減が認
められ、この範囲で充分実用が可能であることがわかる
。As can be seen from the graph in Figure 2, the applied voltage is 300~
A remarkable reduction in the number of dropouts was observed in the range of 1200V, indicating that practical use is possible within this range.
発明の効果
以上のように本発明によれば、非磁性基板に強磁性金属
薄膜層を形成した磁気記録媒体に、トップコート層とし
ての滑剤層を真空蒸着法によって、電極板と金属薄膜層
の間に電圧を印加しながら形成することにより、成膜速
度を向上させつつ滑剤の凝集を減少させることができ、
その結果記録再生欠陥としてのドロップアウトが大幅に
低減するという特有の効果を有する。Effects of the Invention As described above, according to the present invention, a lubricant layer as a top coat layer is applied to a magnetic recording medium in which a ferromagnetic metal thin film layer is formed on a nonmagnetic substrate by a vacuum evaporation method. By forming the film while applying a voltage between the two, it is possible to increase the film formation speed and reduce the aggregation of the lubricant.
As a result, it has the unique effect of significantly reducing dropouts as recording/reproduction defects.
第1図は本発明の一実施例における装置構成の概要を示
す図、第2図はドロップアウト数と印加電圧との関係を
成膜速度一定の場合について示す図、第3図は従来の方
法におけるドロップアウト数と成膜速度との関係を示す
図、第4図は磁気記録媒体の構造を示す断面図、第5図
は従来例の磁気記録媒体の製品を示す図である。
1・・・・・・非磁性基板、2・・・・・・強磁性金属
薄膜層、4・・・・・・滑剤層、21・・・・・・磁気
記録媒体、22゜24°゛°°°パスローラ、23・・
・・・・メインローラ、26・・・・・・滑剤層形成済
磁気記録媒体、26・・・・・・蒸発源、27・・・・
・・熱媒層、28・・・・・・熱媒循環装置、321.
101.電極板、33・旧・・電位印加用電源。
代理人の氏名 弁理士 粟 野 重 孝 ほか1名菓
図
ドロツブアウI文と印sJ吃ヱ
A項濃浸
川A分
区
!r
慨
区
U】
憾Fig. 1 is a diagram showing an overview of the equipment configuration in an embodiment of the present invention, Fig. 2 is a diagram showing the relationship between the number of dropouts and the applied voltage when the deposition rate is constant, and Fig. 3 is a diagram showing the conventional method. FIG. 4 is a cross-sectional view showing the structure of a magnetic recording medium, and FIG. 5 is a diagram showing a conventional magnetic recording medium product. 1...Nonmagnetic substrate, 2...Ferromagnetic metal thin film layer, 4...Lubricant layer, 21...Magnetic recording medium, 22°24°゛°°°Pass roller, 23...
... Main roller, 26 ... Magnetic recording medium with lubricant layer formed, 26 ... Evaporation source, 27 ...
... Heat medium layer, 28 ... Heat medium circulation device, 321.
101. Electrode plate, 33. Old power source for applying potential. Agent's name: Patent attorney Shigetaka Awano and one other person. r
Claims (2)
録媒体を一定方向に走行させ、その上にトップコートと
して滑剤層を真空蒸着法により連続的に形成する方法に
おいて、走行する前記磁気記録媒体に対向して電極板を
設け、この電極板と前記強磁性金属薄膜層との間に電位
を印加することを特徴とする磁気記録媒体の製造方法。(1) In a method in which a magnetic recording medium having a ferromagnetic metal thin film formed on a non-magnetic substrate is run in a fixed direction, and a lubricant layer is continuously formed as a top coat thereon by a vacuum evaporation method, the running magnetic 1. A method of manufacturing a magnetic recording medium, comprising: providing an electrode plate facing the recording medium; and applying a potential between the electrode plate and the ferromagnetic metal thin film layer.
記録媒体を一定方向に移送するための移送装置と、前記
磁気記録媒体の移送経路上で前記強磁性金属薄膜層上に
真空蒸着法によりトップコート層として滑剤層を形成す
るための蒸着装置とを備えた磁気記録媒体の製造装置に
おいて、前記移送装置は、前記磁気記録媒体の背面が密
着して走行するメインローラと前記磁気記録媒体の強磁
性金属薄膜層側が密着して走行するパスローラからなり
、前記メインローラの外周に対向して電極板を設け、さ
らにこの電極板と前記パスローラ外周に電圧を印加する
電源を設けたことを特徴とする磁気記録媒体の製造装置
。(2) A transport device for transporting a magnetic recording medium in a fixed direction, in which a ferromagnetic metal thin film layer is formed on a nonmagnetic substrate, and a vacuum vapor deposition device on the ferromagnetic metal thin film layer on the transport path of the magnetic recording medium. and a vapor deposition device for forming a lubricant layer as a top coat layer by a method, the transfer device includes a main roller that runs with the back side of the magnetic recording medium in close contact with the magnetic recording medium, It consists of a pass roller that runs in close contact with the ferromagnetic metal thin film layer side of the medium, an electrode plate is provided opposite to the outer periphery of the main roller, and a power source is further provided to apply voltage to the electrode plate and the outer periphery of the pass roller. Features: Magnetic recording media manufacturing equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63280799A JP2563534B2 (en) | 1988-11-07 | 1988-11-07 | Method and apparatus for manufacturing magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63280799A JP2563534B2 (en) | 1988-11-07 | 1988-11-07 | Method and apparatus for manufacturing magnetic recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02128323A true JPH02128323A (en) | 1990-05-16 |
JP2563534B2 JP2563534B2 (en) | 1996-12-11 |
Family
ID=17630134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63280799A Expired - Fee Related JP2563534B2 (en) | 1988-11-07 | 1988-11-07 | Method and apparatus for manufacturing magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2563534B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011001632A (en) * | 2009-05-20 | 2011-01-06 | Fujifilm Corp | Functional film, method for manufacturing the functional film, and apparatus for manufacturing the functional film |
-
1988
- 1988-11-07 JP JP63280799A patent/JP2563534B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011001632A (en) * | 2009-05-20 | 2011-01-06 | Fujifilm Corp | Functional film, method for manufacturing the functional film, and apparatus for manufacturing the functional film |
Also Published As
Publication number | Publication date |
---|---|
JP2563534B2 (en) | 1996-12-11 |
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