JPH0212800Y2 - - Google Patents

Info

Publication number
JPH0212800Y2
JPH0212800Y2 JP2021882U JP2021882U JPH0212800Y2 JP H0212800 Y2 JPH0212800 Y2 JP H0212800Y2 JP 2021882 U JP2021882 U JP 2021882U JP 2021882 U JP2021882 U JP 2021882U JP H0212800 Y2 JPH0212800 Y2 JP H0212800Y2
Authority
JP
Japan
Prior art keywords
sound wave
membrane
vibrating membrane
fixed electrode
back side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2021882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58123699U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2021882U priority Critical patent/JPS58123699U/ja
Publication of JPS58123699U publication Critical patent/JPS58123699U/ja
Application granted granted Critical
Publication of JPH0212800Y2 publication Critical patent/JPH0212800Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Diaphragms For Electromechanical Transducers (AREA)
  • Obtaining Desirable Characteristics In Audible-Bandwidth Transducers (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
JP2021882U 1982-02-15 1982-02-15 静電型振動子 Granted JPS58123699U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021882U JPS58123699U (ja) 1982-02-15 1982-02-15 静電型振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021882U JPS58123699U (ja) 1982-02-15 1982-02-15 静電型振動子

Publications (2)

Publication Number Publication Date
JPS58123699U JPS58123699U (ja) 1983-08-23
JPH0212800Y2 true JPH0212800Y2 (cs) 1990-04-10

Family

ID=30032392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021882U Granted JPS58123699U (ja) 1982-02-15 1982-02-15 静電型振動子

Country Status (1)

Country Link
JP (1) JPS58123699U (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2008224542B2 (en) 2007-03-14 2012-01-19 Qualcomm Incorporated MEMS microphone

Also Published As

Publication number Publication date
JPS58123699U (ja) 1983-08-23

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