JPH02127031U - - Google Patents
Info
- Publication number
- JPH02127031U JPH02127031U JP3708789U JP3708789U JPH02127031U JP H02127031 U JPH02127031 U JP H02127031U JP 3708789 U JP3708789 U JP 3708789U JP 3708789 U JP3708789 U JP 3708789U JP H02127031 U JPH02127031 U JP H02127031U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- generation chamber
- plasma generation
- partition wall
- sample processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004380 ashing Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989037087U JPH0744017Y2 (ja) | 1989-03-28 | 1989-03-28 | プラズマアッシング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989037087U JPH0744017Y2 (ja) | 1989-03-28 | 1989-03-28 | プラズマアッシング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02127031U true JPH02127031U (OSRAM) | 1990-10-19 |
| JPH0744017Y2 JPH0744017Y2 (ja) | 1995-10-09 |
Family
ID=31543883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989037087U Expired - Lifetime JPH0744017Y2 (ja) | 1989-03-28 | 1989-03-28 | プラズマアッシング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744017Y2 (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62213126A (ja) * | 1986-03-13 | 1987-09-19 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
| JPS64326U (OSRAM) * | 1987-06-19 | 1989-01-05 |
-
1989
- 1989-03-28 JP JP1989037087U patent/JPH0744017Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62213126A (ja) * | 1986-03-13 | 1987-09-19 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
| JPS64326U (OSRAM) * | 1987-06-19 | 1989-01-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0744017Y2 (ja) | 1995-10-09 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |