JPH02127027U - - Google Patents
Info
- Publication number
- JPH02127027U JPH02127027U JP3705589U JP3705589U JPH02127027U JP H02127027 U JPH02127027 U JP H02127027U JP 3705589 U JP3705589 U JP 3705589U JP 3705589 U JP3705589 U JP 3705589U JP H02127027 U JPH02127027 U JP H02127027U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- internal space
- chamber
- plasma cvd
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3705589U JPH02127027U (enExample) | 1989-03-30 | 1989-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3705589U JPH02127027U (enExample) | 1989-03-30 | 1989-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02127027U true JPH02127027U (enExample) | 1990-10-19 |
Family
ID=31543824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3705589U Pending JPH02127027U (enExample) | 1989-03-30 | 1989-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02127027U (enExample) |
-
1989
- 1989-03-30 JP JP3705589U patent/JPH02127027U/ja active Pending
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