JPH02126417A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH02126417A JPH02126417A JP27980188A JP27980188A JPH02126417A JP H02126417 A JPH02126417 A JP H02126417A JP 27980188 A JP27980188 A JP 27980188A JP 27980188 A JP27980188 A JP 27980188A JP H02126417 A JPH02126417 A JP H02126417A
- Authority
- JP
- Japan
- Prior art keywords
- film
- carboxylic acid
- hard carbon
- magnetic recording
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 36
- 239000000314 lubricant Substances 0.000 claims abstract description 20
- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 18
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 15
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims abstract description 13
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims abstract description 12
- 239000010408 film Substances 0.000 claims description 38
- 239000002184 metal Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 12
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 11
- 239000011737 fluorine Substances 0.000 claims description 11
- 229910052731 fluorine Inorganic materials 0.000 claims description 11
- 239000000758 substrate Substances 0.000 abstract description 12
- 238000004544 sputter deposition Methods 0.000 abstract description 10
- -1 polyethylene terephthalate Polymers 0.000 abstract description 9
- 239000004215 Carbon black (E152) Substances 0.000 abstract description 8
- 229930195733 hydrocarbon Natural products 0.000 abstract description 8
- 150000002430 hydrocarbons Chemical class 0.000 abstract description 8
- 229910052742 iron Inorganic materials 0.000 abstract description 3
- 229910052759 nickel Inorganic materials 0.000 abstract description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 3
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract description 2
- 239000002985 plastic film Substances 0.000 abstract description 2
- 229920006255 plastic film Polymers 0.000 abstract description 2
- 229920000728 polyester Polymers 0.000 abstract description 2
- 229920000098 polyolefin Polymers 0.000 abstract description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 235000014113 dietary fatty acids Nutrition 0.000 description 7
- 239000000194 fatty acid Substances 0.000 description 7
- 229930195729 fatty acid Natural products 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 150000004665 fatty acids Chemical class 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000001050 lubricating effect Effects 0.000 description 4
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 125000002843 carboxylic acid group Chemical group 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910017464 nitrogen compound Inorganic materials 0.000 description 2
- 150000002830 nitrogen compounds Chemical class 0.000 description 2
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 2
- 125000005062 perfluorophenyl group Chemical group FC1=C(C(=C(C(=C1F)F)F)F)* 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- JLTDJTHDQAWBAV-UHFFFAOYSA-N N,N-dimethylaniline Chemical compound CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 150000001733 carboxylic acid esters Chemical class 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002191 fatty alcohols Chemical class 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 125000005462 imide group Chemical group 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002762 monocarboxylic acid derivatives Chemical group 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- VEBKXAIAEQLIIR-UHFFFAOYSA-N octyl 2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-pentadecafluorooctanoate Chemical compound CCCCCCCCOC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F VEBKXAIAEQLIIR-UHFFFAOYSA-N 0.000 description 1
- PCIUEQPBYFRTEM-UHFFFAOYSA-N perfluorodecanoic acid Chemical compound OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F PCIUEQPBYFRTEM-UHFFFAOYSA-N 0.000 description 1
- SNGREZUHAYWORS-UHFFFAOYSA-N perfluorooctanoic acid Chemical compound OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F SNGREZUHAYWORS-UHFFFAOYSA-N 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高密度磁気記録媒体に適する強磁性金属薄膜
型磁気記録媒体に関するものであり、詳しくは、磁気テ
ープ、磁気ディスク、磁気シートなど強磁性金属薄膜を
磁気記録層とする磁気記録媒体に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a ferromagnetic metal thin film magnetic recording medium suitable for high-density magnetic recording media. The present invention relates to a magnetic recording medium that uses a metal thin film as a magnetic recording layer.
従来の技術
磁気記録分野においては、近年デジタル化、小型化、長
時間化などの高性能化が進んでいるが。Conventional technology In the field of magnetic recording, performance improvements such as digitization, miniaturization, and longer recording times have been progressing in recent years.
それにともなって高密度磁気記録媒体の要求が高まり、
磁気記録層を強磁性金属薄膜で構成した磁気記録媒体が
、短波長記録に極めて有利なことから、盛んに検討され
ている。Along with this, the demand for high-density magnetic recording media has increased.
Magnetic recording media in which the magnetic recording layer is composed of a ferromagnetic metal thin film are being actively studied because they are extremely advantageous for short wavelength recording.
しかしながら1強磁性金属薄膜型の磁気記録媒体では、
磁性層表面は極めて良好な表面性を持つために、磁気信
号の記録、再生過程における磁気ヘッドとの高速摺動下
での摩擦、摩耗により、耐久性、走行性、耐蝕性などは
大きな影響を受けており、その改善は大きな問題となっ
ている。However, in a ferromagnetic metal thin film type magnetic recording medium,
Because the surface of the magnetic layer has extremely good surface properties, durability, runnability, and corrosion resistance are greatly affected by friction and wear caused by high-speed sliding with the magnetic head during the recording and reproducing process of magnetic signals. Improvements have become a major issue.
そこで、磁性層表面にトップコート層を設け。Therefore, a top coat layer is provided on the surface of the magnetic layer.
上記耐久性や走行性、耐蝕性の改善が試みられている。Attempts have been made to improve the durability, runnability, and corrosion resistance.
たとえば、脂肪酸金属塩の蒸着膜の形成(特開昭54−
113303号公報)、イミド基を有する高分子のスパ
ッタ膜の形成(特開昭57−116771号公報)、高
分子をターゲットとしてスパッタ膜、カーボンやBN、
MoS、 、 SiO□などをスパッタや蒸着により
薄膜化したダイヤモンド状硬質炭素膜の形成(日本応用
磁気学会、第46回研究会資料)、脂肪酸、脂肪酸アミ
ドなどの潤滑層の形成(たとえば、特公昭56−306
09号公報)など、数多く試みられている。For example, formation of a vapor-deposited film of fatty acid metal salt (Japanese Patent Application Laid-Open No. 1989-1999)
113303), formation of sputtered films of polymers having imide groups (JP-A-57-116771), sputtered films using polymers as targets, carbon, BN,
Formation of a diamond-like hard carbon film made by sputtering or vapor deposition of MoS, , SiO□, etc. (Japan Society of Applied Magnetics, 46th research meeting materials), formation of a lubricating layer of fatty acids, fatty acid amides, etc. (for example, 56-306
Many attempts have been made, including Publication No. 09).
しかしながら、上記した例では、耐久性、走行性、耐蝕
性などを十分には満足することができないため、積層化
してそれぞれの役割を分担する考え方が増加してきてい
る。However, in the above-mentioned examples, durability, runnability, corrosion resistance, etc. cannot be fully satisfied, so the idea of laminating them and sharing their respective roles is increasing.
脂肪酸金属塩の吸着層上にフルオロカーボン系の潤滑層
を形成したもの(特開昭61−120331号公報)、
硬質カーボン層の上に含フッ素潤滑油を配したもの(特
開昭61−126627号公報) 、 5i−N−0系
薄膜上に潤滑層を形成したもの(特開昭61−1312
31号公報)などがある。one in which a fluorocarbon-based lubricating layer is formed on an adsorption layer of fatty acid metal salt (Japanese Patent Application Laid-open No. 120331/1983);
One in which a fluorine-containing lubricating oil is placed on a hard carbon layer (Japanese Unexamined Patent Publication No. 126627/1982), and one in which a lubricant layer is formed on a 5i-N-0 thin film (Japanese Unexamined Patent Publication No. 61-1312).
Publication No. 31).
発明が解決しようとする課題
しかしながら、上記した構成においても、磁気記録媒体
の耐久性に関する要求は厳しく、十分な特性であるとは
いえず、なお−層の改善が望まれている。Problems to be Solved by the Invention However, even with the above-described configuration, the requirements regarding the durability of the magnetic recording medium are severe, and the characteristics cannot be said to be sufficient, and improvements in the layers are still desired.
本発明は、上記問題を解決するもので、耐久性に優れ、
極めて高い信頼性の磁気記録媒体を提供することを目的
とするものである。The present invention solves the above problems and has excellent durability.
The purpose is to provide a highly reliable magnetic recording medium.
課題を解決するための手段
上記課題を解決するために1本発明の磁気記録媒体は、
強磁性金属膜上に硬質炭素膜、含窒素プラズマ重合膜、
含フッ素カルボン酸を含む潤滑剤層を順次形成したもの
である。Means for Solving the Problems In order to solve the above problems, one magnetic recording medium of the present invention includes:
Hard carbon film, nitrogen-containing plasma polymerized film on ferromagnetic metal film,
A lubricant layer containing a fluorine-containing carboxylic acid is sequentially formed.
作用
上記構成により、含フッ素カルボン酸を含む潤滑剤層が
、含窒素プラズマ重合膜を介して均一にかつ強固に硬質
炭素膜を被覆することができるため、少ない滑剤量で十
分な潤滑効果を発揮し、かつ硬質炭素膜も薄くできる。Effect: With the above structure, the lubricant layer containing fluorine-containing carboxylic acid can uniformly and firmly cover the hard carbon film via the nitrogen-containing plasma polymerized film, so a sufficient lubricating effect can be achieved with a small amount of lubricant. Moreover, the hard carbon film can also be made thinner.
これらによって1重大なスペーシング損失を蒙ることな
しに、優れた耐久性を得ることができ、極めて高い信頼
性を確保することができるものである。As a result, excellent durability can be obtained without suffering a significant spacing loss, and extremely high reliability can be ensured.
実施例
以下、本発明の一実施例の磁気記録媒体について、図面
を参照しながら説明する。EXAMPLE Hereinafter, a magnetic recording medium according to an example of the present invention will be described with reference to the drawings.
第1図は本発明に係る磁気記録媒体の一実施例である磁
気テープの構成を示す断面図である。第1図において、
1は非磁性支持板としての基板、2は基板1の上に形成
された強磁性金属薄膜である。3は硬質炭素膜、4は含
窒素プラズマ重合膜。FIG. 1 is a sectional view showing the structure of a magnetic tape which is an embodiment of the magnetic recording medium according to the present invention. In Figure 1,
1 is a substrate serving as a nonmagnetic support plate; 2 is a ferromagnetic metal thin film formed on the substrate 1; 3 is a hard carbon film, and 4 is a nitrogen-containing plasma polymerized film.
5は含フッ素カルボン酸を含む潤滑剤層で、強磁性金属
薄膜2の上に順次形成されている。Reference numeral 5 denotes a lubricant layer containing a fluorine-containing carboxylic acid, which is successively formed on the ferromagnetic metal thin film 2.
基板1は、ポリエチレンテレフタレートフィルムがよく
用いられるが、他のポリエステル類、ボップロピレンな
どのポリオレフィン類、セルロースアセテートなどのセ
ルロース誘導体、ポリアミド、ポリイミドなどのプラス
チックフィルムであってもよいし、非磁性金属基板であ
ってもよい。Although a polyethylene terephthalate film is often used as the substrate 1, it may also be a plastic film made of other polyesters, polyolefins such as vopropylene, cellulose derivatives such as cellulose acetate, polyamide, polyimide, etc., or a nonmagnetic metal substrate. It may be.
また、強磁性金属薄[2は、電子ビーム蒸着法、スパッ
タリング法、イオンブレーティング法、無電界メツキ法
で形成した鉄、コバルト、ニッケルまたはそれらを主成
分とする合金、あるいはそれらの部分酸化膜、部分窒化
膜などを用いることができる。In addition, ferromagnetic metal thin [2] is iron, cobalt, nickel, or alloys mainly composed of iron, cobalt, nickel, or their partially oxidized films formed by electron beam evaporation, sputtering, ion blating, or electroless plating. , a partial nitride film, etc. can be used.
また、硬質炭素膜3は、炭化水素ガスのプラズマや、カ
ーボンまたはグラファイトを不活性ガスまたは不活性ガ
スと炭化水素ガスの雰囲気中でスパッタによって形成す
ることができる。Further, the hard carbon film 3 can be formed by plasma of a hydrocarbon gas or sputtering of carbon or graphite in an inert gas or an atmosphere of an inert gas and a hydrocarbon gas.
硬質炭素膜3を炭化水素ガスのプラズマによって形成す
る場合には、真空容器中に炭化水素ガスまたは炭化水素
ガスと不活性ガスの混合ガスを導入し、 0.001〜
l Torrの圧力を保持した状態で真空容器内部に放
電させて、炭化水素のプラズマを発生させ、基体1の表
面に硬質炭素膜3を形成する。放電形式としては、外部
電極方式、内部電極方式の何れの方式でもよく、放電周
波数については、実験的に決めることができる。また、
基体1側の電極にO〜−3にVの電圧を印加することに
よって、膜の硬度の増大および密着性を向上させること
ができる。炭化水素としては、メタン、エタン、プロパ
ン、ブタンなどをもちいることができる。When the hard carbon film 3 is formed by hydrocarbon gas plasma, hydrocarbon gas or a mixed gas of hydrocarbon gas and inert gas is introduced into the vacuum container, and the
While maintaining the pressure of 1 Torr, a discharge is made inside the vacuum container to generate hydrocarbon plasma and form a hard carbon film 3 on the surface of the substrate 1. The discharge type may be either an external electrode type or an internal electrode type, and the discharge frequency can be determined experimentally. Also,
By applying a voltage of O to -3 to V to the electrode on the side of the substrate 1, the hardness of the film can be increased and the adhesion can be improved. As the hydrocarbon, methane, ethane, propane, butane, etc. can be used.
また、硬質炭素膜を形成するには、できるだけ放電エネ
ルギーを大きくすることが好ましい。また、基体1の温
度もできるだけ高くすることが望ましい。Further, in order to form a hard carbon film, it is preferable to increase the discharge energy as much as possible. Further, it is desirable that the temperature of the substrate 1 is also as high as possible.
一方、スパッタの方法には、直流スパッタ、交流スパッ
タ、高周波スパッタ、マグネトロンスパッタ、イオンビ
ームスパッタなどがあるが、何れでもよい。硬質の膜を
形成するには、圧力は0.01Torr如何好ましく、
また、エネルギー密度は高くするのがよく、たとえば、
高周波マグネトロンスパッタではターゲット面積当りI
W/d以上が好ましく、また基体1を保持する側の電極
に0〜−3にVの電圧を印加しつつ、スパッタすること
によって、プラズマと同様に膜の硬度の増大および密着
性を向上させることができる。On the other hand, sputtering methods include direct current sputtering, alternating current sputtering, high frequency sputtering, magnetron sputtering, ion beam sputtering, etc., and any method may be used. In order to form a hard film, the pressure is preferably 0.01 Torr;
Also, it is better to have a high energy density, for example,
In high frequency magnetron sputtering, I per target area
W/d or more is preferable, and by sputtering while applying a voltage of 0 to -3 V to the electrode on the side that holds the substrate 1, the hardness and adhesion of the film can be increased similarly to plasma. be able to.
含窒素プラズマ重合膜4は、真空容器中に窒素化合物を
導入し、0.001〜I Torrの圧力を保持した状
態で真空容器内部に放電させて、プラズマを発生させて
形成する。放電形式としては、外部電極方式、内部電極
方式の何れの方式でもよく、放電周波数については実験
的に決めることができる。The nitrogen-containing plasma polymerized film 4 is formed by introducing a nitrogen compound into a vacuum container and generating plasma by discharging it inside the vacuum container while maintaining a pressure of 0.001 to I Torr. The discharge type may be either an external electrode type or an internal electrode type, and the discharge frequency can be determined experimentally.
この含窒素プラズマ重合膜4の膜厚は100Å以下が好
ましく、50Å以下がより好ましい。The thickness of this nitrogen-containing plasma polymerized film 4 is preferably 100 Å or less, more preferably 50 Å or less.
窒素化合物としては、ジメチルアミン、トリメチルアミ
ン、ジエチルアミン、トリエチルアミン、イソプロピル
アミン、n−ブチルアミン、ピリジン、アニリン、ジメ
チルアニリン、ホルムアミド、ジメチルホルムアミドな
どを用いることができる。As the nitrogen compound, dimethylamine, trimethylamine, diethylamine, triethylamine, isopropylamine, n-butylamine, pyridine, aniline, dimethylaniline, formamide, dimethylformamide, etc. can be used.
含フッ素カルボン酸は、一般式R,C0ol+ (ただ
し。The fluorine-containing carboxylic acid has the general formula R, C0ol+ (however.
式中R1はパーフルオロフェニル基、直鎖状または分岐
状のパーフルオロアルキル基、または部分フッ化アルキ
ル基)で表されるモノカルボン酸、または一般式R,0
OCRCOO11(ただし1式中R1はパーフルオロフ
ェニル基、直鎖状または分岐状のパーフルオロアルキル
基、または部分フッ化アルキル基)で表されるカルボン
酸部分エステル、または末端にカルボン酸基を持つパー
フルオロポリエーテルなどを用いることができる。これ
ら含フッ素カルボン酸は、単独で潤滑剤として用いても
よいが、他の潤滑剤と混合して用いてもよい。In the formula, R1 is a monocarboxylic acid represented by a perfluorophenyl group, a linear or branched perfluoroalkyl group, or a partially fluorinated alkyl group, or a compound of the general formula R,0
A partial carboxylic acid ester represented by OCRCOO11 (wherein R1 is a perfluorophenyl group, a linear or branched perfluoroalkyl group, or a partially fluorinated alkyl group), or a perfluorinated carboxylic acid group having a terminal carboxylic acid group. Fluoropolyether and the like can be used. These fluorine-containing carboxylic acids may be used alone as a lubricant, or may be used in combination with other lubricants.
さらに、潤滑剤としては、脂肪酸、脂肪酸エステル、脂
肪族アルコールまたはそのアルコキシド、多価アルコー
ル、またはそのエステル、硫黄化脂肪酸、脂肪族メルカ
プタン、変性シリコーンオイル、パーフルオロポリエー
テル類、高級アルキルスルホン酸、パーフルオロアルキ
ルスルホン酸、パーフルオロアルキルカルボン酸エステ
ル、カルボン酸パーフルオロアルキルエステルなどから
一種またはそれ以上が可能である。Furthermore, as lubricants, fatty acids, fatty acid esters, fatty alcohols or their alkoxides, polyhydric alcohols or their esters, sulfurized fatty acids, aliphatic mercaptans, modified silicone oils, perfluoropolyethers, higher alkyl sulfonic acids, One or more of perfluoroalkyl sulfonic acids, perfluoroalkyl carboxylic acid esters, carboxylic acid perfluoroalkyl esters, etc. can be used.
上記含フッ素カルボン酸を含有する潤滑剤層5を含窒素
プラズマ重合膜4の上に形成する方法としては、上記潤
滑剤を溶解した溶液を、通常のコーティング法によるか
、もしくは噴霧するか、あるいはこの溶液中に浸せきし
乾燥することによって得られる。The lubricant layer 5 containing the fluorine-containing carboxylic acid can be formed on the nitrogen-containing plasma polymerized film 4 by a conventional coating method or by spraying a solution containing the lubricant. It is obtained by immersing it in this solution and drying it.
また、塗工量としては、0.1〜2011g/nfが好
ましい。塗工量があまり少なすぎると、摩擦係数の低下
、耐久性、耐摩耗性の向上の効果が現われず。Further, the coating amount is preferably 0.1 to 2011 g/nf. If the coating amount is too small, the effects of lowering the friction coefficient and improving durability and wear resistance will not be achieved.
あまり多過ぎると、摺動部材と磁気記録媒体との間では
りつき現象が起こり、却って走行性が悪くなる。If the amount is too large, a sticking phenomenon will occur between the sliding member and the magnetic recording medium, which will actually worsen running performance.
次に本発明をさらに具体的に、実施例と比較例とを対比
しながら説明する。Next, the present invention will be described in more detail while comparing Examples and Comparative Examples.
実施例1
厚み10μmのポリエチレンテレフタレートフィルム上
に、電子ビーム法で斜め蒸着し、膜厚1500人のCo
−Ni−0膜を形成した。次いで、150人の硬質炭素
膜の形成を次のスパッタ条件で行った。その条件は、カ
ーボンをターゲットとして、 Ar雰囲気中で高周波マ
グネトロンスパッタによりスパッタし、硬質炭素膜を形
成した。 Arのガス圧は0.003Torr、投入電
力密度2.51/dである。Example 1 Co was diagonally deposited on a polyethylene terephthalate film with a thickness of 10 μm using an electron beam method, and the film thickness was 1500 μm.
-Ni-0 film was formed. Next, 150 people formed a hard carbon film under the following sputtering conditions. The conditions were such that carbon was used as a target and sputtered by high frequency magnetron sputtering in an Ar atmosphere to form a hard carbon film. The Ar gas pressure was 0.003 Torr, and the input power density was 2.51/d.
次いで、ジエチルアミンを導入しながら、0.2Tor
rの圧力で、周波数3に!lz、電力1001の条件で
30人の膜厚の含窒素プラズマ重合膜を形成した。Then, while introducing diethylamine, the temperature was increased to 0.2 Torr.
With r pressure, frequency becomes 3! A nitrogen-containing plasma polymerized film with a thickness of 30 people was formed under the conditions of 1z and 1001 oz of power.
さらに、この含窒素プラズマ重合膜の上にバーコーティ
ング法によって、C□Fl、 CH,OOC(CI(、
)2COOHで表される含フッ素カルボン酸部分エステ
ルを5111g/rrrの塗工量で塗工し、8m幅に裁
断し、磁気テープを作成した。Furthermore, C□Fl, CH, OOC(CI(,
) A fluorine-containing carboxylic acid partial ester represented by 2COOH was applied in a coating amount of 5111 g/rrr, and the tape was cut into a width of 8 m to prepare a magnetic tape.
実施例2
潤滑剤として、ペンタデカフルオロオクタン酸を塗工量
4■/イの条件で塗工した以外は、実施例1と同様にし
て、磁気テープを作成した。Example 2 A magnetic tape was prepared in the same manner as in Example 1, except that pentadecafluorooctanoic acid was applied as a lubricant at a coating amount of 4 cm/I.
実施例3
潤滑剤として、C,Fl、CI、0OC(CH□)、C
0OHで表される含フッ素カルボン酸部分エステルを塗
工量6■/イの条件で塗工した以外は、実施例1と同様
にして、磁気テープを作成した。Example 3 As a lubricant, C, Fl, CI, 0OC(CH□), C
A magnetic tape was prepared in the same manner as in Example 1, except that the fluorine-containing carboxylic acid partial ester represented by 0OH was applied at a coating amount of 6 cm/I.
実施例4
潤滑剤として、ノナデカフルオロデカン酸を塗工量3■
/耐の条件で塗工した以外は、実施例1と同様にして、
磁気テープを作成した。Example 4 As a lubricant, nonadecafluorodecanoic acid was applied in an amount of 3■
/Processed in the same manner as in Example 1 except that the coating was carried out under the conditions of
Created magnetic tape.
実施例5
潤滑剤として、末端にカルボン酸を有するパーフルオロ
ポリエーテルを塗工量3■/n(の条件で塗工した以外
は、実施例1と同様にして、磁気テープを作成した。Example 5 A magnetic tape was prepared in the same manner as in Example 1, except that a perfluoropolyether having a carboxylic acid at the end was applied as a lubricant at a coating amount of 3/n.
比較例1
含窒素プラズマ重合層を設けない以外は、実施例1と同
様にして、磁気テープを作成した。Comparative Example 1 A magnetic tape was produced in the same manner as in Example 1 except that the nitrogen-containing plasma polymerized layer was not provided.
比較例2
潤滑剤として、ペンタデカフルオロオクタン酸オクチル
を塗工量6■/イの条件で塗工した以外は、実施例1と
同様にして、磁気テープを作成した。Comparative Example 2 A magnetic tape was prepared in the same manner as in Example 1, except that octyl pentadecafluorooctanoate was applied as a lubricant at a coating amount of 6 cm/I.
比較例3
硬質炭素膜をもうけない以外は、実施例1と同様にして
、磁気テープを作成した。Comparative Example 3 A magnetic tape was produced in the same manner as in Example 1 except that the hard carbon film was not formed.
以上より得られた磁気テープを市販の8 m V TR
と同等の機能有する試験機にて、40℃、5%R)Iお
よび5℃、80%R)lの環境下で、スチル耐久性試験
を行い、再生出力が初期3dB低下するまでの時間を測
定した。また、繰り返し再生による走行耐久性試験を行
い、200パス走行後の再生出力の低下を測定した。The magnetic tape obtained above was used as a commercially available 8 m VTR.
A still durability test was carried out using a testing machine with the same functions as 40℃, 5%R)I and 5℃, 80%R)I, and the time required for the playback output to initially decrease by 3dB was measured. It was measured. In addition, a running durability test was conducted by repeated playback, and a decrease in playback output after running 200 passes was measured.
これらの結果を第1表に示す。These results are shown in Table 1.
く以下余白〉 第 表 第1表かられかるように、各実施例において。Space below No. table In each example as shown in Table 1.
スチル耐久性および走行耐久性は極めて良好で。Still durability and running durability are extremely good.
200パス走行後もテープ表面の損傷は全く見られなか
った。これに対して、各比較例のテープはスチル耐久性
も短く、走行耐久後の出力低下も大きく、実用信頼性の
低いものであった。No damage was observed on the tape surface even after running 200 passes. On the other hand, the tapes of each comparative example had short still durability, a large decrease in output after running durability, and low practical reliability.
発明の効果
以上のように、本発明によれば、強磁性金属薄膜上に硬
質炭素膜、含窒素プラズマ重合膜、含フッ素カルボン酸
を含む潤滑層を順次形成することによって1強磁性金属
薄膜型磁気記録媒体の実用信頼性を飛躍的に向上するこ
とができた。Effects of the Invention As described above, according to the present invention, by sequentially forming a hard carbon film, a nitrogen-containing plasma polymerized film, and a lubricating layer containing a fluorine-containing carboxylic acid on a ferromagnetic metal thin film, one ferromagnetic metal thin film type We were able to dramatically improve the practical reliability of magnetic recording media.
第1図は本発明に係る磁気記録媒体の一実施例である磁
気テープの構成を示す断面図である。
1・・・基板、2・・・強磁性金属薄膜、3・・・硬質
炭素膜、4・・・含窒素プラズマ重合膜、6・・・潤滑
剤層。
代理人 森 本 義 弘FIG. 1 is a sectional view showing the structure of a magnetic tape which is an embodiment of the magnetic recording medium according to the present invention. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Ferromagnetic metal thin film, 3...Hard carbon film, 4...Nitrogen-containing plasma polymerized film, 6...Lubricant layer. Agent Yoshihiro Morimoto
Claims (1)
記強磁性金属薄膜上に順次形成された硬質炭素膜と、含
窒素プラズマ重合膜と、含フッ素カルボン酸を含む潤滑
剤層とからなる磁気記録媒体。1. A ferromagnetic metal thin film formed on a non-magnetic support, a hard carbon film sequentially formed on the ferromagnetic metal thin film, a nitrogen-containing plasma polymerized film, and a lubricant layer containing a fluorine-containing carboxylic acid. A magnetic recording medium consisting of
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27980188A JP2597684B2 (en) | 1988-11-04 | 1988-11-04 | Magnetic recording media |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27980188A JP2597684B2 (en) | 1988-11-04 | 1988-11-04 | Magnetic recording media |
Publications (2)
Publication Number | Publication Date |
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JPH02126417A true JPH02126417A (en) | 1990-05-15 |
JP2597684B2 JP2597684B2 (en) | 1997-04-09 |
Family
ID=17616104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27980188A Expired - Lifetime JP2597684B2 (en) | 1988-11-04 | 1988-11-04 | Magnetic recording media |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5540957A (en) * | 1992-07-24 | 1996-07-30 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a magnetic recording medium |
US5589263A (en) * | 1993-12-28 | 1996-12-31 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium having a ferromagnetic metal thin film, a dry etched layer, a carbonaceous film, and a lubricant film |
US5776602A (en) * | 1994-10-25 | 1998-07-07 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium having a carbon protective film containing nitrogen and oxygen and overcoated with a lubricant |
WO1999003954A1 (en) * | 1997-07-16 | 1999-01-28 | Matsushita Electric Industrial Co., Ltd. | Lubricant composition, magnetic recording medium, and process for producing magnetic recording medium |
US6825880B2 (en) | 1999-12-28 | 2004-11-30 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Arrangement for guiding steering to assist parallel parking |
-
1988
- 1988-11-04 JP JP27980188A patent/JP2597684B2/en not_active Expired - Lifetime
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5540957A (en) * | 1992-07-24 | 1996-07-30 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a magnetic recording medium |
US5637393A (en) * | 1992-07-24 | 1997-06-10 | Matsuhita Electric Industrial Co., Ltd. | Magnetic recording medium and its manufacturing method |
US5589263A (en) * | 1993-12-28 | 1996-12-31 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium having a ferromagnetic metal thin film, a dry etched layer, a carbonaceous film, and a lubricant film |
US5798135A (en) * | 1993-12-28 | 1998-08-25 | Matsushita Electric Industrial Co., Ltd. | Method for producing a magnetic recording medium having a carbon protective layer |
US5776602A (en) * | 1994-10-25 | 1998-07-07 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium having a carbon protective film containing nitrogen and oxygen and overcoated with a lubricant |
WO1999003954A1 (en) * | 1997-07-16 | 1999-01-28 | Matsushita Electric Industrial Co., Ltd. | Lubricant composition, magnetic recording medium, and process for producing magnetic recording medium |
US6303227B1 (en) | 1997-07-16 | 2001-10-16 | Matsushita Electric Industrial Co., Ltd. | Lubricant composition magnetic recording medium, and process for producing magnetic recording medium |
US6825880B2 (en) | 1999-12-28 | 2004-11-30 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Arrangement for guiding steering to assist parallel parking |
Also Published As
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---|---|
JP2597684B2 (en) | 1997-04-09 |
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