JPH0212512Y2 - - Google Patents
Info
- Publication number
- JPH0212512Y2 JPH0212512Y2 JP17679684U JP17679684U JPH0212512Y2 JP H0212512 Y2 JPH0212512 Y2 JP H0212512Y2 JP 17679684 U JP17679684 U JP 17679684U JP 17679684 U JP17679684 U JP 17679684U JP H0212512 Y2 JPH0212512 Y2 JP H0212512Y2
- Authority
- JP
- Japan
- Prior art keywords
- workbench
- air
- top surface
- suction port
- air outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007664 blowing Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Ventilation (AREA)
Description
【考案の詳細な説明】
産業上の利用分野
この考案は、空気清浄装置付作業台に関し、詳
しくは半導体製造プロセス、あるいはバイオテク
ノロジの研究設備に使用される空気清浄装置付作
業台に関する。[Detailed Description of the Invention] Industrial Application Field The present invention relates to a workbench with an air purifier, and more particularly, to a workbench with an air purifier used in semiconductor manufacturing processes or biotechnology research equipment.
従来の技術
従来、半導体製造プロセスあるいはバイオテク
ノロジの研究設備に使用される作業台は、作業台
上面に浮遊塵などを全く無くする必要があり、こ
のため第６図に示すように空気清浄装置Ａを一体
に付設することが行なわれる。Conventional technology Conventionally, workbenches used in semiconductor manufacturing processes or biotechnology research equipment must be completely free of floating dust on the top surface of the workbench. are attached together.
第６図に図示した空気清浄装置付作業台は、作
業台Ｂの上面が載置台を兼ねた空気吸引口とさ
れ、ここから、送風機A1により空気を吸引する
と共に、吹出空気をダクトA2によつて作業台Ｂ
上方へ導びき、作業台Ｂと対面する上部空間より
超高性能フイルタA3を通して空気を吹出させ、
これを再び作業台Ｂより吸引させる空気循環経路
を形成する構成とされている。 In the workbench with an air purifier shown in Fig. 6, the top surface of the workbench B serves as an air suction port that also serves as a mounting table, from which air is sucked by the blower A1 and the blown air is sent to the duct A2. By workbench B
The air is guided upward and blown out through the ultra-high performance filter A 3 from the upper space facing workbench B.
The structure is such that an air circulation path is formed to suck this air from the workbench B again.
従来技術の問題点
ところで、上記従来の空気清浄装置付作業台
は、作業台上面の位置に、フイルタを経て空気を
吹出させる吹出口が平行に臨まされるので、作業
空間が狭くなるといつた問題を有するほか、作業
台にダクト、吹出口などが付属するから、設置ス
ペースもそれだけ大きくなり、大形の製造プロセ
ス設備となると莫大な設置容積を必要とするとい
つた問題があつた。Problems with the Prior Art By the way, the above-mentioned conventional work bench with an air purifier has a problem in that the work space becomes narrow because the air outlet for blowing out air through a filter faces parallel to the top of the work bench. In addition, since the workbench is equipped with ducts, air outlets, etc., the installation space becomes correspondingly large, and large manufacturing process equipment requires an enormous amount of installation space.
この考案の解決する問題点
この考案は上記問題点に鑑み、付属設備の占有
容積が作業台のみで済み、きわめてコンパクトに
なし得る清浄装置付作業台を提供することを目的
としてなされたものである。Problems to be solved by this invention In view of the above-mentioned problems, this invention was devised for the purpose of providing a workbench with a cleaning device that can be made extremely compact, requiring only the workbench to occupy the space occupied by the attached equipment. .
問題点を解決するに至つた技術
この考案の空気清浄装置付作業台は、作業台上
面の縁辺に沿つて該作業第上面方向へ向けて開口
するスリツト状の空気吹出口と、該空気吹出口か
ら前記作業第上面に吹き出される空気を強制吸引
する空気吸引口を有し該空気吸引口と空気吹出口
との間が前記作業台裏面において、送風機、フイ
ルタを有する密閉空気経路で接続されて成ること
を特徴とするものである。Technology that led to solving the problem The workbench with an air purifier of this invention has a slit-shaped air outlet that opens along the edge of the upper surface of the workbench toward the upper surface of the work surface, and the air outlet. an air suction port for forcibly suctioning air blown from the work surface to the upper surface of the work surface, and the air suction port and the air outlet are connected on the back surface of the workbench by a sealed air path having a blower and a filter. It is characterized by:
実施例 以下、この考案を実施例により設明する。Example This invention will be explained below using examples.
第１図はこの考案の一実施例の断面図である。 FIG. 1 is a sectional view of one embodiment of this invention.
この考案の空気清浄装置付作業台１は、対象物
品Ｇを載置し得る作業台１０の上面１０Ａの縁辺
１０Ｂに沿つてスリツト状の空気吹出口１１，１
１が作業台上面方向（矢印Ｐ）へ向けて開口さ
れ、この空気吹出口１１よりの吹出空気Ｓを強制
吸引する空気吸引口１２が作業台１０上面の空気
吹出口１１より吹き出される空気流ｓの直下位置
に設けられ、空気吸引口１２と空気吹出口１１と
の間が作業台裏面１０Ｃにおいて送風機１３とフ
イルター１４とを有する密閉空気経路１５で接続
されて構成されている。 The workbench 1 with an air purifier of this invention has slit-like air outlets 11, 1 along the edge 10B of the upper surface 10A of the workbench 10 on which the target article G can be placed.
1 is opened toward the upper surface of the workbench (arrow P), and an air suction port 12 that forcibly sucks the air S blown from the air outlet 11 is connected to the air flow blown out from the air outlet 11 on the upper surface of the workbench 10. The air intake port 12 and the air outlet 11 are connected to each other by a sealed air path 15 having a blower 13 and a filter 14 on the back surface 10C of the workbench.
上記実施例において、空気吹出口１１と空気吸
引口１２との位置関係は、第１図に示すように、
作業台１０上面の前後、又は左右の縁辺１０Ｂ，
１０Ｂに沿つて対をなして設け、作業台１０の中
央上面に空気吸引口１２を設けても良く、また、
第２図に示すように空気吹出口１１を作業台１０
の上面の一縁辺に設け、空気吸引口１２を作業台
１０の他側縁辺に設けても良い。 In the above embodiment, the positional relationship between the air outlet 11 and the air suction port 12 is as shown in FIG.
Front and rear or left and right edges 10B of the top surface of the workbench 10,
They may be provided in pairs along the line 10B, and the air suction port 12 may be provided on the upper center surface of the workbench 10.
As shown in FIG.
It may be provided on one edge of the upper surface, and the air suction port 12 may be provided on the other edge of the workbench 10.
さらに、第３図に示すように作業台１０の縁辺
１０Ｂに沿つて設けた空気吹出口１１に対し、他
側縁辺に衝立１６を設け、この衝立１６の基部１
６Ａ並びに上部１６Ｂに夫々空気吸引口１２，１
２を設けても良い。 Furthermore, as shown in FIG. 3, a screen 16 is provided on the other side of the air outlet 11 provided along the edge 10B of the workbench 10, and
6A and upper part 16B have air suction ports 12 and 1, respectively.
2 may be provided.
上記実施例において、空気吹出口１１の吹出方
向は、空気吸引口１２の吸引方向、及び送風吹出
圧力によつて定まる循環風路に対応させて可変と
し得るよう、第４図に示すような吹出方向可変ノ
ズル１１Ａを空気吹出口１１に設けることが望ま
しい。 In the above embodiment, the blowing direction of the air blowing outlet 11 is made variable as shown in FIG. It is desirable to provide the variable blowing direction nozzle 11A at the air blowing outlet 11.
また、本考案の空気清浄装置付作業台Ａの空気
清浄効率を高めるため第５図に示すように、作業
台１０の裏面部１０Ｃにさらに送風機１３Ａ及び
フイルター１４Ａを設け、作業台１０表面の最外
周縁にさらに空気吹出口１１Ｂ，１１Ｂを設ける
と共に作業台１０の側面１０Ｄ，１０Ｄに空気吸
引口１２Ａ，１２Ａを設け作業台１０上面が清浄
空気層S2によつて覆われるように構成しても良
い。 In addition, in order to increase the air cleaning efficiency of the workbench A with an air purifier of the present invention, as shown in FIG. Air outlet ports 11B, 11B are further provided on the outer peripheral edge, and air suction ports 12A, 12A are provided on the side surfaces 10D, 10D of the workbench 10, so that the upper surface of the workbench 10 is covered with a clean air layer S2 . Also good.
上記いずれの実施例においても送風機１３及び
フイルター１４を有する空気経路１５は図示のよ
うに作業台１０を支持するケーシング１７に一体
的に形成することが望ましい。もつとも図示は省
略するが空気経路１５を作業台１０の支持ケーシ
ング１７とは別にエアダクトにより構成し得るこ
とは言うまでもない。 In any of the embodiments described above, it is desirable that the air passage 15 having the blower 13 and the filter 14 be formed integrally with the casing 17 that supports the workbench 10 as shown. Although not shown, it goes without saying that the air path 15 can be constructed by an air duct separate from the support casing 17 of the workbench 10.
作 用 次に、この考案の作用を説明する。Effect Next, the operation of this invention will be explained.
送風機１３を作動させると、送風機１３よりの
送風はフイルター１４で除塵された後空気吹出口
１１より作業台上面へ勢い良く吹き出し、この吹
出流は空気吸引口１２より直ちに強制的に吸引さ
れやがて送風機１３へ戻る。 When the blower 13 is activated, the air from the blower 13 is removed by the filter 14 and then vigorously blown out from the air outlet 11 toward the top of the workbench. Return to 13.
即ち、作業台１０上面は空気吹出口１１より空
気吸引口１２へ至る強制循環風路S1で完全に覆わ
れ、このため、作業台１０上面は、外部の浮遊塵
より完全に保護され、また、強制循環風路S1に入
り込んだ塵埃類は、速やかに空気吸引口１２へ吸
引空気と共に吸引され、やがてフイルター１４に
より捕促除塵される。 That is, the top surface of the workbench 10 is completely covered by the forced circulation air path S1 extending from the air outlet 11 to the air suction port 12, so that the top surface of the workbench 10 is completely protected from external floating dust. The dust that has entered the forced circulation air path S1 is quickly sucked into the air suction port 12 along with the suction air, and is eventually captured and removed by the filter 14.
なお、第５図に示した構成とした場合、上記説
明した強制循環風路S1自体も外部に形成されるも
う一つの強制循環風路S2で保護されるので、清浄
作用がさらに良好に実現される。 In addition, in the case of the configuration shown in FIG. 5, the forced circulation air passage S1 described above is also protected by another forced circulation air passage S2 formed outside, so that the cleaning effect is even better. Realized.
効 果
この考案は以上のように構成されているので、
作業台上面は、空気吹出口より吸引口へ至るエア
ーカーテンにより塵埃類より保護され、また、作
業台上面には、空気吹出口と空気吸引口とが開口
するのみで作業台上方空間には突出物が全く無い
から、作業空間が大きくとれ、また、強制循環風
路を生じさせる送風器、除塵フイルタ並びに空気
経路はすべて作業台裏面に設けられるから作業台
全体が非常にコンパクト化され、設置面積も少な
くて済むなどの実用的効果を有する。Effects This idea is structured as described above, so
The top surface of the workbench is protected from dust by an air curtain that extends from the air outlet to the suction port, and the top surface of the workbench has only an air outlet and an air suction port that protrude into the space above the workbench. Since there are no objects at all, a large work space can be taken up, and since the blower that creates the forced circulation air path, the dust removal filter, and the air path are all installed on the back of the workbench, the entire workbench is extremely compact and the installation space is small. This has practical effects such as requiring less energy.
第１図はこの考案の実施例の断面図、第２図、
第３図は他の実施例の断面図、第４図は実施例の
要部拡大断面図、第５図は、この考案の実施例の
応用例の断面図、第６図は従来例の説明断面図で
ある。
１……空気清浄装置付作業台、１０……作業
台、１０Ａ……上面、１０Ｂ……縁辺、１０Ｃ…
…裏面、１１……空気吹出口、１２……空気吸引
口、１３……送風機、１４……フイルター、１５
……密閉空気通路。
Fig. 1 is a cross-sectional view of an embodiment of this invention; Fig. 2;
Fig. 3 is a sectional view of another embodiment, Fig. 4 is an enlarged sectional view of main parts of the embodiment, Fig. 5 is a sectional view of an application example of the embodiment of this invention, and Fig. 6 is an explanation of a conventional example. FIG. 1...Workbench with air purifier, 10...Workbench, 10A...Top surface, 10B...Edge, 10C...
...Back side, 11...Air outlet, 12...Air suction port, 13...Blower, 14...Filter, 15
...closed air passage.
Claims (1)
へ向けて開口するスリツト状の空気吹出口と、
該空気吹出口から前記作業台上面に吹き出され
る空気を強制吸引する空気吸引口を有し、該空
気吸引口と空気吹出口との間が前記作業台裏面
において、送風機、フイルタを有する密閉空気
経路で接続されてなることを特徴とする空気清
浄装置付作業台。 (2) 空気吹出口が作業台上面の前後または左右の
縁辺に沿つて対をなして設けられ、空気吸引口
が作業台中央上面に開口されている実用新案登
録請求の範囲第１項記載の空気清浄装置付作業
台。 (3) 空気吹出口が作業台上面の前後左右いずれか
の一縁辺に沿つて設けられ、空気吸引口が作業
台上面の他側縁辺に沿つてスリツト状に開口さ
れている実用新案登録請求の範囲第１項記載の
空気清浄装置付作業台。[Claims for Utility Model Registration] (1) A slit-shaped air outlet opening along the edge of the top surface of the workbench toward the top surface of the workbench;
It has an air suction port that forcibly sucks the air blown out from the air outlet to the top surface of the workbench, and a closed air supply having a blower and a filter is provided between the air suction port and the air outlet on the back surface of the workbench. A workbench with an air purifier characterized by being connected by a path. (2) The utility model claimed in claim 1, wherein the air outlet is provided in pairs along the front and rear or left and right edges of the top surface of the workbench, and the air suction port is opened at the center top surface of the workbench. Workbench with air purifier. (3) A utility model registration request in which the air outlet is provided along one edge of the top surface of the workbench on either the front, back, left or right, and the air suction port is opened in the form of a slit along the other edge of the top surface of the workbench. A workbench with an air purifying device as described in Scope 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17679684U JPH0212512Y2 (en) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17679684U JPH0212512Y2 (en) | 1984-11-20 | 1984-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6191747U JPS6191747U (en) | 1986-06-14 |
| JPH0212512Y2 true JPH0212512Y2 (en) | 1990-04-09 |
Family
ID=30734380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17679684U Expired JPH0212512Y2 (en) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0212512Y2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2454532B1 (en) * | 2009-07-17 | 2018-09-12 | Technical University of Denmark | Device and method for reducing spread of microorganisms and airborne health hazardous matter and/or for protection from microorganisms and airborne health hazardous matter |
| JP6411726B2 (en) * | 2013-11-01 | 2018-10-24 | 株式会社ケイズベルテック | Foreign matter prevention device |
| JP6850409B2 (en) * | 2016-06-23 | 2021-03-31 | 冨士夫 渡部 | Air cleaner |
-
1984
- 1984-11-20 JP JP17679684U patent/JPH0212512Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6191747U (en) | 1986-06-14 |
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