JPH02124415A - Shape measuring apparatus - Google Patents

Abstract

PURPOSE:To easily conduct re-measurement by providing an executing means which outputs data of the position on a moving desk of an object to be measured which is required to be measured again by a requiring means, and executes re-measurement of said object to be measured. CONSTITUTION:A position calculating means 35 is provided with a list of objects to be re-measured which are selected by an object selecting means 30 when the re-measurement is required, apart from a list of objects to be measured. As a re-measuring signal is input, the coordinates are calculated from the list of the objects to be re-measured. For example, when an object is measured in failure and required to be measured again, a re-measuring signal is input to the calculating means 35. After the object is set in the list of the objects to be re-measured by the selecting means 30, only the objects set in the list can be measured. In this re-measuring mode, only the measured data of the selected objects is updated, and the other data of the objects which are not re-measured remains as it is. Accordingly, re-measurement of the object can be performed easily.

Description

DETAILED DESCRIPTION OF THE INVENTION Industrial Application Field of the Present Invention The present invention relates to a shape measuring device for measuring the shape of the surface of an object to be measured.

<Prior art> A shape measuring device that measures the height of the object surface according to a predetermined measurement route and measures the warp, parallelism, etc. based on this height data in order to measure the warp, parallelism, etc. of the object surface. has always been the case.

In such a conventional shape measuring device, f/X is placed on the movable table.
While moving the measurement point on the surface of the object to be measured in the XYh direction, the height of the measurement point in the Z direction is detected by the sensor, and based on this height data, the warp, parallelism, etc. of the surface of the object to be measured are determined. The movement control of the movable table, the detection of height data, the determination of shape, etc. are performed automatically under computer program control to increase measurement efficiency.

For example, when performing the same measurement on many objects to be measured placed on a moving table, after performing the measurement on the surface of one object, The first step was to perform similar measurements by moving the It is configured to determine the degree and display the result.

Problems to be Solved by the Present Invention> However, in the shape measuring device as described above, if measurement of one of the plurality of objects placed on the moving table fails, for example, if the object to be measured fails. If there is a defect in the surface white, or if there is a problem with the condition of the moving table of the object to be measured and the measured value becomes abnormal, either restart the measurement from the beginning or change the measurement program. This requires a very complicated task of re-measuring the object to be measured.

Therefore, when measuring a large number of objects (for example, 100 objects) in one measurement, the objects to be measured must be placed on the moving table very carefully, and a skilled person should be required to change the measurement program. There was a problem in that workers were always required.

An object of the present invention is to provide a shape measuring device that solves this problem.

Means for Solving the Problems> In order to solve the problems described above, the shape measuring device of the present invention provides the following features: type of shape measurement, measurement parameters necessary for the measurement, and measurement points defined on the surface of the object to be measured. a setting means for setting and storing position data for each measurement item in advance; and a setting means for setting and storing position data for each measurement item in advance; A program that creates a measurement program defined on the surface of one object to be measured [1 gram! 8 collection means and the position of the object to be measured on the moving table in the nil measurement program.
ii! a positioning means for giving an i-information and converting it into absolute coordinates; a measurement requesting means for controlling the movement of the movable table according to a measurement program converted into absolute coordinates and outputting a measurement result based on a detection signal from a sensor; A means to memorize and 411 on the moving platform! remeasurement requesting means for requesting remeasurement using the measurement program by specifying any object to be measured that has been placed; and positioning means for transmitting position information on the moving platform of the object specified by the remeasurement requesting means The measurement control unit is provided with a remeasurement requesting means for outputting an output to the object to be measured and executing remeasurement of the object to be measured.

<Operation> Therefore, a measurement program for one object surface is compiled based on the measurement items set for the surface of one object to be measured, and this measurement program is applied to each object to be measured on the movable table. The position information is given and converted into absolute coordinates, measurements are performed on the object to be measured, and the measurement results are recorded.

Furthermore, when an object to be measured for which re-measurement is requested is specified, the position information of the object is given to the measurement program, and measurement of the specified object is executed.

Embodiments of the present invention> (Figures 1 to 12) Hereinafter, one embodiment of the present invention will be described based on the drawings.

FIG. 1 is a diagram showing the overall configuration of a shape measuring device according to an embodiment of the present invention.

In the figure, 10 is a measurement mechanism section, an X-Y stage 12 is provided on a base 11, and a mounting table 1 on which the object to be measured is placed on the X-Y stage 12. is fixed.

The X stage 12a moves the mounting table 1 in the left and right direction (in FIG. 1), and the Y stage 12b moves the
41 in the direction perpendicular to a! It is configured to move the stand 1.

Moreover, on the Y stage 12b, there is an X
A position detector 12c is provided on the side of the Y stage to similarly move the Y stage 12b. 1lIJ! The Y position detector 12d#5 that detects the

Reference numeral 13 denotes a vacuum device that sucks air from the @dish hole 3 (FIG. 2) of the mounting table 1.

Reference numeral 14 denotes an optical sensor section disposed above the X-Y stage 12, and a light projecting section 14 that illuminates the mounting table 1 with a light beam I4.
a and a light reception detection section 14b which receives the reflected light and outputs a displacement signal corresponding to a change in the height of the irradiation point.

This displacement signal changes depending on the distance from the optical sensor section 14 to the irradiation point, and the distance determined based on this signal is determined by the height from the optical sensor section 14 to the origin of the XY plane of the mounting table 1. By reducing itching, the height of the irradiation point from the origin can be obtained.

A monitor camera 15 that magnifies the vicinity of the irradiation point and outputs an image is integrated into this optical sensor section 14.

Reference numeral 16 denotes two stages that move the optical sensor section 14 in the Z direction perpendicular to the X-Y stage 12, and the movement of both the X-Y stage 12 and the second stage 16 is controlled by the XYZ drive section 17.

18 is a monitor television that displays a video signal from a monitor camera on a screen.

19 (Y) is a manual operation unit that moves the XY stage 12 independently by directly inputting a movement signal to the XYZ drive unit 17.

Reference numeral 20 denotes a measurement control section configured by a computer, which gives movement signals from the XYZ drive section 17 to each stage according to a set measurement program, and controls the optical sensor section 1.
Based on the displacement signal from the light reception detection section 14b of No. 4, the height of the measurement point of the object to be measured in seven directions is highlighted to determine the shape.

As shown in FIG. 2, this measurement control unit 20 controls the X-Y stage 12, Z stage 16, etc., with a predetermined lower left position of the mounting table 1 as the reference origin (Olo, 0) of absolute coordinates. .

Three guide members 2 are attached to this mounting table 1 so that nine objects to be measured are placed in a 3×3 array at 4g at predetermined mounting locations E1 to E9. E1-E9
The lower left corner (in FIG. 2) is cut out in a circular shape to avoid the risk of scratching the object to be measured.

The reference position of the object to be measured placed in each of the placement locations E1 to E9 is at the center of this corner. R1 to R9 are set, and the interval in the X direction between positions R1 to R9 is Xp,
It is assumed that the interval in the Y direction is set to Yp, and the coordinate position of position @R7 from the reference origin is set to (x1, Yl).

FIG. 3 is a diagram showing functional blocks of the measurement I control 181S20.

In FIG. 3, 21 is a first input means for inputting and setting the type of shape measurement and the measurement parameters necessary for the measurement for each item, and 22 is the first input means for inputting the input measurement type and measurement parameters. The first item to be memorized for each measurement item.
It is a storage means for

This input means 21 is used to preset measurement items assumed for the object to be measured, such as parallelism measurement on two sides as in item 1 shown in FIG. Measurement of warp by side, warp measurement by 5 points as in item N, etc. Measurement type (warp, parallelism, etc.) and route type (2'y2.5 points, etc.) are symbolized for each item. At the same time, the values of measurement parameters (measurement pitch, measurement speed, standard) necessary for this measurement are input, and are stored in the first storage means 22 for each measurement item, as shown in FIG.

In this table, 1 is a symbol indicating parallelism measurement, 2 is a symbol indicating warpage measurement, R1 is a symbol indicating the number of measurement routes on two sides, and R5 is a symbol indicating the number of measurement points of 5.

Therefore, (K1, R1) indicates that parallelism measurement is performed on two sides.

Reference numeral 23 denotes a measurement item display means for displaying an at-a-glance table of measurement items as shown in FIG.

Reference numeral 24 denotes a measurement item selection means for selecting the number of the measurement item desired to be performed on the object to be measured from among the displayed measurement items.

25, for each measurement item set for one object to be measured, the starting point, end point, and multi-point button positions of the measurement route, the height chain according to the standard of the object to be measured, and the specified standard of the object to be measured. This is a second input means for inputting coordinate data from a position.

Reference numeral 26 denotes a second storage means for storing coordinate data input for each measurement item for one representative object to be measured for each measurement item as shown in FIG.

Reference numeral 27 denotes a third input means for inputting position information of a plurality of objects to be measured placed on the mounting table 1, and inputs information such as the reference position of the mounting table, the arrangement pitch of the objects to be measured, the number of objects to be measured, etc. Set input.

28 is a third storage means for storing the position information input from the third input means 27.

Reference numeral 29 denotes an object position display means for displaying the position of the fixed object 'a31 on the mounting table 1 according to the position information stored in the third storage means 28.

Reference numeral 3o denotes an IIgs regular object selection stage for selecting treasure #I to be measured from among the objects displayed by the object position display means 29.

31, whether the measurement of the object to be measured is carried out continuously;
This is a measurement sequence selection means for selecting whether to interrupt the measurement operation (intermittent operation) for each object to be measured.

32 is a measurement item selection means 24 and a measurement object selection means 30
The measurement item selected by the selection operation, the position information corresponding to the measurement item, and the measurement sequence selection means 31
Select information from and load these measurements 1!1ll
This is a measurement program self-esui means for self-assembling a measurement program defined on the measurement surface of the object to be measured based on the measurement object.

As shown in FIG. 7, this measurement program automatic S* means 32 includes a measurement item list L1, an object to be measured list L2, sequence data D1,
and the height data D2 of the object to be measured are created and stored, and the measurement program is automatically edited according to the processing procedure shown in FIG. 8 and is stored in the measurement program storage 1933.

In addition, Fig. 7 and Fig. 8 show measurement items of 1.2,
The Nth item is selected and the mounting position of mounting table 1 @EIE6
, R7 is selected.

In FIG. 8, the program pointer POK of the measurement item list L1, the program pointer PPO of the measurement program storage means 33, and the program memory pointer MP
O is the initialized bond, the item number indicated by POK is read out, and change 1f! Assigned to KOM (step 1.2)
.

After determining the end of reading the item number, KOM1
The measurement parameter of the ar pitch PIC1 measurement speed SPD is read from the eye parameter table (FIG. 5) (step 3.4).

KOM-th coordinate data from the second storage means (Figure 6)
is read out, a measurement program adapted to the grammar of the measurement device is synthesized (step 5.6).

The synthesized program is measured in the MPO of the program storage means.
Is the start address of this program stored in the management table PPO? The fi-th data is stored, POK and PPO are incremented by 1, MPO is updated, and the process returns to step 2 (steps 7 to 9).

After performing this process for the number of selected measurement items, when the end is determined in step 3, an end mark is entered in the table indicated by the PPO, and the item list [1 is sent to the measurement item switching means 34. , the object to be measured list L2 is sent to the position output means 35 (steps 10 to 12).

Measurement program automatically edited in this way and?
! The measurement data is stored in the measurement program storage means 33 as shown in FIG. 9, and measurement is started by a measurement start signal sent to the position calculation means 35.

FIGS. 10(a) and 10(b) are flowcharts showing the measurement processing procedure.

First, in this first stage 35 of position calculation, the reference position (of R1 to R9) of the object in the list is calculated based on the object list L2 from the measurement program automatic editing means 32 and the position information from the third storage means. The coordinates (Xr , Yr ) of any one of the reference positions on the mounting table 1 are calculated.

However, both n and m are 3, and the address (Cn, Cn
) is a value from (1, 1) to (3, 3) (steps 1 to 5). In addition, the position calculating means 35 uses the object to be measured selection means 30 at the time of re-measurement, in addition to the object to be measured list L2. It has a list of objects to be measured L3 for re-measurement to be selected, and when a re-measurement signal is input, coordinates based on this list of objects to be measured L3 are calculated.

Next, in the object positioning means 36, the coordinate values Xr, 'y'r,'; The defined coordinate information is enhanced,
The measurement program converted into absolute coordinates is sent to the measurement control means 37, and the XY stage is moved and the height is measured based on the detection signal from the optical sensor (steps 6 to 8).

This measurement data is stored in the measurement data storage means 40 as shown in FIG. 11, along with a measurement status table indicating whether the measurement has failed or not and a measurement data management table (steps 9 to 16).

However, the processes from step 6 to step 15 are repeated as many times as the number of measurement items for the object to be measured, and for all the objects in the object list L2 or L3.
Processing for the same aircraft will be carried out.

The determination means 42 performs calculation processing for shape measurement predetermined by the measurement type on this measurement data, and the determination display means 43 displays the determination result (step 19.20).

Note that, for example, when measuring the object to be measured whose measurement has failed (the 6th object to be measured in FIG. 11) again, the position calculation means 3
Input the re-measurement signal to 5.

After the 61st object to be measured 11Fl is selected by the object selection means and set in the object to be measured list L3, the process is started from the part WKCNT-1 in step 1 in FIG. List L3 object to be measured (6th
Measurements can only be made on objects (object to be measured).

In this re-measurement mode, the processing procedure in FIG. 12 (steps 40 and 41) is performed in place of step 12 in FIG. Measurement data for objects to be measured that were not included will remain as they are.

Other Embodiments of the Present Invention In the above embodiments, the present invention is applied to a shape measuring device that can place up to nine objects to be measured and detects height data using an optical sensor. The present invention is also applicable to a shape measuring device having other sensors and capable of mounting a larger number of objects to be measured.

Effects of the Present Invention Since the shape measuring method of the present invention is configured as described above, there is no need to re-measure all objects to be measured or to change measurement programs, which are complicated and require skill. The object to be measured can be remeasured very easily.

Therefore, even when measuring a large number of objects in one measurement, there is no need to be particularly careful when placing the objects to be measured on the moving table, and even non-experts can easily and efficiently perform the work. Can perform measurement work.

[Brief explanation of the drawing]

Fig. 1 is a diagram showing the overall configuration of the shape measurement '@yoi to which the present invention is applied, Fig. 2 is a plan view showing the main parts of Fig. 1, and Fig. 3 is the function of the main parts of Fig. 1. It is a block diagram. Figure 4 is a diagram showing measurement patterns for measurement items, Figure 5 is a diagram showing measurement parameters stored in the main part of Figure 3, and Figure 6 is measurement position data written in the main part of Figure 3. FIG. 7 is a diagram showing a memory list for the selection operation in FIG. 3, FIG. 8 is a flowchart showing the processing procedure of the main part of FIG. 3, and FIG. 9 is a memory diagram showing the processing results in FIG. 8. , FIGS. 10(a) and 10(b) are diagrams showing the processing procedure of the main part of FIG. 3, and FIG. 11 is a memory diagram showing the processing results of FIG. 10. FIG. 12 is a flowchart showing a part of the processing procedure at the time of re-measurement in one embodiment. 20... Measurement control unit, 21... First input means, 22... First storage means, 24...
... Measurement item selection means, 25 ... Second input means, 26 ... Second storage means, 27 ...
... Third input means, 28 ... Third storage means, 30 ... Measured object selection means, 31 ...
... Measurement sequence selection means, 32 ... Measurement program own collection means, 33 ... Measurement program storage means, 35 ... Position calculation means,
36... Measured object positioning means, 37...
...Measurement control means, 40...Measurement data storage means. Fig. 2 Fig. 4 Fig. 5 Fig. 6 Fig. 8 Fig. 10 (a) Procedures 7! 7 (Voluntary) October 21, 1985 Commissioner of the Patent Office Yoshi 1) Moon Yi 1, Incident Indication of 1986 Patent Application No. 191317 2 Name of the invention Shape Measuring Device 3 Relationship with the case of the person making the amendment Patent applicant address 5-chome Minami-Azabu, Minato-ku, Tokyo [110-2 No. 7 (
057) Anritsu Tamashiki Company Representative Fuji 1) Yu Go 4, Agent 105 Telephone 433-4702 Address 4-24-3 Shinbashi, Minato-ku, Tokyo 6. Contents of amendment

Claims (1)

[Scope of Claims] A moving table for moving an object to be measured in X and Y directions, a sensor for detecting a change in height of a measurement point on the surface of the object to be measured, and a sensor for controlling the movement of the moving table to move the object to be measured in the X and Y directions. A shape measuring device comprising a measurement control unit that moves a measurement point on the top and measures the shape of the surface of the object based on a detection signal from the sensor, the type of shape measurement and the measurement parameters necessary for the measurement. and a setting means for presetting and storing position data of measurement points defined on the surface of the object to be measured for each measurement item, based on the measurement type, measurement parameter, and position data for each measurement item set in the setting means. a program editing means for editing and creating a measurement program defined on the surface of one object to be measured placed on the movable table; and providing position information of the object to be measured on the movable table to the measurement program. positioning means that converts the measurement results into absolute coordinates; measurement execution means that controls the movement of the movable platform and outputs measurement results based on detection signals from the sensors; and storage of the measurement results. re-measurement requesting means for specifying an arbitrary measured object placed on a moving table and requesting re-measurement using the measurement program; and moving the measured object specified by the re-measurement requesting means. The shape measuring device characterized in that the measurement control unit includes remeasurement execution means for outputting position information on the table to the positioning means and causing the measurement target to be remeasured.