JPH02123051U - - Google Patents
Info
- Publication number
- JPH02123051U JPH02123051U JP3161289U JP3161289U JPH02123051U JP H02123051 U JPH02123051 U JP H02123051U JP 3161289 U JP3161289 U JP 3161289U JP 3161289 U JP3161289 U JP 3161289U JP H02123051 U JPH02123051 U JP H02123051U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- generates
- cathode chamber
- microwave
- antenna
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011253 protective coating Substances 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3161289U JPH02123051U (bg) | 1989-03-20 | 1989-03-20 | |
| US07/422,724 US5107170A (en) | 1988-10-18 | 1989-10-17 | Ion source having auxillary ion chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3161289U JPH02123051U (bg) | 1989-03-20 | 1989-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02123051U true JPH02123051U (bg) | 1990-10-09 |
Family
ID=31257595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3161289U Pending JPH02123051U (bg) | 1988-10-18 | 1989-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02123051U (bg) |
-
1989
- 1989-03-20 JP JP3161289U patent/JPH02123051U/ja active Pending
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