JPH02122824A - Seal structure of assembling type vacuum chamber - Google Patents

Abstract

PURPOSE:To seal precisely without leakage by putting string-like gaskets in the upper and lower surface of right and left plates which compose a vacuum chamber. CONSTITUTION:Grooves for string-like gasket are formed in the upper and lower surfaces of right and left plates 1, 2 which compose a vacuum chamber and there square gaskets 9 are fixed. The gasket grooves are so formed that the both ends of the string like square gaskets 9 are curved and extended slightly from the end surfaces in front and rear of the side plates 1, 2. Moreover, an endless square gasket 10 is provided in the front and back side doors 5, 6. Airtightness between the right and left side plats 1, 2 and up and down side plates 3, 4 are maintained by the gaskets 9. The airtightness among the front and back side doors 5, 6 and right and left and up and down plates 1, 2, 3, 4 is kept by properly adjusting the extended length A of gaskets 9 and the gasket 10 and as a result, close sealing is improved and leakage is prevented.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a seal structure for a vacuum chamber.

[Conventional technology 1] In conventional vacuum chambers, except for the front and rear doors, the top, bottom, left and right plates were welded, so seals were not used on the top, bottom, left and right sides.

[Problems to be Solved by the Invention] However, the above-mentioned conventional technology has a problem in that accuracy such as parallelism, flatness, and dimensional accuracy cannot be achieved if the welded portion is present. Further, even if reprocessing is performed after the first contact, there are cases where it is difficult or impossible, and there is a problem that there is a limit. The present invention is intended to solve these problems, and its purpose is to provide a vacuum chamber that can be assembled without using contacts, has high precision, and is leak-free.

[Means for Solving the Problems 1] The sealing structure of the prefabricated vacuum chamber of the present invention includes string-shaped gaskets interposed between the upper and lower surfaces of the left and right side plates constituting the chamber, and both ends of the string-shaped gaskets
It is curved so that it slightly protrudes from the front and rear end surfaces of one plate,
When the front and rear doors are closed, the endless gaskets attached to the front and rear doors are pressed against this part, making a close contact.
It is characterized by a.

[Embodiment] Figures 1.2.3 are a plan view with the top plate 3 removed, a front view with the front door 5 removed, and a side view, respectively, in an embodiment of the present invention. The figure shows P for front and rear doors 5.6
It is an arrow view.

String-shaped gasket grooves are formed in the upper and lower surfaces of the left and right side plates 1 and 2 constituting the chamber, and string-shaped square gaskets 9 are attached thereto.

As shown in FIG. 1, this gasket groove is formed by curving both ends of the string-like square gasket 9 so as to slightly protrude from the front and rear end surfaces of the side plates 1 and 2. Furthermore, endless square gaskets IO are attached to the front and rear doors 5.6.

Here, the gasket IO is arranged so that when the front and rear R5, 6 are pressed against the left and right side plates 1.2, they come into contact with the gasket 9 and come into close contact.

When the chamber is assembled with the above sealing configuration, the gasket 9 maintains airtightness between the left and right side plates 1 and 2 and the upper and lower plates 3 and 4. In addition, left and right upper and lower plates 1.2.3.4 and 1ii
i The airtightness between the rear door 5.6 and the rear door 5.6 can be maintained by the gasket IO by appropriately setting the protrusion amount A of the gasket 9, and since the gaskets 9 and IO are in complete contact, There is no leakage due to wraparound. In this example, both the gasket 9 and lO are 5 mm' square gaskets (made of Piton), and the amount of protrusion A is 0.
．． It is set at 4mrrl.

In this embodiment, the inner dimension B of the front panel in Fig. 2,
Since dimensional accuracy of C, horizontal and vertical Tfil, smoothness, flatness and parallelism of the inner surface of 2.34 were required, it had to be assembled.

In addition, in this embodiment, grooves are provided on the left and right IM l, 2 for attaching the square gasket 9.''-Lower plate 3
You can also attach it to the bottom or top of 4.

Furthermore, the seal structure of the present invention can be applied to the connection between vacuum chambers as shown in FIG. By combining and bringing them into close contact with each other, leakage can be eliminated, and as a result, welding is not required, which has the effect of providing a vacuum chamber with high precision in terms of internal dimensions and parallelism and flatness of the inner surface.

[Brief explanation of the drawing]

FIG. 1 is a plan view of a vacuum chamber having a seal structure according to the present invention with the top plate removed. Figure 2 is the same (front view with the front door removed. Figure 3 is the same (side view). Figure 4- is the same view from the P arrow of the front and rear doors, and Figure 5 is the case where the two vacuum chambers mentioned above are connected. Side view of l...Left side plate, right side plate, top plate, bottom plate, front door plate, rear door plate, door fixing angle bolt, nut string-shaped square gasket, endless square gasket

Claims (1)

[Claims] In an assembly-type vacuum chamber in which a gasket is interposed between the plate materials to prevent leakage, string-like gaskets are interposed on the upper and lower surfaces of the left and right side plates that make up the vacuum chamber, and the string-like gasket is A prefabricated vacuum characterized by having both ends curved so as to protrude slightly from the front and rear end surfaces of the side plates, so that when the front and rear doors are closed, endless gaskets attached to the front and rear doors are pressed against these parts and are in close contact with each other. Chamber seal structure.