JPH02122761U - - Google Patents
Info
- Publication number
- JPH02122761U JPH02122761U JP3196289U JP3196289U JPH02122761U JP H02122761 U JPH02122761 U JP H02122761U JP 3196289 U JP3196289 U JP 3196289U JP 3196289 U JP3196289 U JP 3196289U JP H02122761 U JPH02122761 U JP H02122761U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- guide ring
- reference surface
- disk
- detection means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3196289U JPH02122761U (enExample) | 1989-03-20 | 1989-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3196289U JPH02122761U (enExample) | 1989-03-20 | 1989-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122761U true JPH02122761U (enExample) | 1990-10-09 |
Family
ID=31258217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3196289U Pending JPH02122761U (enExample) | 1989-03-20 | 1989-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122761U (enExample) |
-
1989
- 1989-03-20 JP JP3196289U patent/JPH02122761U/ja active Pending
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