JPH02122430U - - Google Patents
Info
- Publication number
- JPH02122430U JPH02122430U JP3152689U JP3152689U JPH02122430U JP H02122430 U JPH02122430 U JP H02122430U JP 3152689 U JP3152689 U JP 3152689U JP 3152689 U JP3152689 U JP 3152689U JP H02122430 U JPH02122430 U JP H02122430U
- Authority
- JP
- Japan
- Prior art keywords
- drying chamber
- plate
- multiple stages
- splash prevention
- hollow vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 3
- 239000000969 carrier Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3152689U JPH02122430U (fr) | 1989-03-20 | 1989-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3152689U JPH02122430U (fr) | 1989-03-20 | 1989-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122430U true JPH02122430U (fr) | 1990-10-08 |
Family
ID=31257440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3152689U Pending JPH02122430U (fr) | 1989-03-20 | 1989-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122430U (fr) |
-
1989
- 1989-03-20 JP JP3152689U patent/JPH02122430U/ja active Pending