JPH02120831U - - Google Patents
Info
- Publication number
- JPH02120831U JPH02120831U JP2963789U JP2963789U JPH02120831U JP H02120831 U JPH02120831 U JP H02120831U JP 2963789 U JP2963789 U JP 2963789U JP 2963789 U JP2963789 U JP 2963789U JP H02120831 U JPH02120831 U JP H02120831U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic adsorption
- groove
- heat transfer
- plate
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000001312 dry etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2963789U JPH02120831U (US07321065-20080122-C00160.png) | 1989-03-15 | 1989-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2963789U JPH02120831U (US07321065-20080122-C00160.png) | 1989-03-15 | 1989-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120831U true JPH02120831U (US07321065-20080122-C00160.png) | 1990-09-28 |
Family
ID=31254019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2963789U Pending JPH02120831U (US07321065-20080122-C00160.png) | 1989-03-15 | 1989-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120831U (US07321065-20080122-C00160.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007258615A (ja) * | 2006-03-24 | 2007-10-04 | Ngk Insulators Ltd | 静電チャック |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6015226A (ja) * | 1983-07-07 | 1985-01-25 | Fuji Heavy Ind Ltd | ４輪駆動車 |
| JPS63156321A (ja) * | 1986-12-20 | 1988-06-29 | Fujitsu Ltd | プラズマ処理装置 |
| JPS63229716A (ja) * | 1987-03-19 | 1988-09-26 | Fujitsu Ltd | ドライエツチング方法 |
-
1989
- 1989-03-15 JP JP2963789U patent/JPH02120831U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6015226A (ja) * | 1983-07-07 | 1985-01-25 | Fuji Heavy Ind Ltd | ４輪駆動車 |
| JPS63156321A (ja) * | 1986-12-20 | 1988-06-29 | Fujitsu Ltd | プラズマ処理装置 |
| JPS63229716A (ja) * | 1987-03-19 | 1988-09-26 | Fujitsu Ltd | ドライエツチング方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007258615A (ja) * | 2006-03-24 | 2007-10-04 | Ngk Insulators Ltd | 静電チャック |
