JPH02118926U - - Google Patents
Info
- Publication number
- JPH02118926U JPH02118926U JP2766389U JP2766389U JPH02118926U JP H02118926 U JPH02118926 U JP H02118926U JP 2766389 U JP2766389 U JP 2766389U JP 2766389 U JP2766389 U JP 2766389U JP H02118926 U JPH02118926 U JP H02118926U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate stage
- spin
- base
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2766389U JPH0632674Y2 (ja) | 1989-03-10 | 1989-03-10 | フォトレジスト塗布装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2766389U JPH0632674Y2 (ja) | 1989-03-10 | 1989-03-10 | フォトレジスト塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02118926U true JPH02118926U ( ) | 1990-09-25 |
JPH0632674Y2 JPH0632674Y2 (ja) | 1994-08-24 |
Family
ID=31250348
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2766389U Expired - Lifetime JPH0632674Y2 (ja) | 1989-03-10 | 1989-03-10 | フォトレジスト塗布装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0632674Y2 ( ) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001168011A (ja) * | 1999-12-09 | 2001-06-22 | Dainippon Screen Mfg Co Ltd | 薄膜形成装置 |
JP2002231609A (ja) * | 2001-02-02 | 2002-08-16 | Matsushita Electric Ind Co Ltd | 薬液塗布装置及び薬液塗布方法 |
JP2005246228A (ja) * | 2004-03-03 | 2005-09-15 | Dainippon Printing Co Ltd | スピンコータ装置及びスピンコート方法 |
-
1989
- 1989-03-10 JP JP2766389U patent/JPH0632674Y2/ja not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001168011A (ja) * | 1999-12-09 | 2001-06-22 | Dainippon Screen Mfg Co Ltd | 薄膜形成装置 |
JP2002231609A (ja) * | 2001-02-02 | 2002-08-16 | Matsushita Electric Ind Co Ltd | 薬液塗布装置及び薬液塗布方法 |
JP2005246228A (ja) * | 2004-03-03 | 2005-09-15 | Dainippon Printing Co Ltd | スピンコータ装置及びスピンコート方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0632674Y2 (ja) | 1994-08-24 |