JPH02118751U - - Google Patents
Info
- Publication number
- JPH02118751U JPH02118751U JP2701789U JP2701789U JPH02118751U JP H02118751 U JPH02118751 U JP H02118751U JP 2701789 U JP2701789 U JP 2701789U JP 2701789 U JP2701789 U JP 2701789U JP H02118751 U JPH02118751 U JP H02118751U
- Authority
- JP
- Japan
- Prior art keywords
- target
- yoke
- face
- contact
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989027017U JPH0734923Y2 (ja) | 1989-03-09 | 1989-03-09 | マグネトロンスパッタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989027017U JPH0734923Y2 (ja) | 1989-03-09 | 1989-03-09 | マグネトロンスパッタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02118751U true JPH02118751U (zh) | 1990-09-25 |
| JPH0734923Y2 JPH0734923Y2 (ja) | 1995-08-09 |
Family
ID=31249160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989027017U Expired - Lifetime JPH0734923Y2 (ja) | 1989-03-09 | 1989-03-09 | マグネトロンスパッタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734923Y2 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112739848A (zh) * | 2018-09-27 | 2021-04-30 | 株式会社爱发科 | 磁控管溅射装置用磁铁单元 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5917896U (ja) * | 1982-07-27 | 1984-02-03 | 三菱重工業株式会社 | 高速増殖炉の炉心構成要素 |
| JPS6338576A (ja) * | 1986-08-01 | 1988-02-19 | Anelva Corp | スパツタリング装置 |
-
1989
- 1989-03-09 JP JP1989027017U patent/JPH0734923Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5917896U (ja) * | 1982-07-27 | 1984-02-03 | 三菱重工業株式会社 | 高速増殖炉の炉心構成要素 |
| JPS6338576A (ja) * | 1986-08-01 | 1988-02-19 | Anelva Corp | スパツタリング装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112739848A (zh) * | 2018-09-27 | 2021-04-30 | 株式会社爱发科 | 磁控管溅射装置用磁铁单元 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734923Y2 (ja) | 1995-08-09 |