JPH02118237U - - Google Patents
Info
- Publication number
- JPH02118237U JPH02118237U JP2623389U JP2623389U JPH02118237U JP H02118237 U JPH02118237 U JP H02118237U JP 2623389 U JP2623389 U JP 2623389U JP 2623389 U JP2623389 U JP 2623389U JP H02118237 U JPH02118237 U JP H02118237U
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- diaphragm
- support base
- metal
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2623389U JPH0650750Y2 (ja) | 1989-03-08 | 1989-03-08 | 振動形差圧センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2623389U JPH0650750Y2 (ja) | 1989-03-08 | 1989-03-08 | 振動形差圧センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02118237U true JPH02118237U (un) | 1990-09-21 |
| JPH0650750Y2 JPH0650750Y2 (ja) | 1994-12-21 |
Family
ID=31247678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2623389U Expired - Lifetime JPH0650750Y2 (ja) | 1989-03-08 | 1989-03-08 | 振動形差圧センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650750Y2 (un) |
-
1989
- 1989-03-08 JP JP2623389U patent/JPH0650750Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650750Y2 (ja) | 1994-12-21 |