JPH01156437U - - Google Patents
Info
- Publication number
- JPH01156437U JPH01156437U JP5244988U JP5244988U JPH01156437U JP H01156437 U JPH01156437 U JP H01156437U JP 5244988 U JP5244988 U JP 5244988U JP 5244988 U JP5244988 U JP 5244988U JP H01156437 U JPH01156437 U JP H01156437U
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- diaphragm
- support base
- metal
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5244988U JPH01156437U (un) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5244988U JPH01156437U (un) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156437U true JPH01156437U (un) | 1989-10-27 |
Family
ID=31278448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5244988U Pending JPH01156437U (un) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156437U (un) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012242123A (ja) * | 2011-05-16 | 2012-12-10 | Yokogawa Electric Corp | 振動式圧力トランスデューサ |
-
1988
- 1988-04-19 JP JP5244988U patent/JPH01156437U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012242123A (ja) * | 2011-05-16 | 2012-12-10 | Yokogawa Electric Corp | 振動式圧力トランスデューサ |