JPH01129855U - - Google Patents
Info
- Publication number
- JPH01129855U JPH01129855U JP2387088U JP2387088U JPH01129855U JP H01129855 U JPH01129855 U JP H01129855U JP 2387088 U JP2387088 U JP 2387088U JP 2387088 U JP2387088 U JP 2387088U JP H01129855 U JPH01129855 U JP H01129855U
- Authority
- JP
- Japan
- Prior art keywords
- fixed part
- shape
- pressure sensor
- semiconductor
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2387088U JPH01129855U (un) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2387088U JPH01129855U (un) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129855U true JPH01129855U (un) | 1989-09-04 |
Family
ID=31243229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2387088U Pending JPH01129855U (un) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129855U (un) |
-
1988
- 1988-02-26 JP JP2387088U patent/JPH01129855U/ja active Pending