JPH02118226U - - Google Patents
Info
- Publication number
- JPH02118226U JPH02118226U JP2577789U JP2577789U JPH02118226U JP H02118226 U JPH02118226 U JP H02118226U JP 2577789 U JP2577789 U JP 2577789U JP 2577789 U JP2577789 U JP 2577789U JP H02118226 U JPH02118226 U JP H02118226U
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- pressure
- flow path
- fluid flow
- reduced pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 29
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989025777U JPH0740175Y2 (ja) | 1989-03-07 | 1989-03-07 | 流量制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989025777U JPH0740175Y2 (ja) | 1989-03-07 | 1989-03-07 | 流量制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02118226U true JPH02118226U (US20090163788A1-20090625-C00002.png) | 1990-09-21 |
| JPH0740175Y2 JPH0740175Y2 (ja) | 1995-09-13 |
Family
ID=31246809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989025777U Expired - Fee Related JPH0740175Y2 (ja) | 1989-03-07 | 1989-03-07 | 流量制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740175Y2 (US20090163788A1-20090625-C00002.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000035821A (ja) * | 1998-07-17 | 2000-02-02 | Horiba Ltd | 気体流量制御装置 |
| JP2011248773A (ja) * | 2010-05-28 | 2011-12-08 | Horiba Ltd | 流量比率制御装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5085867B2 (ja) * | 2006-01-24 | 2012-11-28 | 株式会社フジキン | 圧力センサ装置および圧力センサ内蔵流体制御機器 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5992313A (ja) * | 1982-11-18 | 1984-05-28 | Kansai Electric Power Co Inc:The | 流量検出装置 |
| JPS6062117U (ja) * | 1983-10-04 | 1985-05-01 | 株式会社 京浜精機製作所 | 流量制御弁 |
-
1989
- 1989-03-07 JP JP1989025777U patent/JPH0740175Y2/ja not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5992313A (ja) * | 1982-11-18 | 1984-05-28 | Kansai Electric Power Co Inc:The | 流量検出装置 |
| JPS6062117U (ja) * | 1983-10-04 | 1985-05-01 | 株式会社 京浜精機製作所 | 流量制御弁 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000035821A (ja) * | 1998-07-17 | 2000-02-02 | Horiba Ltd | 気体流量制御装置 |
| JP2011248773A (ja) * | 2010-05-28 | 2011-12-08 | Horiba Ltd | 流量比率制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0740175Y2 (ja) | 1995-09-13 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |