JPH0211797Y2 - - Google Patents

Info

Publication number

JPH0211797Y2

JPH0211797Y2 JP11582180U JP11582180U JPH0211797Y2 JP H0211797 Y2 JPH0211797 Y2 JP H0211797Y2 JP 11582180 U JP11582180 U JP 11582180U JP 11582180 U JP11582180 U JP 11582180U JP H0211797 Y2 JPH0211797 Y2 JP H0211797Y2

Authority

JP

Japan

Prior art keywords

laser

cathode

electrode

discharge

tube

Prior art date

1980-08-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• 239000000463 material Substances 0.000 claims description 8
• 239000011521 glass Substances 0.000 description 12
• CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
• 239000000110 cooling liquid Substances 0.000 description 7
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
• 229910002092 carbon dioxide Inorganic materials 0.000 description 5
• 239000001569 carbon dioxide Substances 0.000 description 5
• 238000001816 cooling Methods 0.000 description 5
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
• 229910052782 aluminium Inorganic materials 0.000 description 3
• 230000006866 deterioration Effects 0.000 description 3
• 229910052759 nickel Inorganic materials 0.000 description 3
• 238000013021 overheating Methods 0.000 description 2
• 239000002826 coolant Substances 0.000 description 1
• 238000000354 decomposition reaction Methods 0.000 description 1
• 238000012423 maintenance Methods 0.000 description 1
• 238000010992 reflux Methods 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1