JPH02117857U - - Google Patents

Info

Publication number
JPH02117857U
JPH02117857U JP2495689U JP2495689U JPH02117857U JP H02117857 U JPH02117857 U JP H02117857U JP 2495689 U JP2495689 U JP 2495689U JP 2495689 U JP2495689 U JP 2495689U JP H02117857 U JPH02117857 U JP H02117857U
Authority
JP
Japan
Prior art keywords
polished
holder according
template
protective member
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2495689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2495689U priority Critical patent/JPH02117857U/ja
Publication of JPH02117857U publication Critical patent/JPH02117857U/ja
Pending legal-status Critical Current

Links

JP2495689U 1989-03-03 1989-03-03 Pending JPH02117857U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2495689U JPH02117857U (enrdf_load_html_response) 1989-03-03 1989-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2495689U JPH02117857U (enrdf_load_html_response) 1989-03-03 1989-03-03

Publications (1)

Publication Number Publication Date
JPH02117857U true JPH02117857U (enrdf_load_html_response) 1990-09-20

Family

ID=31245254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2495689U Pending JPH02117857U (enrdf_load_html_response) 1989-03-03 1989-03-03

Country Status (1)

Country Link
JP (1) JPH02117857U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010036283A (ja) * 2008-08-01 2010-02-18 Tokyo Seimitsu Co Ltd ウェーハ研磨装置におけるリテーナリング精度維持機構

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61209877A (ja) * 1985-03-14 1986-09-18 Nitto Hatsujo:Kk ラツピングキヤリア

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61209877A (ja) * 1985-03-14 1986-09-18 Nitto Hatsujo:Kk ラツピングキヤリア

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010036283A (ja) * 2008-08-01 2010-02-18 Tokyo Seimitsu Co Ltd ウェーハ研磨装置におけるリテーナリング精度維持機構

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