JPH01114264U - - Google Patents

Info

Publication number
JPH01114264U
JPH01114264U JP1088288U JP1088288U JPH01114264U JP H01114264 U JPH01114264 U JP H01114264U JP 1088288 U JP1088288 U JP 1088288U JP 1088288 U JP1088288 U JP 1088288U JP H01114264 U JPH01114264 U JP H01114264U
Authority
JP
Japan
Prior art keywords
workpiece
polishing
carrier
storage hole
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1088288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1088288U priority Critical patent/JPH01114264U/ja
Publication of JPH01114264U publication Critical patent/JPH01114264U/ja
Pending legal-status Critical Current

Links

JP1088288U 1988-01-29 1988-01-29 Pending JPH01114264U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1088288U JPH01114264U (enrdf_load_html_response) 1988-01-29 1988-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1088288U JPH01114264U (enrdf_load_html_response) 1988-01-29 1988-01-29

Publications (1)

Publication Number Publication Date
JPH01114264U true JPH01114264U (enrdf_load_html_response) 1989-08-01

Family

ID=31218937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1088288U Pending JPH01114264U (enrdf_load_html_response) 1988-01-29 1988-01-29

Country Status (1)

Country Link
JP (1) JPH01114264U (enrdf_load_html_response)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007098543A (ja) * 2005-10-07 2007-04-19 Nikon Corp ワークキャリア及び両面研磨装置
JP2009012086A (ja) * 2007-07-02 2009-01-22 Speedfam Co Ltd ワークキャリア
JP2011067918A (ja) * 2009-09-28 2011-04-07 Shirasaki Seisakusho:Kk 脆性薄板研磨装置用ホルダ、およびその製造方法
JP2011235373A (ja) * 2010-05-07 2011-11-24 Fujibo Holdings Inc 枠材および枠材を有する保持具

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61209877A (ja) * 1985-03-14 1986-09-18 Nitto Hatsujo:Kk ラツピングキヤリア

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61209877A (ja) * 1985-03-14 1986-09-18 Nitto Hatsujo:Kk ラツピングキヤリア

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007098543A (ja) * 2005-10-07 2007-04-19 Nikon Corp ワークキャリア及び両面研磨装置
JP2009012086A (ja) * 2007-07-02 2009-01-22 Speedfam Co Ltd ワークキャリア
JP2011067918A (ja) * 2009-09-28 2011-04-07 Shirasaki Seisakusho:Kk 脆性薄板研磨装置用ホルダ、およびその製造方法
JP2011235373A (ja) * 2010-05-07 2011-11-24 Fujibo Holdings Inc 枠材および枠材を有する保持具

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