JPH02114493U - - Google Patents

Info

Publication number
JPH02114493U
JPH02114493U JP2267389U JP2267389U JPH02114493U JP H02114493 U JPH02114493 U JP H02114493U JP 2267389 U JP2267389 U JP 2267389U JP 2267389 U JP2267389 U JP 2267389U JP H02114493 U JPH02114493 U JP H02114493U
Authority
JP
Japan
Prior art keywords
cylinder
axial end
casing
parallel
finger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2267389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0644619Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989022673U priority Critical patent/JPH0644619Y2/ja
Publication of JPH02114493U publication Critical patent/JPH02114493U/ja
Application granted granted Critical
Publication of JPH0644619Y2 publication Critical patent/JPH0644619Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989022673U 1989-02-28 1989-02-28 平行開閉チャック装置 Expired - Lifetime JPH0644619Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989022673U JPH0644619Y2 (ja) 1989-02-28 1989-02-28 平行開閉チャック装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989022673U JPH0644619Y2 (ja) 1989-02-28 1989-02-28 平行開閉チャック装置

Publications (2)

Publication Number Publication Date
JPH02114493U true JPH02114493U (pm) 1990-09-13
JPH0644619Y2 JPH0644619Y2 (ja) 1994-11-16

Family

ID=31240998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989022673U Expired - Lifetime JPH0644619Y2 (ja) 1989-02-28 1989-02-28 平行開閉チャック装置

Country Status (1)

Country Link
JP (1) JPH0644619Y2 (pm)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007160500A (ja) * 2005-12-13 2007-06-28 Gimatic Spa 改良型平行空気式グリッパー
WO2012060226A1 (ja) * 2010-11-02 2012-05-10 株式会社アルバック 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置
JP2017087393A (ja) * 2015-11-16 2017-05-25 株式会社デンソーウェーブ 把持装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6914740B2 (ja) * 2017-06-07 2021-08-04 キヤノン株式会社 把持装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5080973U (pm) * 1973-11-30 1975-07-12
JPS61168482A (ja) * 1985-01-21 1986-07-30 三菱電機株式会社 産業用ロボツトのハンド装置
JPS63312041A (ja) * 1987-06-10 1988-12-20 Ochiai Tetsukoujiyou:Kk 平行クランプ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5080973U (pm) * 1973-11-30 1975-07-12
JPS61168482A (ja) * 1985-01-21 1986-07-30 三菱電機株式会社 産業用ロボツトのハンド装置
JPS63312041A (ja) * 1987-06-10 1988-12-20 Ochiai Tetsukoujiyou:Kk 平行クランプ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007160500A (ja) * 2005-12-13 2007-06-28 Gimatic Spa 改良型平行空気式グリッパー
WO2012060226A1 (ja) * 2010-11-02 2012-05-10 株式会社アルバック 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置
JP2017087393A (ja) * 2015-11-16 2017-05-25 株式会社デンソーウェーブ 把持装置

Also Published As

Publication number Publication date
JPH0644619Y2 (ja) 1994-11-16

Similar Documents

Publication Publication Date Title
JPS5873993U (ja) ２気筒回転式圧縮機
JPH02114493U (pm)
JPH02114492U (pm)
JPS6266003U (pm)
JPH0433365Y2 (pm)
JPS60138626U (ja) テ−ブル送り装置
JPS6386308U (pm)
JPS62104074U (pm)
JPS6265413U (pm)
JPH02114742U (pm)
JPS5888543U (ja) ガス量調節装置
JPS62180811U (pm)
JPH0182448U (pm)
JPS593069U (ja) 二流路同時開閉装置
JPH038673U (pm)
JPH02111311U (pm)
JPH03110111U (pm)
JPH0159427U (pm)
JPS61141055U (pm)
JPS6421868U (pm)
JPS59158911U (ja) 二流路同時開閉装置
JPS6054707U (ja) 内燃機関のバルブタイミング制御装置
JPH01119842U (pm)
JPH0218629U (pm)
JPS61175146U (pm)