JPH02114493U - - Google Patents
Info
- Publication number
- JPH02114493U JPH02114493U JP2267389U JP2267389U JPH02114493U JP H02114493 U JPH02114493 U JP H02114493U JP 2267389 U JP2267389 U JP 2267389U JP 2267389 U JP2267389 U JP 2267389U JP H02114493 U JPH02114493 U JP H02114493U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- axial end
- casing
- parallel
- finger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989022673U JPH0644619Y2 (ja) | 1989-02-28 | 1989-02-28 | 平行開閉チャック装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989022673U JPH0644619Y2 (ja) | 1989-02-28 | 1989-02-28 | 平行開閉チャック装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02114493U true JPH02114493U (en:Method) | 1990-09-13 |
| JPH0644619Y2 JPH0644619Y2 (ja) | 1994-11-16 |
Family
ID=31240998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989022673U Expired - Lifetime JPH0644619Y2 (ja) | 1989-02-28 | 1989-02-28 | 平行開閉チャック装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644619Y2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007160500A (ja) * | 2005-12-13 | 2007-06-28 | Gimatic Spa | 改良型平行空気式グリッパー |
| WO2012060226A1 (ja) * | 2010-11-02 | 2012-05-10 | 株式会社アルバック | 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置 |
| JP2017087393A (ja) * | 2015-11-16 | 2017-05-25 | 株式会社デンソーウェーブ | 把持装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6914740B2 (ja) * | 2017-06-07 | 2021-08-04 | キヤノン株式会社 | 把持装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5080973U (en:Method) * | 1973-11-30 | 1975-07-12 | ||
| JPS61168482A (ja) * | 1985-01-21 | 1986-07-30 | 三菱電機株式会社 | 産業用ロボツトのハンド装置 |
| JPS63312041A (ja) * | 1987-06-10 | 1988-12-20 | Ochiai Tetsukoujiyou:Kk | 平行クランプ装置 |
-
1989
- 1989-02-28 JP JP1989022673U patent/JPH0644619Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5080973U (en:Method) * | 1973-11-30 | 1975-07-12 | ||
| JPS61168482A (ja) * | 1985-01-21 | 1986-07-30 | 三菱電機株式会社 | 産業用ロボツトのハンド装置 |
| JPS63312041A (ja) * | 1987-06-10 | 1988-12-20 | Ochiai Tetsukoujiyou:Kk | 平行クランプ装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007160500A (ja) * | 2005-12-13 | 2007-06-28 | Gimatic Spa | 改良型平行空気式グリッパー |
| WO2012060226A1 (ja) * | 2010-11-02 | 2012-05-10 | 株式会社アルバック | 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置 |
| JP2017087393A (ja) * | 2015-11-16 | 2017-05-25 | 株式会社デンソーウェーブ | 把持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644619Y2 (ja) | 1994-11-16 |