JPH0211356U - - Google Patents

Description

[Brief explanation of drawings]

1 to 3 are plan views for explaining the manufacturing process of the first embodiment of the photo sensor element according to the present invention, FIG. 4 is a cross-sectional view for explaining the first embodiment of the present invention, and FIG. 5 is the present invention FIG. 6 is an explanatory diagram showing an example of the code detected by the photo sensor element according to the present invention, and FIGS. 7 to 9 are side views showing the second embodiment of the photo sensor element according to the present invention. FIG. 10 is a plan view for explaining the manufacturing process of the embodiment. FIG. 10 is a plan view for explaining the third embodiment of the photo sensor element according to the present invention. 1: Transparent insulating substrate, 2: Transparent electrode, 3: Transparent window, 4: Semiconductor layer, 5: Metal electrode, 6: Sensor section, 7: Object to be detected, 8: Light emitting diode, 9: Electrode extraction section , 10: Electrode extraction part, 11: Lamination part, 12: Circular part, 13: Partition part.

Claims (1)

[Claims for Utility Model Registration] 1. On a transparent insulating substrate, a non-laminated part consisting of only the insulating substrate and no other opaque material is formed as a transparent window, and around the transparent window, a transparent electrode, A photo sensor element, characterized in that an amorphous silicon-based semiconductor layer and a metal electrode are sequentially laminated to form one or more sensor parts, and the shape of the light-transmitting window is formed by the metal electrode. . 2. The photo sensor element according to claim 1, in which four sensor sections are formed around a light-transmitting window. 3. The photo sensor element is formed into a square shape, and four substantially square sensor parts each having a side length of 1/2 or less of the length of one side of the photo sensor element are formed, and the photo sensor element is located in the center of the photo sensor element. Claim 1 or 2 of the Utility Model Registration Claim, wherein the sensor portion is cut out to form a circular light-transmitting window.
Photosensor element described in section. 4 Utility model registration claim 1 in which the transparent electrodes of the sensor portion located around the transparent window are common
The photo sensor element according to item 1 or 2 or 3. 5 Utility model registration claim 1, in which the metal electrodes of the sensor parts located around the transparent window are common
The photo sensor element according to item 1 or 2 or 3. 6. The photo sensor element according to claim 1, 2, or 4, in which the light-transmitting window is divided in correspondence with the sensor portions located around the light-transmitting window. 7. On a light-transmitting insulating substrate, a transparent electrode, an amorphous silicon-based semiconductor layer, and a metal electrode are sequentially laminated to form a square-shaped photo sensor element in plan view, with one side having the same length as one side of the photo sensor element. Four substantially square-shaped sensor parts having a length of 1/2 or less are formed, and the sensor parts are cut out so as to form a circular light-transmitting window located at the center of the photo sensor element. A photo sensor element formed by forming a laminated portion shaped like a cross in plan view within a light-transmitting window. 8 Claim No. 7 for Utility Model Registration in which the cross-shaped laminated portion in the transparent window is composed of metal electrodes
Photosensor element described in section.