JPH02112331U - - Google Patents
Info
- Publication number
- JPH02112331U JPH02112331U JP2181489U JP2181489U JPH02112331U JP H02112331 U JPH02112331 U JP H02112331U JP 2181489 U JP2181489 U JP 2181489U JP 2181489 U JP2181489 U JP 2181489U JP H02112331 U JPH02112331 U JP H02112331U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- clean room
- gas
- dust
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims 2
- 230000003749 cleanliness Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2181489U JPH02112331U (fi) | 1989-02-27 | 1989-02-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2181489U JPH02112331U (fi) | 1989-02-27 | 1989-02-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02112331U true JPH02112331U (fi) | 1990-09-07 |
Family
ID=31239373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2181489U Pending JPH02112331U (fi) | 1989-02-27 | 1989-02-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02112331U (fi) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015166646A (ja) * | 2014-03-03 | 2015-09-24 | 三機工業株式会社 | 排気の循環利用型安全キャビネット及び排気の循環利用型安全キャビネットを備えるクリーンルームの空気循環システム |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5434949A (en) * | 1977-08-22 | 1979-03-14 | Alamance Ind Inc | Panty hose having west band and production thereof |
JPS5434959A (en) * | 1977-08-24 | 1979-03-14 | Hitachi Ltd | Hair curler |
-
1989
- 1989-02-27 JP JP2181489U patent/JPH02112331U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5434949A (en) * | 1977-08-22 | 1979-03-14 | Alamance Ind Inc | Panty hose having west band and production thereof |
JPS5434959A (en) * | 1977-08-24 | 1979-03-14 | Hitachi Ltd | Hair curler |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015166646A (ja) * | 2014-03-03 | 2015-09-24 | 三機工業株式会社 | 排気の循環利用型安全キャビネット及び排気の循環利用型安全キャビネットを備えるクリーンルームの空気循環システム |