JPH02112331U

JPH02112331U -

Info

Publication number: JPH02112331U
Application number: JP2181489U
Authority: JP
Priority date: 1989-02-27
Filing date: 1989-02-27
Publication date: 1990-09-07

Description

[Brief explanation of drawings]

第１図は本考案の一実施例の全体を示す側断面
構成図、第２図は実施例の変形例に係るエアカー
テン部を示す側断面部分構成図、第３図は実施例
の変形例に係る還気ダクトを示す側断面構成部分
図、第４図は従来例を示す側断面構成図である。１１……ドラフトチヤンバ、１２……クリーン
ルーム、１６……清浄エア、１６ａ……吹出流、
１９……作業者、２０……開口部、２１……チヤ
ンバ、２７，３０……フアン、３５……吸気ダク
ト、３６……外気導入フアン、３７……プレフイ
ルタ、３８……ヒータ。 FIG. 1 is a side cross-sectional configuration diagram showing the entirety of an embodiment of the present invention, FIG. 2 is a side cross-sectional partial configuration diagram showing an air curtain section according to a modification of the embodiment, and FIG. 3 is a modification of the embodiment. FIG. 4 is a side cross-sectional configuration diagram showing a conventional example. 11...Draft chamber, 12...Clean room, 16...Clean air, 16a...Blowout flow,
19...operator, 20...opening, 21...chamber, 27, 30...fan, 35...intake duct, 36...outside air introduction fan, 37...prefilter, 38...heater.

Claims

[Scope of utility model registration request]

A chamber covers the emission part of dust and gas generated in a local work area in a clean room whose cleanliness is maintained by clean air, and a blowout flow that has passed through a filter is supplied into this chamber to remove the generated dust and gas. A draft chamber installed in a clean room and having an exhaust means that does not diffuse gas into the clean room, characterized in that the intake source of the blowout flow supplied into the chamber is mainly outside air.