JPH0211158U - - Google Patents
Info
- Publication number
- JPH0211158U JPH0211158U JP8764288U JP8764288U JPH0211158U JP H0211158 U JPH0211158 U JP H0211158U JP 8764288 U JP8764288 U JP 8764288U JP 8764288 U JP8764288 U JP 8764288U JP H0211158 U JPH0211158 U JP H0211158U
- Authority
- JP
- Japan
- Prior art keywords
- microwave chamber
- tube
- microwave
- portion facing
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8764288U JPH0211158U (sv) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8764288U JPH0211158U (sv) | 1988-06-30 | 1988-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0211158U true JPH0211158U (sv) | 1990-01-24 |
Family
ID=31312246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8764288U Pending JPH0211158U (sv) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0211158U (sv) |
-
1988
- 1988-06-30 JP JP8764288U patent/JPH0211158U/ja active Pending