JPH02111470A - Apparatus for producing organic thin membrane - Google Patents
Apparatus for producing organic thin membraneInfo
- Publication number
- JPH02111470A JPH02111470A JP26137788A JP26137788A JPH02111470A JP H02111470 A JPH02111470 A JP H02111470A JP 26137788 A JP26137788 A JP 26137788A JP 26137788 A JP26137788 A JP 26137788A JP H02111470 A JPH02111470 A JP H02111470A
- Authority
- JP
- Japan
- Prior art keywords
- water
- membranes
- peltier element
- org
- water tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 49
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 238000001816 cooling Methods 0.000 claims abstract description 5
- 239000010409 thin film Substances 0.000 claims description 13
- 239000011368 organic material Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 abstract description 8
- 235000021355 Stearic acid Nutrition 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 5
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 abstract description 5
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 abstract description 5
- 239000008117 stearic acid Substances 0.000 abstract description 5
- 230000005855 radiation Effects 0.000 abstract description 4
- -1 for example Substances 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 235000014113 dietary fatty acids Nutrition 0.000 abstract description 2
- 229930195729 fatty acid Natural products 0.000 abstract description 2
- 239000000194 fatty acid Substances 0.000 abstract description 2
- 150000004665 fatty acids Chemical class 0.000 abstract description 2
- 102000004169 proteins and genes Human genes 0.000 abstract description 2
- 108090000623 proteins and genes Proteins 0.000 abstract description 2
- AUNGANRZJHBGPY-SCRDCRAPSA-N Riboflavin Chemical compound OC[C@@H](O)[C@@H](O)[C@@H](O)CN1C=2C=C(C)C(C)=CC=2N=C2C1=NC(=O)NC2=O AUNGANRZJHBGPY-SCRDCRAPSA-N 0.000 abstract 1
- 150000004032 porphyrins Chemical class 0.000 abstract 1
- 239000010408 film Substances 0.000 description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 11
- 239000010931 gold Substances 0.000 description 11
- 229910052737 gold Inorganic materials 0.000 description 11
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910004269 CaCu5 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002211 flavins Chemical class 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 150000004033 porphyrin derivatives Chemical class 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
- B01D69/122—Separate manufacturing of ultra-thin membranes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Formation Of Insulating Films (AREA)
- Coating Apparatus (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は水槽及び水面上の有機材料の加熱及び冷却を行
なう有機薄膜製造装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an apparatus for producing an organic thin film for heating and cooling an organic material on a water tank and water surface.
従来の技術
近年、水面展開膜やこれを基板上に移し取るラングミュ
ア−・プロジット膜を用いた各種の電子デバイス、記録
材料が盛んに研究されている。この水面展開膜は、諸条
件、例えば水温、気温、ｐＨ等により膜密度、結晶性、
配向性が変化することが知られている。特に水温制御（
有機物の温度間ｇ４）は、従来から、水槽下部または側
面に水を循環させる空間を設け、温度調整した水を流す
方法（例えば、特開昭８２−２９４４３４号公報、特開
昭６３−５４９３３号公報）、水槽に直接温度調整した
溶液を流す方法（例えば、特開昭８０−１９３５３６号
公報）が行なわれている。しかし、これらの方法では、
強制的に流体を移動させているため水面上の有機分子に
振動が生じ、また水槽の温度変化に要する時間も長くな
り、有４１Ｆ！ｌｉ膜の結晶性、配向性、生産性の点で
非常に問題がある。BACKGROUND OF THE INVENTION In recent years, various electronic devices and recording materials using a water surface spreading film and a Langmuir-prodgit film for transferring the film onto a substrate have been actively researched. This water-surface-deployed film has a change in film density, crystallinity, etc. depending on various conditions such as water temperature, air temperature, pH, etc.
It is known that the orientation changes. Especially water temperature control (
The temperature range g4) of organic matter has conventionally been determined by providing a space for circulating water at the bottom or side of the tank and flowing temperature-adjusted water (for example, JP-A-82-294434, JP-A-63-54933). (Japanese Unexamined Patent Publication No. 80-193536), in which a temperature-controlled solution is directly poured into a water tank. However, these methods
Because the fluid is forcibly moved, organic molecules on the water surface vibrate, and the time required for the temperature of the aquarium to change also increases, resulting in a temperature increase of 41F! There are serious problems in terms of crystallinity, orientation, and productivity of the Li film.
発明が解決しようとする課題
本発明は無振動かつ短時間に均一に水温（有機物の温度
）を調整し、有機薄膜の結晶性、配向性を精密にコント
ロールするとともに、生産性を向上させることが可能な
有機薄膜製造装置を提供することを目的とする。Problems to be Solved by the Invention The present invention can uniformly adjust the water temperature (temperature of organic matter) without vibration and in a short time, precisely control the crystallinity and orientation of organic thin films, and improve productivity. The purpose is to provide a possible organic thin film manufacturing device.
課題を解決するための手段 水面上に水に不溶な有機材料（脂肪酸１色素。Means to solve problems Water-insoluble organic material (fatty acid 1 pigment) on the water surface.
タンパク質、その他ＬＢ膜に成り得る材料、例えばステ
アリン酸、スピロピラン、ポルフィリン誘導体、フラビ
ン誘導体等）を展開し薄膜とする有機薄膜製造装置にお
いて、水槽の加熱及び冷却用のペルチェ素子を設置した
水槽、更には有機材料の加熱効率を上げるために水面へ
の加熱源として赤外光照射装置を有する有機薄膜製造装
置である。In an organic thin film manufacturing apparatus that develops and forms thin films from proteins and other materials that can be used as LB films, such as stearic acid, spiropyran, porphyrin derivatives, flavin derivatives, etc., an aquarium equipped with a Peltier element for heating and cooling the aquarium; is an organic thin film manufacturing apparatus that has an infrared light irradiation device as a heating source for the water surface in order to increase the heating efficiency of organic materials.
作用
本発明によれば、水面上に有機材料を展開し薄膜とする
際、水槽の温度制御をペルチェ素子及び赤外光で行なう
ことで無振動かつ短時間で均一に制御出来る。According to the present invention, when an organic material is spread on the water surface to form a thin film, the temperature of the water tank can be controlled uniformly in a short time and without vibration by controlling the temperature of the water tank using a Peltier element and infrared light.
以下詳細に説明する。用いるペルチェ素子は室温付近で
使用可能なものであり、設置場所は水槽の下部や側部で
水槽の形によって決まり、熱拡散が良いように水槽に密
着させる。This will be explained in detail below. The Peltier element used can be used at around room temperature, and the installation location is determined by the shape of the tank, either at the bottom or on the side of the tank, and it is placed in close contact with the tank to ensure good heat diffusion.
また、ペルチェ素子は水槽面を冷却する場合、もう一方
の面が加熱になり、冷却しなければならない。これは、
大気との温度差が小さい場合・空冷でも良いが、大きい
場合には放熱禮を設けることが望ましい。Furthermore, when the Peltier element cools the surface of the aquarium, the other surface becomes heated and must be cooled. this is,
If the temperature difference with the atmosphere is small, air cooling may be used, but if the temperature difference is large, it is desirable to provide heat radiation.
個々のペルチェ素子と電源との接続は、電源の容量や素
子の信頼性等により直列でも並列でも良く、素子に流れ
る電流の方向は、第４図で説明すると、上面冷却時にＮ
型からＰ型へ、上面加熱時にはＰ型からＮ型へなるよう
にする。The connection between each Peltier element and the power supply may be in series or parallel depending on the capacity of the power supply and the reliability of the element, and the direction of the current flowing through the element is determined by the direction of N when the top surface is cooled.
It is made to change from the mold to the P type, and from the P type to the N type when the top surface is heated.
水面に展開した有機材料に加熱効率を更に良くするため
に赤外光を照射するが、光源にはセラミックスヒーター
が良く、可視光を含む場合に起こる有機材料の変化（光
重合反応、会合、劣化等）を抑制出来る。Infrared light is irradiated to organic materials spread on the water surface to further improve heating efficiency, but a ceramic heater is a good light source. etc.) can be suppressed.
照射する赤外光の波長は水及び有機材料が吸収をもつ２
．５４ ｍ以上で、フィルター等を用いて変化させるこ
とが出来る。The wavelength of the infrared light to be irradiated is 2, which is absorbed by water and organic materials.
．． 54 m or more, it can be changed using a filter, etc.
赤外光の照射は第２図のように水面上部に光源１２を設
置し、金コーティングシャッター１３を用い、照射時間
を調整して行なうか、第３図のように遠方からの赤外光
を金コーティングシャッター１３で照射時間調整し、金
コーティング反射板１４に反射させて行なうか、装置環
境によって選択出来る。Irradiation of infrared light can be carried out by installing a light source 12 above the water surface, using a gold-coated shutter 13, and adjusting the irradiation time as shown in Figure 2, or by irradiating infrared light from a distance as shown in Figure 3. Depending on the equipment environment, the irradiation time can be adjusted using the gold-coated shutter 13 and the irradiation can be reflected by the gold-coated reflector plate 14.
実施例１ 以下図面を参照して本発明の詳細な説明する。Example 1 The present invention will be described in detail below with reference to the drawings.
第１図は本装置全体を示すもので、１は輻１０Ｃ１＋、
長さ６０ｃｍ、深さ１ｃｍのポリテトラフロロエチレン
でコートされた水槽、２はポリテトラフロロエチレンで
コートされた表面圧縮バーである。これはモーター１１
で移動する。Figure 1 shows the entire device, where 1 is the convergence 10C1+,
A water tank coated with polytetrafluoroethylene having a length of 60 cm and a depth of 1 cm. 2 is a surface compression bar coated with polytetrafluoroethylene. This is motor 11
Move with.
３は表面圧変化を測定するためのプレートで、表面圧検
出はプレートの重さを測定する電子天秤４を用い、ｗｉ
ｌｔｈｅ１ｍｙ型で行なっている。3 is a plate for measuring changes in surface pressure, and the surface pressure is detected using an electronic balance 4 that measures the weight of the plate.
This is done using lthe1my type.
５は本発明の有機薄膜製造装置に具備するペルチェ素子
で上部水槽及び下部放熱槽６と密着している。この場合
アルミニウム製放熱槽を用いペルチェ素子からの熱放出
を吸収するようになっており、放熱槽内部はひれ状構造
で水により熱交換される。Reference numeral 5 denotes a Peltier element included in the organic thin film manufacturing apparatus of the present invention, and is in close contact with the upper water tank and the lower heat radiation tank 6. In this case, an aluminum heat sink is used to absorb the heat released from the Peltier element, and the inside of the heat sink has a fin-like structure for heat exchange with water.
ペルチェ素子は合計４０個で直列４個接続し、これをｌ
θ個並列にして電源１６と接続されている。また、ペル
チェ素子はＢ１−Ｔｅ系を用いている。There are a total of 40 Peltier elements, 4 of which are connected in series.
θ pieces are connected in parallel to the power supply 16. Moreover, the Peltier element uses B1-Te type.
１５は熱電対で水温測定用である。７は基板ホルダーで
、基板の上下は８の°モーターで、前後、左右は９．１
０のモーターで制御される。以下、本装置を用いた有ａ
薄膜の製造例を説明する。15 is a thermocouple for measuring water temperature. 7 is a board holder, the top and bottom of the board is an 8 degree motor, and the front, back, left and right sides are 9.1 degrees.
Controlled by 0 motor. Below, we will explain how to use this device.
An example of manufacturing a thin film will be explained.
まず、ステアリン酸をクロロホルムに溶解し濃度１．０
ｇ／ｌの展開溶媒を調整し、この溶液を１８℃で２．５
Ｘ１０−ＡＭのＣｄＣＩＬｚを含む５００シの水溶液上
に少峨滴下し、クロロホルムを蒸発させた後、バー２を
移動させ表面張力を２０ｄｙｎ／ｃ＋ｓに調整した。First, dissolve stearic acid in chloroform to a concentration of 1.0.
Adjust the developing solvent to 2.5 g/l and mix this solution at 18°C.
A small amount of the solution was dropped onto a 500 mm aqueous solution containing CdCILz of X10-AM, and after chloroform was evaporated, the bar 2 was moved to adjust the surface tension to 20 dyn/c+s.
表面張力を一定に保ちながらペルチェ素子に２ＯＡ（１
個ちり４ｖ、２Ａ）電流を流し水温を４０℃にした。こ
の時、要した時間は２０分であった。水温を４０℃に２
０分保ち、次にペルチェ素子に加熱時とは逆方向に電流
を流し水槽を１８℃に冷却した。While keeping the surface tension constant, 2OA (1
A current of 4 V and 2 A was applied to raise the water temperature to 40°C. At this time, the time required was 20 minutes. Increase the water temperature to 40℃2
The temperature was maintained for 0 minutes, and then a current was applied to the Peltier element in the opposite direction to that during heating, and the water tank was cooled to 18°C.
この時、要した時間は１５分であった。At this time, the time required was 15 minutes.
この膜を表面張力を２０ｄｙｎ／ｃＩ１１に保ちながら
、金電極を設けたＳｉ基板を１ ｍｍ／＋ｏｉｎの基板
スピードで上下させ３層移し取った。この膜の上に金電
極を蒸着（面積１ｃ＋ｍ２）Ｌ、抵抗を測定したところ
ｔｏ＋６Ω＃ｃｆｆｉテあツタ。While maintaining the surface tension of this film at 20 dyn/cI11, three layers were transferred by moving the Si substrate provided with the gold electrode up and down at a substrate speed of 1 mm/+oin. A gold electrode was deposited on this film (area 1c+m2), and the resistance was measured to +6Ω#cffi.
実施例２
実施例１の装置に赤外光光源としてセラミックスヒータ
ー１２を水面上に、金コーティングシャッター１３を水
槽と光源の間に設置した。Example 2 In the apparatus of Example 1, a ceramic heater 12 as an infrared light source was installed above the water surface, and a gold-coated shutter 13 was installed between the water tank and the light source.
次に、実施例１と同様にステアリン酸を展開し、表面張
力を２０ｄｙｎ／ｃｍ一定に保ちながら、ベルチェ素子
に２ＯＡ（１個当り４ｖ、２Ａ）電流を流し、同時に放
射体の温度を２００℃設定し、水温を４０℃にした。こ
の時、要した時間は１０分であった。水温を４０℃に２
０分保ち、次にベルチェ素子に加熱時とは逆方向に電流
を流し水槽を１８℃に冷却した。この時、要した時間は
１５分であった。Next, stearic acid was developed in the same manner as in Example 1, and while keeping the surface tension constant at 20 dyn/cm, a current of 2 OA (4 V, 2 A per element) was applied to the Vertier element, and at the same time the temperature of the radiator was raised to 200°C. The water temperature was set to 40°C. At this time, the time required was 10 minutes. Increase the water temperature to 40℃2
The temperature was maintained for 0 minutes, and then a current was applied to the Vertier element in the opposite direction to that during heating to cool the water tank to 18°C. At this time, the time required was 15 minutes.
この膜を表面張力を２０ｄｙｎ／ｃ＋ｓに保ちながら、
金電極を設けたＳｉ基板を１ ａｍ／ｓｉｎの基板スピ
ードで上下させ、３層移し取った。この膜の上に金電極
を蒸着（面積１ｃ１１２）Ｌ、抵抗を測定したところ１
０１６Ω・Ｃ１１であった。While maintaining the surface tension of this membrane at 20 dyn/c+s,
The Si substrate provided with the gold electrode was moved up and down at a substrate speed of 1 am/sin to transfer three layers. A gold electrode was deposited on this film (area 1c112) L, and the resistance was measured as 1
It was 016Ω・C11.
比較例
ステアリン酸をクロロホルムに溶解し濃度１．０ｇ／４
の展開溶媒を調整し、この溶液を１８℃で２．５ＸＩＯ
−４ＭのＣａＣｕ５を含む５００シの水溶液上に少量滴
下し、クロロホルムを蒸発させた後、バー２を移動させ
表面張力を２０ｄｙｎ／ｃ■に調整した。Comparative example Stearic acid was dissolved in chloroform and the concentration was 1.0g/4.
Adjust the developing solvent of
A small amount of the solution was dropped onto a 500 cm aqueous solution containing -4M CaCu5, and after chloroform was evaporated, the bar 2 was moved to adjust the surface tension to 20 dyn/c.
表面張力を一定に保ちながら下部水槽にサーキュレータ
を用いて水を循環させ水温を４０℃にした。この時、表
面張力は±５ ｄｙｎ／ｃｍで変化し、要した時間は２
時間であった。Water was circulated in the lower water tank using a circulator while keeping the surface tension constant, and the water temperature was brought to 40°C. At this time, the surface tension changes at ±5 dyn/cm, and the time required is 2
It was time.
水温を４０℃に２０分保ち、次にサーキュレータで４０
℃の水を１８℃に冷却し水槽を冷却した。この時、要し
た時間は４時間であった。また、この時も表面張力が±
５ ｄｆｆｎ／ｃ＋ｓで変化した。Keep the water temperature at 40℃ for 20 minutes, then use a circulator for 40 minutes.
℃ water was cooled to 18 ℃ to cool the water tank. At this time, the time required was 4 hours. Also, at this time, the surface tension is ±
5 changed by dffn/c+s.
この膜を表面張力を２０ｄｙｎ／ｃ■に保ちながら、金
電極を設けたＳｉ基板を１ ａｍ／ｓｉｎの基板スピー
ドで上下させ３層移し取った。この膜には縞模様があり
、金電極を蒸着（面積１ｅａ２）Ｌ抵抗を測定したとこ
ろ１０８〜１０１′Ω・Ｃ■の範囲でばらつきがあった
。While maintaining the surface tension of this film at 20 dyn/c, three layers were transferred by moving the Si substrate provided with the gold electrode up and down at a substrate speed of 1 am/sin. This film had a striped pattern, and when a gold electrode was deposited (area: 1ea2) and the L resistance was measured, it varied within the range of 108 to 101'Ω·C2.
発明の効果
本発明によれば、無振動かつ短時間で均一に水槽の温度
（有機材料の温度）制御を可能とする有機薄膜製造装置
を提供することが出来る。Effects of the Invention According to the present invention, it is possible to provide an organic thin film manufacturing apparatus that can uniformly control the temperature of the water tank (the temperature of the organic material) without vibration and in a short time.
【図面の簡単な説明】
図面はいずれも本発明の実施例を示すもので、第１図は
装置全体を示す斜視図、第２図は水面上からの赤外光照
射を示す説明図、第３図は赤外光の反射照射を示した説
明図、第４図はベルチェ素子を模型的に示した説明図で
ある。
１ＩＩＩＩ・水槽、２・・・バー、３・・拳プレート、
４・６拳電子天秤、５・拳・ベルチェ素子、６・・・放
熱槽、７・−・基板ホルダー、８・・・上下モーター、
９．１０・・・Ｘ−Ｙモーター１１−・・圧縮駆動モー
ター、１２・・・赤外光光源、１３・−台金コーティン
グシャッター、１４・・・金コーティング反射ミラー、
１５・ａ＃熱電対、１６・・・直流電源、１７・・・ア
ルミナ板、１８０畳・電極、１８・・・Ｎ型素子、２０
・・・Ｐ型素子。[BRIEF DESCRIPTION OF THE DRAWINGS] The drawings all show embodiments of the present invention; FIG. 1 is a perspective view showing the entire device, FIG. 2 is an explanatory view showing infrared light irradiation from above the water surface, and FIG. FIG. 3 is an explanatory diagram showing reflected irradiation of infrared light, and FIG. 4 is an explanatory diagram schematically showing a Vertier element. 1III・Aquarium, 2...Bar, 3...Fist plate,
4. 6. Fist electronic balance, 5. Fist/Beltier element, 6. Heat sink, 7. -. Board holder, 8. Upper and lower motor.
9.10...X-Y motor 11--Compression drive motor, 12...Infrared light source, 13--Base metal coating shutter, 14...Gold-coated reflective mirror,
15・a# thermocouple, 16...DC power supply, 17...alumina plate, 180 tatami electrode, 18...N type element, 20
...P type element.
Claims (2)
造装置において、水槽の加熱及び冷却用のペルチェ素子
を水槽に設置して成る有機薄膜製造装置。(1) An organic thin film manufacturing apparatus that spreads an organic material on a water surface to form a thin film, and includes a Peltier element for heating and cooling the water tank installed in the water tank.
照射する赤外光照射装置を付加した有機薄膜製造装置。(2) An organic thin film manufacturing apparatus, which is the apparatus of claim 1 added with an infrared light irradiation device that irradiates infrared light as a heating source to the water surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63261377A JPH06220B2 (en) | 1988-10-19 | 1988-10-19 | Organic thin film manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63261377A JPH06220B2 (en) | 1988-10-19 | 1988-10-19 | Organic thin film manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02111470A true JPH02111470A (en) | 1990-04-24 |
| JPH06220B2 JPH06220B2 (en) | 1994-01-05 |
Family
ID=17361001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63261377A Expired - Lifetime JPH06220B2 (en) | 1988-10-19 | 1988-10-19 | Organic thin film manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06220B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100318151B1 (en) * | 1998-07-25 | 2002-04-22 | 김동호 | Club double shaft |
| EP3034158A1 (en) * | 2014-12-17 | 2016-06-22 | Universität Potsdam | Device and method for producing ultrathin films |
| JP2016156843A (en) * | 2016-06-07 | 2016-09-01 | シャープ株式会社 | Biomolecule analysis apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5298038A (en) * | 1976-02-11 | 1977-08-17 | Commissariat Energie Atomique | Method and apparatus for depositing monomolecular layer of bimediophilic molecular on substrate |
| JPS6227069A (en) * | 1985-07-30 | 1987-02-05 | Fuji Photo Film Co Ltd | Device for forming solid monomolecular film |
| JPS63224759A (en) * | 1987-03-16 | 1988-09-19 | Takashi Sasaki | Continuous film forming device of convective circulating vessel |
-
1988
- 1988-10-19 JP JP63261377A patent/JPH06220B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5298038A (en) * | 1976-02-11 | 1977-08-17 | Commissariat Energie Atomique | Method and apparatus for depositing monomolecular layer of bimediophilic molecular on substrate |
| JPS6227069A (en) * | 1985-07-30 | 1987-02-05 | Fuji Photo Film Co Ltd | Device for forming solid monomolecular film |
| JPS63224759A (en) * | 1987-03-16 | 1988-09-19 | Takashi Sasaki | Continuous film forming device of convective circulating vessel |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100318151B1 (en) * | 1998-07-25 | 2002-04-22 | 김동호 | Club double shaft |
| EP3034158A1 (en) * | 2014-12-17 | 2016-06-22 | Universität Potsdam | Device and method for producing ultrathin films |
| JP2016156843A (en) * | 2016-06-07 | 2016-09-01 | シャープ株式会社 | Biomolecule analysis apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06220B2 (en) | 1994-01-05 |
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