JPH02110854U - - Google Patents

Info

Publication number
JPH02110854U
JPH02110854U JP1955889U JP1955889U JPH02110854U JP H02110854 U JPH02110854 U JP H02110854U JP 1955889 U JP1955889 U JP 1955889U JP 1955889 U JP1955889 U JP 1955889U JP H02110854 U JPH02110854 U JP H02110854U
Authority
JP
Japan
Prior art keywords
hood
sample
fine powder
air
powder removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1955889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1955889U priority Critical patent/JPH02110854U/ja
Publication of JPH02110854U publication Critical patent/JPH02110854U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Cleaning In General (AREA)
JP1955889U 1989-02-23 1989-02-23 Pending JPH02110854U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1955889U JPH02110854U (zh) 1989-02-23 1989-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1955889U JPH02110854U (zh) 1989-02-23 1989-02-23

Publications (1)

Publication Number Publication Date
JPH02110854U true JPH02110854U (zh) 1990-09-05

Family

ID=31235177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1955889U Pending JPH02110854U (zh) 1989-02-23 1989-02-23

Country Status (1)

Country Link
JP (1) JPH02110854U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013071083A (ja) * 2011-09-28 2013-04-22 Tokyo Electron Ltd パーティクル捕集装置及びパーティクルの捕集方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5312388A (en) * 1976-07-20 1978-02-03 Central Glass Co Ltd Device for preparing samples for analyzing chemical fertilizers by way of fluorescent xxrays
JPS60108168A (ja) * 1983-11-18 1985-06-13 Matsushita Electric Ind Co Ltd 金属の加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5312388A (en) * 1976-07-20 1978-02-03 Central Glass Co Ltd Device for preparing samples for analyzing chemical fertilizers by way of fluorescent xxrays
JPS60108168A (ja) * 1983-11-18 1985-06-13 Matsushita Electric Ind Co Ltd 金属の加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013071083A (ja) * 2011-09-28 2013-04-22 Tokyo Electron Ltd パーティクル捕集装置及びパーティクルの捕集方法

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