JPH02110671U - - Google Patents

Info

Publication number
JPH02110671U
JPH02110671U JP1905389U JP1905389U JPH02110671U JP H02110671 U JPH02110671 U JP H02110671U JP 1905389 U JP1905389 U JP 1905389U JP 1905389 U JP1905389 U JP 1905389U JP H02110671 U JPH02110671 U JP H02110671U
Authority
JP
Japan
Prior art keywords
sample
electrode
electrode plate
plasma
bring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1905389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1905389U priority Critical patent/JPH02110671U/ja
Publication of JPH02110671U publication Critical patent/JPH02110671U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1905389U 1989-02-20 1989-02-20 Pending JPH02110671U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1905389U JPH02110671U (enrdf_load_stackoverflow) 1989-02-20 1989-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1905389U JPH02110671U (enrdf_load_stackoverflow) 1989-02-20 1989-02-20

Publications (1)

Publication Number Publication Date
JPH02110671U true JPH02110671U (enrdf_load_stackoverflow) 1990-09-04

Family

ID=31234225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1905389U Pending JPH02110671U (enrdf_load_stackoverflow) 1989-02-20 1989-02-20

Country Status (1)

Country Link
JP (1) JPH02110671U (enrdf_load_stackoverflow)

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