JPH02110280A - Cryogenic cooling device - Google Patents

Cryogenic cooling device

Info

Publication number
JPH02110280A
JPH02110280A JP26152488A JP26152488A JPH02110280A JP H02110280 A JPH02110280 A JP H02110280A JP 26152488 A JP26152488 A JP 26152488A JP 26152488 A JP26152488 A JP 26152488A JP H02110280 A JPH02110280 A JP H02110280A
Authority
JP
Japan
Prior art keywords
heat
heat exchanger
temperature end
thermal switch
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26152488A
Other languages
Japanese (ja)
Inventor
Norihide Saho
典英 佐保
Takeo Nemoto
武夫 根本
Mitsuru Saeki
満 佐伯
Tadashi Takada
忠 高田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP26152488A priority Critical patent/JPH02110280A/en
Publication of JPH02110280A publication Critical patent/JPH02110280A/en
Pending legal-status Critical Current

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  • Devices That Are Associated With Refrigeration Equipment (AREA)

Abstract

PURPOSE:To control the movement of heat between a high-temperature end and a low-temperature end to cool and/or heat a heat exchanger in a short period of time and prevent the inside of the vacuum tank of a cooling device from being contaminated by gas leak and the like by a method wherein the high-temperature end of the cryogenic heat exchanger is conducted to the low-temperature end of the same by heat conductors through a thermal switch. CONSTITUTION:The high-temperature end of a heat exchanger 10 in a cryogenic area is conducted to the low-temperature end of the same by heat conductors 16, 17 through a thermal switch 15 while the switching of the thermal switch 15 is effected by a handle 19 and a rod 20 in room temperature side through an elastic body 18. When the high-temperature end of the heat exchanger 10 is cooler than the low-temperature end of the same, a thermal switch 15 is put ON and heat is moved from a pipeline 25 to the pipeline 21 through the heat conductors 16, 17 whereby the low-temperature end is cooled in a short period of time from the outside of the heat exchanger. The thermal switch 15 moves heat by contact and, therefore, the thermal switch will never contaminate a vacuum space wherein the thermal switch is arranged. On the other hand, the low-temperature end may be heated also in a short period of time by the thermal switch in the same manner even when the heat exchanger is being heated.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は極低温冷却装置に係り、特に、常温からの冷却
及び、極低温からの加温を短時間に行うに好適な極低温
冷却装置に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a cryogenic cooling device, and particularly to a cryogenic cooling device suitable for cooling from normal temperature and heating from a very low temperature in a short time. Regarding.

〔従来の技術〕[Conventional technology]

従来の装置は、特開昭59−109751号公報に記載
されている。
A conventional device is described in Japanese Patent Application Laid-open No. 109751/1983.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術では、被冷却体を常温から短時間に冷却す
るために、冷却装置の回転又は往復動型の寒冷発生器の
到達温度以下になる極低温の熱交換器において、高温の
温端側の高圧配管と冷端側の低圧配管をニードル弁を介
してバイパス配管で連通させ、該ニードル弁を開閉する
ようになっている。装置のクールダウン時には、冷端側
よりも温度の低い温端側の高圧冷媒をバイパスさせるこ
とによって短時間に極低温の熱交換器を冷却する。
In the above conventional technology, in order to cool the object to be cooled from room temperature in a short time, in a cryogenic heat exchanger whose temperature is lower than the temperature reached by the rotating or reciprocating type cold generator of the cooling device, the high temperature end side is The high-pressure piping and the low-pressure piping on the cold end side are communicated via a bypass piping via a needle valve, and the needle valve is opened and closed. When cooling down the device, the extremely low temperature heat exchanger is cooled in a short time by bypassing the high-pressure refrigerant on the warm end side, which has a lower temperature than the cold end side.

しかし、該ニードル弁の出入口間にゴミ等をかみ込んで
漏れが生じた場合、ニードル弁が閉の状態でも熱交換器
の伝熱部を通らずにバイパス配管を通じて、温端側の冷
媒が冷端側に漏れ込んで極低温部の温度が低下しなかっ
たり、バイパス配管を設ける必要があるので配管の接続
部から冷媒が配管外にリークする可能性が生じる等の問
題があった。
However, if a leak occurs due to dirt getting caught between the inlet and outlet of the needle valve, the refrigerant on the hot end will cool down through the bypass piping instead of passing through the heat transfer part of the heat exchanger even when the needle valve is closed. There were problems such as the refrigerant leaking into the end side and not reducing the temperature of the cryogenic part, and the necessity of providing bypass piping, which caused the possibility that the refrigerant might leak out of the piping from the connecting part of the piping.

本発明の目的は、熱交換器の温冷端間に冷媒の漏れや、
熱交換器外に冷媒のリークを生じさせずに、被冷却体を
短時間に冷却する極低温冷却装置を供供するにある。
The purpose of the present invention is to prevent leakage of refrigerant between hot and cold ends of a heat exchanger,
To provide a cryogenic cooling device that cools an object to be cooled in a short time without causing refrigerant leakage to the outside of a heat exchanger.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的は、極低温の熱交換器の温端側と冷端側間を熱
スィッチを介して伝熱導体で導通することにより達成さ
れる。
The above object is achieved by providing electrical continuity between the hot end and the cold end of the cryogenic heat exchanger using a heat transfer conductor via a thermal switch.

〔作用〕[Effect]

冷却装置のクールダウン時熱スィッチを閉路して、極低
温の熱交換器の低温となっている温端側と冷却しきれて
いない冷端側を熱的に導通させる。
During cool-down, the heat switch of the cooling device is closed to establish thermal continuity between the cold end side of the cryogenic heat exchanger and the uncooled cold end side.

それによって、熱は該熱交換器の内部を通らずに熱伝導
体を伝わり、冷却しきれていない冷端側を冷却できるの
で、短時間に冷却装置を冷却できる。
Thereby, the heat is transmitted through the heat conductor without passing through the inside of the heat exchanger, and the cold end side which has not been completely cooled can be cooled, so that the cooling device can be cooled in a short time.

熱スィッチを開路にすれば、両者間の熱抵抗が大きくな
って熱の移動がほとんど停止し、冷端側は目的の温度ま
で低下する。また、熱は熱伝導体内を移動するので、冷
媒を移動させる必要がなく、冷媒がリークする可能性が
なくなる。
When the thermal switch is opened, the thermal resistance between the two increases, almost stopping the transfer of heat, and the cold end cools to the desired temperature. Also, since the heat moves within the heat conductor, there is no need to move the refrigerant, eliminating the possibility of refrigerant leaks.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図〜第3図により説明す
る。
An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

第1圧縮機2及び第2圧縮機3で加圧した作動流体1例
えばガスヘリウムは膨張機1で断熱膨張により、2温度
レベルのステージ、第1寒冷発生手段4、第2寒冷発生
手段5で寒冷を発生する。
The working fluid 1, for example, gas helium, pressurized by the first compressor 2 and the second compressor 3 undergoes adiabatic expansion in the expander 1, and is then transferred to stages of two temperature levels, the first cold generation means 4, and the second cold generation means 5. Generates cold.

それぞれのステージには、第1寒冷熱交換器6、第2寒
冷熱交換器7を配置し、熱交換器6は、第1熱交換器8
と第2熱交換器9との間に、熱交換器7は、第2熱交換
器9と第3熱交換器10との間に配置している。
A first cold heat exchanger 6 and a second cold heat exchanger 7 are arranged in each stage, and the heat exchanger 6 is connected to the first heat exchanger 8.
and the second heat exchanger 9 , and the heat exchanger 7 is arranged between the second heat exchanger 9 and the third heat exchanger 10 .

熱交換器10の高圧側出口にはジュールトムソン弁11
を設け、その下流側に熱交換器12を配置する。熱交換
器12と試料台13を熱的に接触させ、被冷却体14を
試料台13に取付けている。
A Joule-Thomson valve 11 is installed at the high pressure side outlet of the heat exchanger 10.
is provided, and a heat exchanger 12 is disposed downstream thereof. The heat exchanger 12 and the sample stand 13 are brought into thermal contact, and the object to be cooled 14 is attached to the sample stand 13.

極低温域にある熱交換器10の高温端及び低温端は、熱
スィッチ15を介し、熱良導体16及び17で連絡して
おり、熱スィッチ15の切換は、弾性体18を介し室温
側のハンドル19とロッド20で行う、熱スィッチ15
は熱交換器10の高温側低圧配管21に熱良導体16で
ビス22で固定され、その接着面は十分熱抵抗を小さく
している。熱スイツチ本体の一部で支持したアーム23
にベアリング24を固定し、該ベアリング24でロッド
20の回転を保持している。いっぽう、熱スィッチ15
の他端は例えば銅W4製のフレキシブルな熱良導体17
を介して、熱交換器10の低温側低圧配管25に、剛性
のある熱良導体26で固定されている。27.28は熱
交換器10の高温側高圧配管と、低温側低圧配管である
The high-temperature end and low-temperature end of the heat exchanger 10 in the cryogenic region are connected via a thermal switch 15 with good thermal conductors 16 and 17, and switching of the thermal switch 15 is performed via an elastic body 18 with a handle on the room temperature side. 19 and rod 20, thermal switch 15
is fixed to the high-temperature side low-pressure pipe 21 of the heat exchanger 10 with a screw 22 using a good thermal conductor 16, and its adhesive surface has a sufficiently low thermal resistance. Arm 23 supported by a part of the heat switch body
A bearing 24 is fixed to the rod 20, and the rotation of the rod 20 is maintained by the bearing 24. On the other hand, heat switch 15
The other end is a flexible thermal conductor 17 made of copper W4, for example.
It is fixed to the low temperature side low pressure piping 25 of the heat exchanger 10 via a rigid thermal conductor 26. 27 and 28 are a high-pressure pipe on the high-temperature side and a low-pressure pipe on the low-temperature side of the heat exchanger 10.

熱スィッチの断面を第4図に示す。A cross section of the thermal switch is shown in FIG.

伝導不良体、例えばエポキシ樹脂製の側板29で、熱移
動のON、OFFを行う熱良導体16a。
A good thermal conductor 16a that turns heat transfer ON and OFF with a side plate 29 made of a poor conductor, for example, an epoxy resin.

16bを両端にビス22で固定する。熱良導体16a、
16b間で熱移動を行う時は、回転子30を第4図のよ
うに位置して、熱良導体16aの円弧面31と、熱良導
体16bのコイルバネ32で支持された円弧体33を回
転子30を介して熱的に一体化する。熱移動を止める時
は、第4図の回転子30の位置から、ロッド20の軸回
りに90°回転させ1両者を熱的に隔離させる。この操
作は、ロッド20を回転させることによって容易に行う
ことができる。
16b is fixed at both ends with screws 22. good thermal conductor 16a,
When transferring heat between the heat conductors 16b and 16b, the rotor 30 is positioned as shown in FIG. thermally integrated via To stop the heat transfer, the rod 20 is rotated 90° around the axis of the rod 20 from the position of the rotor 30 shown in FIG. 4 to thermally isolate the two. This operation can be easily performed by rotating the rod 20.

すなわち5本実施例によれば、熱交換器10の高温端が
低温端より冷めたい場合、ヒートスイッチ15をONに
し、熱良導体16.17を通じて2、配管25より配管
21に熱が移動し低温端を熱交換器外より短時間に冷却
することができる。また。
In other words, according to this embodiment, when the high temperature end of the heat exchanger 10 is desired to be cooler than the low temperature end, the heat switch 15 is turned on, and heat is transferred from the pipe 25 to the pipe 21 through the heat conductors 16 and 17, and the temperature is lowered. The end can be cooled in a shorter time than outside the heat exchanger. Also.

熱スィッチ15は、接触により熱移動を行うので、熱ス
ィッチを配置する真空空間を汚染することがない。
Since the thermal switch 15 transfers heat through contact, the vacuum space in which the thermal switch is placed will not be contaminated.

また、熱交換器加温時においても同様に熱スィッチによ
り、低温端側を短時間内に加温することができる。
Also, when heating the heat exchanger, the low temperature end side can be heated within a short time by using the heat switch.

なお、本実施例では、熱スィッチとして回転式の熱接触
機構について説明したが、往復動式の熱接触機構のもの
においても同様な効果を生じる。
In this embodiment, a rotary type thermal contact mechanism has been described as a thermal switch, but a reciprocating type thermal contact mechanism also produces similar effects.

【発明の効果〕【Effect of the invention〕

本発明によれば、熱交換器外に配置した熱スィッチを介
して、固体熱伝導体で熱交換器の高温端と低温端の熱移
動を制御できるので、熱交換器の冷却、加温を短時間に
行え、かつ、冷却装置の真空槽内等をガスリーク等で汚
染することがない効果がある。
According to the present invention, heat transfer between the high-temperature end and the low-temperature end of the heat exchanger can be controlled using a solid heat conductor through a heat switch placed outside the heat exchanger, so cooling and heating of the heat exchanger can be controlled. It can be carried out in a short time and has the effect of not contaminating the inside of the vacuum chamber of the cooling device due to gas leakage or the like.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の極低温冷却装置の流れを示
すシステム図、第2図は熱交換器回りの構成図、第3図
はヒートスイッチの側面図、第4図は第3図のヒートス
イッチのIV−IV線断面図である。 10・・・熱交換器、15・・・熱スィッチ、16.1
7・・熱良導体、18・・・弾性体、20・・・ロッド
、21・・・高温端低圧配管、25・・・低温端低圧配
管、30・・・回転子、31・・・円弧面、32・・・
コイルバネ、33・・・円弧体。 ノ 第 10−熱交換器 15−−°熱ス不7ケ /龜;7−熱良↓孤
Figure 1 is a system diagram showing the flow of a cryogenic cooling device according to an embodiment of the present invention, Figure 2 is a configuration diagram around a heat exchanger, Figure 3 is a side view of a heat switch, and Figure 4 is a It is a sectional view taken along the line IV-IV of the heat switch shown in the figure. 10... Heat exchanger, 15... Heat switch, 16.1
7... Good thermal conductor, 18... Elastic body, 20... Rod, 21... High temperature end low pressure piping, 25... Low temperature end low pressure piping, 30... Rotor, 31... Arc surface , 32...
Coil spring, 33... arc body. No. 10-Heat exchanger 15--°Heat temperature 7 pieces/hook;7-Heat temperature level

Claims (1)

【特許請求の範囲】[Claims] 1、第1寒冷発生手段と、この第1寒冷発生手段よりも
低温度の寒冷を発生する第2寒冷発生手段と、両寒冷発
生手段の寒冷により冷媒を冷却し、両寒冷発生手段と温
度間に配置した熱交換器を有する極低温冷却装置におい
て、前記熱交換器の温端側の一部と、低温端側の一部と
を熱移動制御手段を介して、熱伝導体で接続したことを
特徴とする極低温冷却装置。
1. A first cold generation means, a second cold generation means that generates cold at a lower temperature than the first cold generation means, and a refrigerant cooled by the cold of both cold generation means, and a temperature difference between the two cold generation means and the second cold generation means. In a cryogenic cooling device having a heat exchanger arranged in the heat exchanger, a part of the hot end side of the heat exchanger and a part of the low temperature end side are connected by a heat conductor via a heat transfer control means. A cryogenic cooling device featuring:
JP26152488A 1988-10-19 1988-10-19 Cryogenic cooling device Pending JPH02110280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26152488A JPH02110280A (en) 1988-10-19 1988-10-19 Cryogenic cooling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26152488A JPH02110280A (en) 1988-10-19 1988-10-19 Cryogenic cooling device

Publications (1)

Publication Number Publication Date
JPH02110280A true JPH02110280A (en) 1990-04-23

Family

ID=17363101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26152488A Pending JPH02110280A (en) 1988-10-19 1988-10-19 Cryogenic cooling device

Country Status (1)

Country Link
JP (1) JPH02110280A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5575155A (en) * 1994-08-24 1996-11-19 Aisin Seiki Kabushiki Kaisha Cooling system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5575155A (en) * 1994-08-24 1996-11-19 Aisin Seiki Kabushiki Kaisha Cooling system

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