JPH02109668A - Tool guide for ultrasonic machining of small hole - Google Patents

Tool guide for ultrasonic machining of small hole

Info

Publication number
JPH02109668A
JPH02109668A JP26333388A JP26333388A JPH02109668A JP H02109668 A JPH02109668 A JP H02109668A JP 26333388 A JP26333388 A JP 26333388A JP 26333388 A JP26333388 A JP 26333388A JP H02109668 A JPH02109668 A JP H02109668A
Authority
JP
Japan
Prior art keywords
abrasive liquid
tool
guide hole
guide
liquid reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26333388A
Other languages
Japanese (ja)
Inventor
Jiro Iijima
二郎 飯島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tanaka Kikinzoku Kogyo KK
Original Assignee
Tanaka Kikinzoku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tanaka Kikinzoku Kogyo KK filed Critical Tanaka Kikinzoku Kogyo KK
Priority to JP26333388A priority Critical patent/JPH02109668A/en
Publication of JPH02109668A publication Critical patent/JPH02109668A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To perform forming smoothly and quickly by providing a large sized abrasive liquid reservoir groove on the upper end opening circumference of a guide hole, providing a small sized abrasive liquid reservoir groove on the lower end opening circumference and communicating the upper and lower abrasive liquid reservoir grooves by an abrasive liquid passage. CONSTITUTION:A wax 8 is coated on a substrate 6 and placed at the specified position, an abrasive liquid 10 is filled up inside the abrasive liquid reservoir groove 11 of a tool guide 2' and filled up inside an abrasive liquid reservoir groove 12 as well through an abrasive liquid passage 13. Thus after completing a preparatory work a wire tool 1 is inserted into the guide hole 3 of the tool guide 2' in order to subject a small hole 7 to ultrasonic machining on the substrate 6 and when it is formed in the shape of the tool 5 by the dies part 4' of the opening upper edge of the guide hole 3, the forming is performed smoothly and quickly by a lot of abrasive liquid 10 of the abrasive liquid reservoir groove 11 inside of the upper end of the guide hole 3.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、微細穴を超音波加工するワイヤー工具を工具
形状に成形加工するダイス兼用の工具ガイドの改良に関
する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an improvement in a tool guide that also serves as a die for forming a wire tool into a tool shape for ultrasonic machining of minute holes.

(従来の技術) 近時、微細穴を超音波加工するのに、第3図に示す如く
ワイヤー工具lをダイス兼用の工具ガイド2のガイド穴
3に押入して該ガイド穴3の開口上縁のダイス部4にて
工具5の形状に成形し、引き続きガイド穴3に沿って真
直に押圧して被加工物6に微細穴7を超音波加工する方
法がある。尚、図中8は被加工物6とベース9との間及
び被加工物6と工具ガイド2との間に配されたワックス
、10は工具ガイド2のガイド穴3の開口上縁に配され
た砥液である。
(Prior Art) Recently, in order to perform ultrasonic machining of minute holes, as shown in FIG. There is a method in which the tool 5 is molded into the shape of the tool 5 using the die portion 4 of the workpiece 6, and then pressed straight along the guide hole 3 to ultrasonically process the microhole 7 in the workpiece 6. In the figure, 8 is wax placed between the workpiece 6 and the base 9 and between the workpiece 6 and the tool guide 2, and 10 is wax placed at the upper edge of the opening of the guide hole 3 of the tool guide 2. It is abrasive liquid.

(発明が解決しようとする課題) ところで、上記の微細穴超音波加工方法に於いて、砥液
lOを工具5の先端に供給するには、第4図の要部拡大
図に示す如く工具5とガイド穴3との隙間を利用してい
た。しかしこの隙間は0.OLam程度の極めて小さい
間隙である為、砥液10を工具5の先端の加工部に十分
供給できなかった。従って工具5に圧力を加えても微細
穴フの超音波加工時間が長くかかった。
(Problem to be Solved by the Invention) By the way, in the above-mentioned microhole ultrasonic machining method, in order to supply the abrasive liquid lO to the tip of the tool 5, as shown in the enlarged view of the main part of FIG. The gap between the guide hole 3 and the guide hole 3 was used. However, this gap is 0. Since the gap was extremely small, on the order of OLam, it was not possible to sufficiently supply the abrasive liquid 10 to the processing portion at the tip of the tool 5. Therefore, even if pressure was applied to the tool 5, it took a long time for ultrasonic machining of the microhole.

そこで本発明は、砥液を工具の先端の加工部に十分に供
給できるようにした微細穴超音波加工用工具ガイドを提
供しようとするものである。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a tool guide for ultrasonic machining of micro holes, which can sufficiently supply abrasive liquid to the machining section at the tip of the tool.

(課題を解決するための手段) 上記課題を解決するための本発明の詳細な説明波加工用
工具ガイドは、中央に真直なガイド穴を有するダイス兼
用の微細穴超音波加工用工具ガイドに於いて、ガイド穴
の上端開口周囲に大型の砥液溝り溝を設け、下端開口周
囲に小型の砥液溝り溝を設け、この上下の砥液溝り溝を
砥液通路で連通したことを特徴とするものである。
(Means for Solving the Problems) Detailed explanation of the present invention for solving the above problems A tool guide for wave machining is a tool guide for micro-hole ultrasonic machining that also serves as a die and has a straight guide hole in the center. A large abrasive liquid groove is provided around the upper end opening of the guide hole, a small abrasive liquid groove is provided around the lower end opening, and these upper and lower abrasive liquid grooves are communicated by an abrasive liquid passage. This is a characteristic feature.

(作用) 本発明の微細穴超音波加工用工具ガイドは、上述の如く
ガイド穴の上下端に砥液溝り溝を設け、この上下の砥液
溝り溝を砥液通路で連通しているので、微細穴の超音波
加工時にガイド穴の開口上縁のダイス部にてワイヤー工
具を工具形状に成形すると、大型の砥液溝り溝内の大量
の砥液により成形加工が円滑迅速に行われる。そして成
形加工された工具の先端の加工部にガイド穴の下端の小
型砥液部り溝から砥液が円滑且つ十分に供給されるので
、微細穴の超音波加工時間が173程度に短縮され、高
速加工が可能となる。
(Function) As described above, the tool guide for microhole ultrasonic machining of the present invention has abrasive liquid grooves provided at the upper and lower ends of the guide hole, and these upper and lower abrasive liquid grooves are communicated through an abrasive liquid passage. Therefore, when forming a wire tool into a tool shape using the die at the upper edge of the guide hole opening during ultrasonic machining of micro holes, the large amount of abrasive liquid in the large abrasive groove allows the forming process to be performed smoothly and quickly. be exposed. Since the abrasive liquid is smoothly and sufficiently supplied to the processing part at the tip of the molded tool from the small abrasive liquid groove at the lower end of the guide hole, the ultrasonic machining time for micro holes is shortened to about 173 times. High-speed processing becomes possible.

(実施例) 本発明の微細穴超音波加工用工具ガイドの一実施例を第
1図によって説明すると、厚さ5順、縦1OIDI11
、横10mmの超硬より成る方形の微細穴超音波加工用
工具ガイド2′の中央に内径0.1mmのガイド穴3が
真直に設けられていて、このガイド穴3の上端開口周囲
に深さ1mm、縦5帥、横5印の方形の砥液溝り溝ll
が設けられ、ガイド穴3の下端開口周囲に深さ0.6市
、縦3mm、横3mmの方形の砥液溝り溝12が設けら
れ、この上下の砥液溝り溝11.12が内径0.8mm
の砥液通路13で連通されている。この砥液通路13は
等角四方に4本有し、下方に向かって中心寄りに傾斜し
ている。
(Example) An example of the tool guide for micro hole ultrasonic machining of the present invention will be described with reference to FIG.
A guide hole 3 with an inner diameter of 0.1 mm is provided straight in the center of a rectangular micro-hole ultrasonic machining tool guide 2' made of carbide and 10 mm in width. 1mm square abrasive groove with 5 marks vertically and 5 marks horizontally
A rectangular abrasive groove 12 with a depth of 0.6 mm, a length of 3 mm, and a width of 3 mm is provided around the lower end opening of the guide hole 3, and the upper and lower abrasive grooves 11 and 12 have an inner diameter. 0.8mm
The abrasive liquid passages 13 communicate with each other. The abrasive liquid passages 13 have four equal squares, and are inclined downward toward the center.

このように構成された微細穴超音波加工用工具ガイド2
′は、第2図に示す如くベース9上にワックス8を介し
て配した被加工物6、本例ではセラミックスより成る厚
さ2IIIII+1縦20市、横20胴の基板に、内径
0,1mmの微細穴7を超音波加工する際、基板6の上
にワックス8を塗布して所定位置に載せ、工具ガイド2
′の砥液溝り溝11内に砥液lOを充填し且つ砥液通路
13を通じて砥液溝り溝12内にも砥液10を充填する
。こうして準備作業を終えた後、基板6に微細穴7を超
音波加工すべくワイヤー工具lを工具ガイド2′のガイ
ド穴3に押入して該ガイド穴3の開口上縁のダイス部4
′にて外径0.08mmの工具5の形状に成形すると、
ガイド穴3の上端の砥液溝り溝11内の大量の砥液10
により成形加工が円滑迅速に行われる。そして成形加工
された工具5の先端の加工部にガイド穴3の下端の砥液
溝り溝12から砥液lOが円滑且つ十分に供給されるの
で、微細穴7の超音波加工時間が従来の第3図に示す工
具ガイド2を用いた微細穴の超音波加工方法に比しI/
3程度に短縮され、高速加工が可能となった。
Tool guide for micro hole ultrasonic machining 2 configured in this way
' is a workpiece 6 placed on a base 9 via wax 8 as shown in FIG. When ultrasonically machining the micro holes 7, wax 8 is applied onto the substrate 6 and placed in a predetermined position, and the tool guide 2
The abrasive liquid lO is filled in the abrasive liquid groove 11 of ', and the abrasive liquid 10 is also filled in the abrasive liquid groove 12 through the abrasive liquid passage 13. After completing the preparation work in this way, in order to ultrasonically process micro holes 7 in the substrate 6, the wire tool l is pushed into the guide hole 3 of the tool guide 2', and the die part 4 at the upper edge of the opening of the guide hole 3 is inserted.
' When molded into the shape of tool 5 with an outer diameter of 0.08 mm,
A large amount of abrasive liquid 10 in the abrasive liquid groove 11 at the upper end of the guide hole 3
This allows the molding process to be carried out smoothly and quickly. Since the abrasive liquid lO is smoothly and sufficiently supplied from the abrasive liquid groove 12 at the lower end of the guide hole 3 to the processed part at the tip of the molded tool 5, the ultrasonic machining time of the micro hole 7 is longer than the conventional one. Compared to the ultrasonic machining method for micro holes using the tool guide 2 shown in Fig. 3,
The time has been shortened to about 3, making high-speed processing possible.

(発明の効果) 以上の説明で判るように本発明の微細穴超音波加工用工
具ガイドによれば、微細穴の超音波加工時、ガイド穴の
開口上縁のダイス部にてワイヤー工具を工具形状に成形
すると、ガイド穴上端の砥液溝り溝内に大量の砥液を有
するので、その成形加工が円滑迅速に行われる。また成
形加工された工具の先端の加工部にガイド穴上端の砥液
溝り溝から砥液が円滑且つ十分に供給されるので、微細
穴の超音波加工の高速化が可能である。
(Effects of the Invention) As can be seen from the above description, according to the tool guide for ultrasonic machining of micro holes according to the present invention, during ultrasonic machining of micro holes, the wire tool is inserted into the die portion at the upper edge of the opening of the guide hole. When molded into a shape, since there is a large amount of abrasive liquid in the abrasive liquid groove at the upper end of the guide hole, the molding process is performed smoothly and quickly. Further, since the abrasive liquid is smoothly and sufficiently supplied to the processing portion at the tip of the molded tool from the abrasive liquid groove at the upper end of the guide hole, it is possible to speed up ultrasonic machining of minute holes.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の微細穴超音波加工用工具ガイドの一実
施例を示す縦断面図、第2図は第1図の工具ガイドを用
いて被加工物に微細穴を超音波加工している状態を示す
縦断面図、第3図は従来の工具ガイドを用いて被加工物
に微細穴を超音波加工している状態を示す縦断面図、第
4図は第3図のA部拡大縦断面図である。 出願人  田中貴金属工業株式会社 第 図 第 図 ↓ ・・麻0a匝玲 第 図 第4図
FIG. 1 is a vertical cross-sectional view showing an embodiment of the tool guide for ultrasonic machining of micro holes according to the present invention, and FIG. Figure 3 is a vertical cross-sectional view showing a state in which a conventional tool guide is used to ultrasonically process micro-holes in a workpiece, and Figure 4 is an enlarged view of section A in Figure 3. FIG. Applicant: Tanaka Kikinzoku Kogyo Co., Ltd. Figure Figure ↓ ・・・Ma0a Sorei Figure Figure 4

Claims (1)

【特許請求の範囲】[Claims] 1、中央に真直なガイド穴を有するダイス兼用の微細穴
超音波加工用工具ガイドに於いて、ガイド穴の上端開口
周囲に大型の砥液溜り溝を設け、下端開口周囲に小型の
砥液溜り溝を設け、この上下の砥液溜り溝を砥液通路で
連通したことを特徴とする微細穴超音波加工用工具ガイ
ド。
1. In a micro-hole ultrasonic machining tool guide that has a straight guide hole in the center and doubles as a die, a large abrasive liquid reservoir groove is provided around the upper end opening of the guide hole, and a small abrasive liquid reservoir is provided around the lower end opening. A tool guide for ultrasonic machining of micro holes, characterized in that a groove is provided and the upper and lower abrasive liquid reservoir grooves are communicated by an abrasive liquid passage.
JP26333388A 1988-10-19 1988-10-19 Tool guide for ultrasonic machining of small hole Pending JPH02109668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26333388A JPH02109668A (en) 1988-10-19 1988-10-19 Tool guide for ultrasonic machining of small hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26333388A JPH02109668A (en) 1988-10-19 1988-10-19 Tool guide for ultrasonic machining of small hole

Publications (1)

Publication Number Publication Date
JPH02109668A true JPH02109668A (en) 1990-04-23

Family

ID=17388018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26333388A Pending JPH02109668A (en) 1988-10-19 1988-10-19 Tool guide for ultrasonic machining of small hole

Country Status (1)

Country Link
JP (1) JPH02109668A (en)

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