JPH0210879A - Light emitting diode array - Google Patents

Light emitting diode array

Info

Publication number
JPH0210879A
JPH0210879A JP63163534A JP16353488A JPH0210879A JP H0210879 A JPH0210879 A JP H0210879A JP 63163534 A JP63163534 A JP 63163534A JP 16353488 A JP16353488 A JP 16353488A JP H0210879 A JPH0210879 A JP H0210879A
Authority
JP
Japan
Prior art keywords
dicing
array
light emitting
led
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63163534A
Other languages
Japanese (ja)
Inventor
Ryukichi Mizuno
隆吉 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP63163534A priority Critical patent/JPH0210879A/en
Publication of JPH0210879A publication Critical patent/JPH0210879A/en
Pending legal-status Critical Current

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  • Dot-Matrix Printers And Others (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE:To facilitate accurate alignment by so full-cut dicing the surface of an LED array having a light emitting unit as to reduce the area of the rear face by a dicing plate having an angled face. CONSTITUTION:After a light emitting unit 4 is formed on a whole wafer face, it is cut and separated by a dicing saw from the rear face 3. ln this case, a dicing plate 20 to be used has a face 21 so angled as to form a V shape on the outer periphery, and the rear face of the wafer is full-cut diced by the plate 20 to form the shape of the LED array side face 5. Thus, the length of the array 1 is short at the rear face 3 with respect to the front face 2. Thus, the array having no dicing mark on the side face can be composed, and accurately aligned at a predetermined light emitting unit pitch.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、電子写真方式を用いたノンインパクトプリン
タにおける光書き込み光プリンタヘッド[従来の技術] 第4図は、従来の光プリンタヘッドに用いられていたL
IuDアレイの構造を示す斜視図であり、第5図は該L
EDアレイの構成を示す要部断面図である。図中符号2
は、該LEDアレイの表面であり、発光部4が複数個直
線状に配列されている。該L]lCDアレイの製造工程
では、ウェハー上に発光部4が多数形成された後、該主
面2側よりグイシングツ−によって深さToハーフカッ
トダイシング溝11を形成し、厚さTdの残された部分
をクラッキングによって切断し個々のLEDアレイに分
離する。このクラッキングによってダイシング切跡凸1
2−1とダイシング切跡凹12−2との二種の形状が不
規則的に発生する。つまり、ハーフカットダイシング溝
11はLEDアレイ1の周囲四辺に設けられ、前記ダイ
シング切跡凸12−1及びダイシング切跡凹12−2の
出現位置も一律に決定されるものではなく、第4図及び
第5図はその一例を示しているに過ぎない。
Detailed Description of the Invention [Industrial Application Field] The present invention relates to an optical writing optical printer head in a non-impact printer using an electrophotographic method [Prior art] Fig. 4 shows an optical writing head used in a conventional optical printer head. L was being
FIG. 5 is a perspective view showing the structure of an IuD array, and FIG.
FIG. 2 is a cross-sectional view of main parts showing the configuration of an ED array. Code 2 in the diagram
is the surface of the LED array, on which a plurality of light emitting parts 4 are arranged in a straight line. In the manufacturing process of the L]lCD array, after a large number of light emitting parts 4 are formed on the wafer, half-cut dicing grooves 11 with a depth of Td are formed from the main surface 2 side using a dicing tool. The portion is cut by cracking and separated into individual LED arrays. Due to this cracking, the dicing cut protrudes 1.
Two types of shapes, 2-1 and dicing cut recess 12-2, occur irregularly. In other words, the half-cut dicing grooves 11 are provided on the four sides around the LED array 1, and the appearance positions of the dicing cut convex 12-1 and the dicing cut concave 12-2 are not uniformly determined; and FIG. 5 only show one example.

[発明が解決しようとする課題] しかしながら、基板上にLEDアレイを高精度な位置合
わせによって複数個整列固着し構成される光プリントヘ
ッドにおいて、従来のダイシング方法でウェハーより切
り出されたLEDアレイを使用するならばダイシング史
跡12によってLKDアレイチップ寸法が狂わされるこ
ととなり、よって高精度な位置合わせを行うことが非常
に困難になるという問題点を有していた。
[Problems to be Solved by the Invention] However, in an optical print head configured by aligning and fixing a plurality of LED arrays on a substrate with high precision alignment, it is difficult to use LED arrays cut from a wafer using a conventional dicing method. If this were the case, the LKD array chip dimensions would be disturbed by the dicing trace 12, resulting in a problem that it would be extremely difficult to perform highly accurate positioning.

また、前記ダイシング史跡に直近の発光部から発した光
が該ダイシング史跡より漏洩するため、該漏洩光がたと
えわずかであっても感光体を露光するので印字品質を損
ねるという問題点も有している。
In addition, since the light emitted from the light emitting part closest to the dicing historical site leaks from the dicing historical site, even if the leaked light is small, it exposes the photoreceptor, resulting in a problem in that printing quality is impaired. There is.

そこで本発明は、このような問題点を解決するもので、
その目的とするところは高精度位置合わせを容易に行え
、かつダイシング史跡からの漏洩光によって印字品質を
損なわないLEDアレイを得ることであり、もって該L
EDアレイを搭載した光プリンタヘッドを提供すること
にある。
Therefore, the present invention aims to solve these problems.
The purpose is to obtain an LED array that can easily perform high-precision positioning and that does not impair printing quality due to leakage light from dicing historical sites.
An object of the present invention is to provide an optical printer head equipped with an ED array.

[課題を解決するための手段] 上記問題点を解決するために本発明は、表面上に複数の
発光部を有し、基板上に複数個載置固着されて光書き込
み用光プリントヘッドを構成するLEDアレイにおいて
、 角度付けされた面を有するダイシングブレードによって
、該LEDアレイの発光部を有する表面に対して裏面の
面積が小さくなるよう裏面側よりフルカットダイシング
したことを特徴とする。
[Means for Solving the Problems] In order to solve the above problems, the present invention has a plurality of light emitting parts on the surface, and a plurality of light emitting parts are placed and fixed on a substrate to constitute an optical print head for optical writing. The LED array is characterized in that full-cut dicing is performed from the back surface side using a dicing blade having an angled surface so that the area of the back surface is smaller than the front surface having the light emitting part of the LED array.

[作用] 上記構成によれば、LEDアレイの裏面側よりフルカッ
トダイシングするので、LEDアレイの表面側に対して
裏面側の面積が小さくなり、従来のLEDアレイにみら
れたダイシング史跡を有しない。
[Function] According to the above configuration, full-cut dicing is performed from the back side of the LED array, so the area on the back side is smaller than the front side of the LED array, and there is no dicing history seen in conventional LED arrays. .

[実施例] そこで、以下に本発明の詳細を実施例に基づいて説明す
る。
[Example] Therefore, details of the present invention will be explained below based on an example.

第1図は、本発明によるLEDアレイの構造を示す斜視
図であり、第2図は該LEDアレイの構成を示す要部断
面図である。図中符号1はLEDアレイであり、その表
面2上に発光部4が直線状に配列形成されている。この
工程はウェハー状態で一括して行われ、ウェハー全面に
発光部4が形成された後、裏面3側よりダイシングソー
で切断分離する。このとき、使用するダイシングブレー
ドは第3図に示されるように、外周部がV字形と成るよ
うに角度付けされた面21を有しており、該ダイシング
ブレードを用いてLEDウェハーの裏面よりフルカット
ダイシングを行うことによりLEDアレイ側面5の形状
が形成される。これによってLEDアレイ1の長さは表
面2に対して裏面3が短くなる。つまり、I、T>LB
  となる。
FIG. 1 is a perspective view showing the structure of an LED array according to the present invention, and FIG. 2 is a sectional view of a main part showing the structure of the LED array. Reference numeral 1 in the figure is an LED array, on the surface 2 of which light emitting parts 4 are arranged in a linear arrangement. This step is carried out all at once in the wafer state, and after the light emitting portion 4 is formed on the entire surface of the wafer, the wafer is cut and separated from the back surface 3 side using a dicing saw. At this time, as shown in FIG. 3, the dicing blade used has a surface 21 angled so that the outer periphery is V-shaped. The shape of the LED array side surface 5 is formed by cutting and dicing. As a result, the length of the LED array 1 on the back surface 3 becomes shorter than that on the front surface 2. In other words, I, T>LB
becomes.

また、前記発光部整列方向に対して、LEDアレイの幅
方向についても同様のこととなる。本実施例において、
LEDアレイ1の側面5−1が裏面3と成す角の外角α
(0)を決定するに当ってはLICDアレイ端部におけ
る表面長さと裏面長さのHaについて、LEDアレイの
高さH=500μmとした場合について算出し、比較実
験を行い表裏面長さGとして有効な値を判定したのが次
光である。α≦80°では、ダイシングブレードの角度
付は面の構成が困難となり、α≦60°ではLEDアレ
イ表面付近においてチッピングが発生した。本実施例に
おいては、α=70°と設定したが、α=65〜80°
の範囲で行ってもよいさらにフルカットダイシングされ
ているので、第6図の従来のLEDIDアレイられたダ
イシング史跡が生じない。第6図の(α> 、<b>は
、従来のLEDIDアレイ前述した表面2側よりハーフ
カットダイシングした後クラッキングした場合を示し、
第6図のCC’)9Cd)は、裏面3側よりハーフカッ
トダイシングした後クランキングした場合を示しており
、各々、第6図の(α)。
Furthermore, the same applies to the width direction of the LED array with respect to the light emitting unit alignment direction. In this example,
External angle α of the angle between the side surface 5-1 of the LED array 1 and the back surface 3
(0), the front and back lengths Ha at the ends of the LICD array are calculated for the case where the height of the LED array is H = 500 μm, and a comparative experiment is performed to determine the front and back length G. It was Tsugamitsu who determined the valid value. When α≦80°, the angle of the dicing blade made it difficult to configure the surface, and when α≦60°, chipping occurred near the LED array surface. In this example, α=70° was set, but α=65 to 80°.
Further, since full-cut dicing is performed, the conventional LED ID array dicing trace shown in FIG. 6 does not occur. (α>, <b> in FIG. 6 shows the case where the conventional LED ID array is cracked after half-cut dicing from the above-mentioned surface 2 side,
CC') 9Cd) in FIG. 6 shows the case where cranking is performed after half-cut dicing from the back side 3, and (α) in FIG. 6 respectively.

(C)はダイシング史跡凸12−1で、第6図の(b)
、(d)はダイシング史跡凹12−2である。第6図の
ように直近の発光部4から発した光が該ダイシング史跡
12より漏洩するが、該漏洩光がたとえわずかであって
も感光体を露光するので印字品質を損ねていた。さらに
、従来のLEDアレイ表面長さはLoであるのに対して
、ダイ7ング切跡12−1によって実際のLEDIDア
レイさは LO+L(lとなり、よってLEDIDアレ
イ光部整列方向に複数個整列配置する光プリンタヘッド
においては、隣接LEDアレイ間のピッチPを一定に保
つことが困難となり印字品質を損なう要因となっていた
。本実施例においては、角度付けされた面21を有する
ダイシングブレード20を用いてLEDIDアレイ面3
側よりフルカットダイシングを行うので、前記ダイシン
グ史跡12を有しないI、EDアレイであり、LFjD
アレイ外周部からの漏洩光が皆無となり、さらには隣接
LKDアレイ間の発光部ピッチPを一定に保つ高精度位
置合わせな行える印字品質の良好なLEDIDアレイ成
できる。また、所望する印字幅の光プリントヘッドを構
成するためには、複数のLEDIDアレイ電接着剤6を
用いて一列に載置固着しなければならないが、このとき
従来のLKDIDアレイ成では、第7図の(α)のよう
に導電接着剤6がI、KDアレイ間の隙間を充填し、場
合によっては第8図に示すようにp−n接合部(図中破
線部)あるいはp側電極とn側電極を電気的に短絡した
り、さらには発光部を光学的に遮光してしまうようなこ
とが発生し、機能的に光プリンタが動作不能となり、光
プリンタヘッドの組立性を著しく阻害するという間層も
発生していたが、本実施例によれば、第7図のCh)の
ようにLEDアレイ間の隙間が大きくなり導電接着剤6
の隣接LBDアレイ間の不用な充填を防止できるという
効果も生ずるのである。
(C) is the dicing historical site convex 12-1, and (b) in Figure 6
, (d) is the dicing historical recess 12-2. As shown in FIG. 6, the light emitted from the nearest light emitting section 4 leaks from the dicing historical site 12, but even if the leaked light is small, it exposes the photoreceptor, thereby impairing printing quality. Furthermore, while the conventional LED array surface length is Lo, the actual LED ID array length due to the die cutting cut 12-1 is LO + L (l, so multiple LED ID arrays are aligned in the light section alignment direction. In optical printer heads, it has been difficult to maintain a constant pitch P between adjacent LED arrays, which has caused deterioration in print quality.In this embodiment, a dicing blade 20 having an angled surface 21 is used. Using LEDID array surface 3
Since full-cut dicing is performed from the side, the I and ED arrays do not have the dicing historical site 12, and the LFjD
There is no leakage of light from the outer periphery of the array, and furthermore, it is possible to form an LED ID array with good printing quality, which allows for high-precision positioning in which the pitch P of the light emitting parts between adjacent LKD arrays is kept constant. In addition, in order to configure an optical print head with a desired print width, a plurality of LED ID arrays must be placed and fixed in a line using electrical adhesive 6, but at this time, in the conventional LKDID array configuration, the seventh As shown in (α) in the figure, the conductive adhesive 6 fills the gap between the I and KD arrays, and in some cases, as shown in FIG. This may cause the n-side electrode to be electrically short-circuited or the light-emitting part to be optically blocked, making the optical printer functionally inoperable and significantly hindering the assembly of the optical printer head. However, according to this example, the gap between the LED arrays becomes larger as shown in Ch) in FIG. 7, and the conductive adhesive 6
This also has the effect of preventing unnecessary filling between adjacent LBD arrays.

[発明の効果] 本発明によれば、角度付けされた面を有するダイシング
ブレードを用いて裏面側よりフルカットダイシングを行
いLEDIDアレイ離し側面にダイシング史跡な有しな
いLEDIDアレイ成できるので、LEDアレイ間の発
光部ピッチを一定に保ち高精度位置合わせな行え、LI
Dアレイ外周部からの漏洩光によって感光体が露光され
ないので印字品質が極めて良好なLEDIDアレイられ
る。さらには、隣接LEDアレイ間の導電接着剤の充填
を防ぐことができ、LEDIDアレイ数個整列固着する
光プリンタヘッドの組立性の向上をもたらすという特有
の効果を有する。
[Effects of the Invention] According to the present invention, it is possible to perform full-cut dicing from the back side using a dicing blade having an angled surface to form an LED ID array without any dicing traces on the side surface separated from the LED array. Keeping the pitch of the light emitting part constant and performing high-precision positioning, LI
Since the photoreceptor is not exposed to light leaking from the outer periphery of the D array, the LED ID array has extremely good printing quality. Furthermore, it is possible to prevent filling of conductive adhesive between adjacent LED arrays, and has the unique effect of improving the ease of assembling an optical printer head in which several LED ID arrays are aligned and fixed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明によるLIDアレイの構造を示す斜視
図、第2図は該LEDIDアレイ成を示す要部側面図で
ある。第3図は、該LFiDアレイのダイシングに使用
するダイシングブレードの断面図である。 第4図は従来のLEDIDアレイ造を示す斜視図、第5
図は該LEDIDアレイ成を示す要部側面図である。第
6図(α)〜(d)は従来のL・EDアレイのダイシン
グ史跡例を示す断面図である。第7図(α)(b)は、
LEDアレイ間の導電接着剤の充填の様子を示す断面図
である。第8図(α)(b)は、同じく導電接着剤によ
るp−n接合間の電気的短絡及び発光部の遮光の様子を
示す断面図である。 1・・・・・・LEDIDア レイ・・・・・LIDアレイの表面 3・・・・・・LEDIDアレイ面 4・・・・・・発光部 5・・・・・・LEDIDアレイ面 11・・・・・・ダイシング溝 12・・・・・・ダイシング史跡 20・・・・・・ダイシングブレード 第 図 第 図 ・・・・・・角度付けされた面
FIG. 1 is a perspective view showing the structure of an LID array according to the present invention, and FIG. 2 is a side view of essential parts showing the structure of the LED ID array. FIG. 3 is a cross-sectional view of a dicing blade used for dicing the LFiD array. Figure 4 is a perspective view showing a conventional LED ID array structure;
The figure is a side view of essential parts showing the configuration of the LED ID array. FIGS. 6(α) to 6(d) are cross-sectional views showing examples of dicing history of conventional L/ED arrays. Figure 7(α)(b) is
FIG. 3 is a cross-sectional view showing how conductive adhesive is filled between LED arrays. FIGS. 8(α) and 8(b) are cross-sectional views showing the electrical short circuit between the p-n junctions and the light shielding of the light emitting part by the conductive adhesive. 1...LEDID array...LID array surface 3...LEDID array surface 4...Light emitting part 5...LEDID array surface 11... ... Dicing groove 12 ... Dicing historical site 20 ... Dicing blade diagram Diagram ... Angled surface

Claims (1)

【特許請求の範囲】 表面上に複数の発光部を有し、基板上に複数個載置固着
されて光書き込み用光プリントヘッドを構成する発光ダ
イオードアレイ(以下、LEDアレイ)において、 角度付けされた面を有するダイシングブレードによって
、該LEDアレイの発光部を有する表面に対して裏面の
面積が小さくなるよう裏面側よりフルカットダイシング
したことを特徴とする発光ダイオードアレイ。
[Claims] In a light emitting diode array (hereinafter referred to as an LED array) which has a plurality of light emitting parts on its surface and which is mounted and fixed on a substrate to constitute an optical print head for optical writing, 1. A light emitting diode array characterized in that full-cut dicing is performed from the back surface side using a dicing blade having a curved surface so that the area of the back surface is smaller than the front surface having a light emitting part of the LED array.
JP63163534A 1988-06-29 1988-06-29 Light emitting diode array Pending JPH0210879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63163534A JPH0210879A (en) 1988-06-29 1988-06-29 Light emitting diode array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63163534A JPH0210879A (en) 1988-06-29 1988-06-29 Light emitting diode array

Publications (1)

Publication Number Publication Date
JPH0210879A true JPH0210879A (en) 1990-01-16

Family

ID=15775706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63163534A Pending JPH0210879A (en) 1988-06-29 1988-06-29 Light emitting diode array

Country Status (1)

Country Link
JP (1) JPH0210879A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5997152A (en) * 1997-09-15 1999-12-07 Oki Electric Industry Co., Ltd. Light emitting element module and printer head using the same
US7038245B2 (en) 2002-03-14 2006-05-02 Kabushiki Kaisha Toshiba Semiconductor light emitting device having angled side surface
US7380333B2 (en) 2001-04-16 2008-06-03 Rohm Co., Ltd. Chip resistor fabrication method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5997152A (en) * 1997-09-15 1999-12-07 Oki Electric Industry Co., Ltd. Light emitting element module and printer head using the same
EP0986103A1 (en) * 1997-09-15 2000-03-15 Oki Electric Industry Co., Ltd. Light emitting element module and printer head using the same
US7380333B2 (en) 2001-04-16 2008-06-03 Rohm Co., Ltd. Chip resistor fabrication method
US7038245B2 (en) 2002-03-14 2006-05-02 Kabushiki Kaisha Toshiba Semiconductor light emitting device having angled side surface
US7329903B2 (en) 2002-03-14 2008-02-12 Kabushiki Kaisha Toshiba Semiconductor light emitting element having three side surfaces inclined to connect the top and bottom surfaces of the transparent substrate

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