JPH0210708B2 - - Google Patents
Info
- Publication number
- JPH0210708B2 JPH0210708B2 JP1041184A JP1041184A JPH0210708B2 JP H0210708 B2 JPH0210708 B2 JP H0210708B2 JP 1041184 A JP1041184 A JP 1041184A JP 1041184 A JP1041184 A JP 1041184A JP H0210708 B2 JPH0210708 B2 JP H0210708B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- electric vibrator
- vibration
- atomizing pump
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 description 14
- 238000000889 atomisation Methods 0.000 description 9
- 239000010410 layer Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
- B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
Landscapes
- Special Spraying Apparatus (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、灯油などの液体燃料、水・薬液など
の液体の霧化ポンプに関するものであり、さらに
詳しくは、圧電振動子などの電気振動子を利用し
た霧化ポンプに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an atomizing pump for liquid fuels such as kerosene and liquids such as water and chemical solutions. This relates to the atomization pump used.
従来例の構成とその問題点
従来この種の霧化ポンプは、第１図に示すよう
に構成されていた。すなわち、電気振動子１の相
対向する平滑面には、電極膜２ａ，２ｂが形成さ
れ、電極膜２ｂとノズル板３とは固着層４ａを介
して接合がされていた。さらにノズル板３の他方
の面と、ボデイー５は固着層４ｂを介して接合さ
れていた。Conventional configuration and its problems Conventionally, this type of atomizing pump has been configured as shown in FIG. That is, electrode films 2a and 2b were formed on opposing smooth surfaces of the electric vibrator 1, and the electrode film 2b and the nozzle plate 3 were bonded via the fixing layer 4a. Further, the other surface of the nozzle plate 3 and the body 5 were bonded to each other via an adhesive layer 4b.
電気振動子１は、主成分がPbO、TiO2、ZrO2
などからなるセラミツク体で、円形中央部に開口
部を設けたリング形状を有し、電極膜２ａ，２ｂ
は、厚膜用導電性ペーストの焼結体や、金属を蒸
着した金属薄膜体などからなり、ノズル板３は厚
さ約50〜100μｍ程度の金属円板で、コバールや
ステンレスなどが用いられていた。さらに、ノズ
ル板３はその中央部に１つまたは複数個の貫通し
たノズル孔６（孔径約70〜100μｍ）が設けられ
ていた。固着層４ａ，４ｂには樹脂接着剤や半田
などが用いられていた。尚、各接合部の固着層４
ａ，４ｂから固着剤の外出を防ぐため、レジスト
膜（図省略）により、外出の流れを位置規制する
手段もおこなわれている。 The main components of the electric vibrator 1 are PbO, TiO 2 , and ZrO 2
The electrode film 2a, 2b has a ring shape with an opening in the circular center.
The nozzle plate 3 is a metal disk approximately 50 to 100 μm thick, and is made of Kovar or stainless steel. Ta. Furthermore, the nozzle plate 3 was provided with one or more penetrating nozzle holes 6 (hole diameter: about 70 to 100 μm) in its center. A resin adhesive, solder, or the like has been used for the fixing layers 4a and 4b. In addition, the fixed layer 4 of each joint part
In order to prevent the adhesive from coming out from a and 4b, a resist film (not shown) is used to positionally regulate the flow of the adhesive.
次に電極膜２ａは、発振回路（図省略）からの
リード線接続用電極であり、ボデイー５には液体
通路７および液体室８が設けられ、液体室８の上
面の円周部には、ノズル板３を接合する固定部９
が設けられている。このとき、ノズル板３の振動
系は第２図に示したように、電気振動子１の径振
動（図示矢印１）により加振され、撓み振動（図
中矢印２）に変換される。ノズル板３の撓み振動
が効率良く励起される為、電気振動子１の内径d1
と固定部９の内径d2の構成比を一定化して、振動
の節（図中△印）が電気振動子１の内周に近接す
るよう組立がされている。このようにして霧化ポ
ンプは構成されていた。 Next, the electrode film 2a is an electrode for connecting a lead wire from an oscillation circuit (not shown), and the body 5 is provided with a liquid passage 7 and a liquid chamber 8, and a circumferential portion of the upper surface of the liquid chamber 8 is provided with a liquid passage 7 and a liquid chamber 8. Fixing part 9 that joins the nozzle plate 3
is provided. At this time, as shown in FIG. 2, the vibration system of the nozzle plate 3 is excited by the radial vibration (arrow 1 in the figure) of the electric vibrator 1, which is converted into flexural vibration (arrow 2 in the figure). In order to efficiently excite the bending vibration of the nozzle plate 3, the inner diameter d 1 of the electric vibrator 1
The electric vibrator 1 is assembled so that the vibration node (indicated by △ in the figure) is close to the inner periphery of the electric vibrator 1 by keeping the composition ratio of the inner diameter d 2 of the fixed part 9 constant. The atomizing pump was constructed in this way.
この構成では、各構成部材の組立による公差な
どにより、d1とd2の径軸ずれが生じることや、固
着剤の規制位置からの一部流れ出しなどによるノ
ズル板厚み変化などにより、節部の生成位置がル
ーズに成る欠点があり、結果として液体を噴霧す
る霧化特性の効率が低下するという問題があつ
た。 With this configuration, radial axis misalignment between d 1 and d 2 occurs due to tolerances caused by the assembly of each component, and changes in the nozzle plate thickness due to some of the adhesive flowing out from the regulated position, etc. There is a drawback that the generation position is loose, resulting in a problem that the efficiency of the atomization characteristic for spraying the liquid is reduced.
発明の目的
本発明は、かかる従来の欠点を除去するもので
霧化ポンプの構成において、ノズル板の振動系の
節を一定化し、霧化特性の安定した霧化ポンプを
提供することを目的とする。Purpose of the Invention The present invention aims to eliminate such conventional drawbacks, and to provide an atomization pump with stable atomization characteristics by making the nodes of the vibration system of the nozzle plate constant in the configuration of the atomization pump. do.
発明の構成
この目的を構成するために本発明は、電気振動
子とノズル板と、これらを支持するボデイーとが
それぞれ固着剤で接合された構成からなり、前記
のノズル板の面上には撓み振動を生じる振動系の
節部生成位置に一致した部分に、凹部を設けたも
のである。Structure of the Invention In order to achieve this object, the present invention has a structure in which an electric vibrator, a nozzle plate, and a body supporting these are each bonded with an adhesive, and a flexible plate is attached on the surface of the nozzle plate. A concave portion is provided at a portion that corresponds to a node generation position of a vibration system that generates vibration.
この構成によつて、ノズル板の凹部を設けた部
分の剛性は低下される。従つて、ノズル板中央部
の撓み振動は剛性の低い凹部を起点にして振動運
動がなされる。そのため、振動系の節は一定化さ
れ、結果として霧化特性の安定化が図れるもので
ある。 With this configuration, the rigidity of the portion of the nozzle plate where the recess is provided is reduced. Therefore, the bending vibration of the center portion of the nozzle plate causes vibration movement starting from the low-rigidity concave portion. Therefore, the nodes of the vibration system are made constant, and as a result, the atomization characteristics can be stabilized.
実施例の説明
以下、本発明の一実施例を第３図、第４図を用
いて説明する。尚、これらの図において、第１
図、第２図と同じものについては同一番号を付し
ている。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 3 and 4. In addition, in these figures, the first
Components that are the same as those in FIG. 2 are given the same numbers.
第３図において、電気振動子１は外径約10mm、
開口径約40mm、厚さ約10mmのリング状で、従来例
と同様のもので、電極膜２ａ，２ｂが形成されて
いる。ノズル板３は、厚さ約50〜100μｍ程度の
金属円板（外径約16mm）で、コバールやステンレ
ス等の従来例と同様のものを選んだ。第４図ａに
示すように、ノズル板３の片面の所定位置（d1／
d2の構成比において、生成する振動の節部位置）
には、深さ約10μｍ〜20μｍのエツチング加工に
よる凹部が、円形状に設けられている。ノズル板
３の中央部には複数個のノズル孔６が設けられて
いる。 In Fig. 3, the electric vibrator 1 has an outer diameter of approximately 10 mm.
It has a ring shape with an opening diameter of about 40 mm and a thickness of about 10 mm, and is similar to the conventional example, and electrode films 2a and 2b are formed thereon. The nozzle plate 3 is a metal disc (outer diameter of about 16 mm) with a thickness of about 50 to 100 μm, and is made of Kovar, stainless steel, or the like used in the conventional example. As shown in FIG. 4a, a predetermined position (d 1 /
d Nodal position of generated vibration at composition ratio of 2 )
A circular recessed portion having a depth of approximately 10 μm to 20 μm is provided in the hole. A plurality of nozzle holes 6 are provided in the center of the nozzle plate 3.
ついて、電気振動子１の電極膜２ｂと、ノズル
板３の一方の面は、従来例と同様の固着層４ａを
介して接合がされ、ノズル板３の他方の面とボデ
イー５の固定部９とは、固着層４ｂを介して接合
がされる。また、ボデイー５の液体通路７、液体
室８などは従来例と同じ構造にしている。電極膜
２ａは、発振回路（図省略）からのリード線接続
用電極である。 Accordingly, the electrode film 2b of the electric vibrator 1 and one surface of the nozzle plate 3 are bonded via the fixing layer 4a similar to the conventional example, and the other surface of the nozzle plate 3 and the fixing part 9 of the body 5 are bonded together. The bonding is performed via the fixed layer 4b. Further, the liquid passage 7, liquid chamber 8, etc. of the body 5 have the same structure as the conventional example. The electrode film 2a is an electrode for connecting a lead wire from an oscillation circuit (not shown).
上記構成において、発振回路からの電圧印加に
より、電気振動子１は発振され、固着層４ｂを介
してノズル板３を加振する。ノズル板３は第２図
の点線で示したように撓み振動をする。その結果
液体室８に充填された液体は加圧され、ノズル孔
６を介して噴霧化される。噴霧化は振動特性に依
存されるため、ノズル板３の振動運動を安定にす
ることが必要であつた。 In the above configuration, the electric vibrator 1 is oscillated by voltage application from the oscillation circuit, and vibrates the nozzle plate 3 via the fixed layer 4b. The nozzle plate 3 bends and vibrates as shown by the dotted line in FIG. As a result, the liquid filled in the liquid chamber 8 is pressurized and atomized through the nozzle hole 6. Since atomization depends on vibration characteristics, it was necessary to stabilize the vibration movement of the nozzle plate 3.
従つて本発明の構成では、ノズル板３の面上に
上記のような振動の節部生成位置に、凹部１０を
設け板厚を薄くしているため、その部分の剛性が
低下する。その結果、ノズル板３の中央の撓み振
動は、凹部１０を起点に振動運動し易くなり、振
動系の節はこの位置に一定化することができ、結
果として霧化特性を安定化することができる。 Therefore, in the configuration of the present invention, the concave portion 10 is provided on the surface of the nozzle plate 3 at the position where the vibration node is generated as described above, and the plate thickness is reduced, so that the rigidity of that portion is reduced. As a result, the bending vibration at the center of the nozzle plate 3 becomes easier to vibrate starting from the recess 10, and the nodes of the vibration system can be kept constant at this position, and as a result, the atomization characteristics can be stabilized. can.
尚、凹部１０の構造は、第４図ｂ，ｃに示した
ようにノズル板３の他方の面上、あるいは、両面
上に凹部１０を設けたものでも同様の効果が得ら
れることは明白である。 It is clear that the same effect can be obtained by providing the recess 10 on the other surface or both sides of the nozzle plate 3 as shown in FIGS. 4b and 4c. be.
発明の効果
以上のように本発明の霧化ポンプによれば、ノ
ズル板の板厚に凹凸部を設け、所定位置（d1／d2
構成比において、振動系の節部生成位置）に凹部
を設けることにより、その部分の剛性を低下さ
せ、ノズル板の中央の撓み振動の起点をその部分
に固定し易くしている。Effects of the Invention As described above, according to the atomizing pump of the present invention, the uneven portion is provided in the thickness of the nozzle plate, and a predetermined position (d 1 /d 2
By providing a concave portion at the node generation position of the vibration system in terms of composition ratio, the rigidity of that portion is reduced, making it easier to fix the starting point of bending vibration at the center of the nozzle plate to that portion.
そのため、従来のように各構成部材の径軸ずれ
や固着剤の流れ出しなどによる原因で、振動系の
節部が不安定になるなどの問題は解消できる。 Therefore, it is possible to eliminate the conventional problems such as the nodes of the vibration system becoming unstable due to radial axis misalignment of each constituent member or outflow of the adhesive.
結果として、霧化特性は安定化ができる。 As a result, the atomization characteristics can be stabilized.
第１図は従来の構成による霧化ポンプの断面
図、第２図は霧化ポンプの基本動作を説明する断
面図、第３図は本発明の一実施例を示す霧化ポン
プの断面図、第４図ａ，ｂ，ｃは本発明の要部の
断面斜視図である。
１……電気振動子、２ａ……電極膜、２ｂ……
電極膜、３……ノズル板、４ａ……固着層、４ｂ
……固着層、５……ボデイー、６……ノズル孔、
７……液体通路、８……液体室、９……固定部、
１０……凹部。
FIG. 1 is a sectional view of an atomizing pump with a conventional configuration, FIG. 2 is a sectional view explaining the basic operation of an atomizing pump, and FIG. 3 is a sectional view of an atomizing pump showing an embodiment of the present invention. 4a, b, and c are cross-sectional perspective views of essential parts of the present invention. 1... Electric vibrator, 2a... Electrode film, 2b...
Electrode film, 3... Nozzle plate, 4a... Fixed layer, 4b
... fixed layer, 5 ... body, 6 ... nozzle hole,
7...Liquid passage, 8...Liquid chamber, 9...Fixing part,
10... Concavity.
Claims (1)
気振動子と、この電気振動子によつて加振される
ノズル板と、これらを支持するボデイーとがそれ
ぞれ固着剤で接合された構成からなり、前記ノズ
ル板の一部には、ノズル板の板厚が大小となるよ
う所定形状で凹凸部を設けた霧化ポンプ。 ２ 凹凸部は、ノズル板が電気振動子によつて加
振され、撓み振動を生じる振動系の節部に一致す
るように設けた特許請求の範囲第１項記載の霧化
ポンプ。[Scope of Claims] 1. An electric vibrator having an electrode film provided on opposing substantially smooth main surfaces, a nozzle plate excited by the electric vibrator, and a body supporting these are fixed to each other. The atomizing pump has a structure in which the nozzle plate is bonded with an adhesive, and a part of the nozzle plate is provided with an uneven part in a predetermined shape so that the thickness of the nozzle plate is varied. 2. The atomizing pump according to claim 1, wherein the uneven portion is provided so as to coincide with a node of a vibration system in which the nozzle plate is vibrated by an electric vibrator to generate bending vibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1041184A JPS60153962A (en) | 1984-01-24 | 1984-01-24 | Atomizing pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1041184A JPS60153962A (en) | 1984-01-24 | 1984-01-24 | Atomizing pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60153962A JPS60153962A (en) | 1985-08-13 |
| JPH0210708B2 true JPH0210708B2 (en) | 1990-03-09 |
Family
ID=11749399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1041184A Granted JPS60153962A (en) | 1984-01-24 | 1984-01-24 | Atomizing pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60153962A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6703837B2 (en) * | 2016-01-07 | 2020-06-03 | 株式会社神戸製鋼所 | Boil-off gas supply device |
-
1984
- 1984-01-24 JP JP1041184A patent/JPS60153962A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60153962A (en) | 1985-08-13 |
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