JPH02106456U - - Google Patents

Info

Publication number
JPH02106456U
JPH02106456U JP1368389U JP1368389U JPH02106456U JP H02106456 U JPH02106456 U JP H02106456U JP 1368389 U JP1368389 U JP 1368389U JP 1368389 U JP1368389 U JP 1368389U JP H02106456 U JPH02106456 U JP H02106456U
Authority
JP
Japan
Prior art keywords
trolley
transport
wheel
main body
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1368389U
Other languages
English (en)
Other versions
JPH0754284Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989013683U priority Critical patent/JPH0754284Y2/ja
Publication of JPH02106456U publication Critical patent/JPH02106456U/ja
Application granted granted Critical
Publication of JPH0754284Y2 publication Critical patent/JPH0754284Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案実施例による搬送台車の構造を
示す正面断面図、第２図は第１図の側面図である
。 図において、１：レール、２：搬送台車、３：
基板保持用ホルダ、４：台車本体、５：車輪、６
：サスペンシヨン機構。

Claims (1)

    【実用新案登録請求の範囲】
  1. 搬送型スパツタリング成膜装置に用いる基板搬
    送用の搬送台車であつて、台車に装備した車輪を
    各車輪ごとに独立懸架方式のサスペンシヨン機構
    を介して台車本体に取付けたことを特徴とする搬
    送台車。
JP1989013683U 1989-02-08 1989-02-08 搬送型スパッタリング成膜装置 Expired - Lifetime JPH0754284Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989013683U JPH0754284Y2 (ja) 1989-02-08 1989-02-08 搬送型スパッタリング成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989013683U JPH0754284Y2 (ja) 1989-02-08 1989-02-08 搬送型スパッタリング成膜装置

Publications (2)

Publication Number Publication Date
JPH02106456U true JPH02106456U (ja) 1990-08-23
JPH0754284Y2 JPH0754284Y2 (ja) 1995-12-18

Family

ID=31224199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989013683U Expired - Lifetime JPH0754284Y2 (ja) 1989-02-08 1989-02-08 搬送型スパッタリング成膜装置

Country Status (1)

Country Link
JP (1) JPH0754284Y2 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105768A (ja) * 1985-11-01 1987-05-16 ボンバーディア・コーポレーション 鉄道車両用の積み重ねられた一対のスプリング
JPS637165U (ja) * 1986-06-25 1988-01-18
JPS6313307U (ja) * 1986-07-14 1988-01-28
JPS6339161U (ja) * 1986-08-26 1988-03-14

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105768A (ja) * 1985-11-01 1987-05-16 ボンバーディア・コーポレーション 鉄道車両用の積み重ねられた一対のスプリング
JPS637165U (ja) * 1986-06-25 1988-01-18
JPS6313307U (ja) * 1986-07-14 1988-01-28
JPS6339161U (ja) * 1986-08-26 1988-03-14

Also Published As

Publication number Publication date
JPH0754284Y2 (ja) 1995-12-18

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