JPH02105672U

JPH02105672U -

Info

Publication number: JPH02105672U
Application number: JP2669389U
Authority: JP
Priority date: 1988-10-28
Filing date: 1989-03-10
Publication date: 1990-08-22

Description

[Brief explanation of drawings]

第１図は本考案のエア作動弁の１実施例の断面
図、第２図は他の１実施例の断面図、第３図及び
第４図は、それぞれ本考案のエア作動弁を適用し
た処理液循環装置の構成を示す概略図、第５図は
処理液の温度と粘度の関係を例示するグラフ、第
６図は処理液循環装置の従来例を示す概略図であ
る。１……処理槽、２……ヒーター、３……ポンプ
、６……フイルタ、１１……弁本体、１２……流
入管、１３……吐出管、１４……弁座、１５……
弁胴、１６……隔壁、１８，２０……連通部、２
１……パツキング、２２……ソケツト、２３……
プラグ、２４，２６……仕切膜、２７……下部気
室、２８……上部気室、３０……エアコンプレツ
サ、３１……減圧弁、３２……分配弁、３５……
ソケツト、３６……フランジ、３７……パツキン
グ、４１……処理槽、４２……ヒーター、４４…
…ポンプ、４６……フイルタ、４９……エア作動
弁、５１……オーバーフロー槽、５２……隔壁。 Fig. 1 is a cross-sectional view of one embodiment of the air-operated valve of the present invention, Fig. 2 is a cross-sectional view of another embodiment, and Figs. 3 and 4 are each a cross-sectional view of an air-operated valve of the present invention. FIG. 5 is a schematic diagram showing the configuration of the processing liquid circulation device, FIG. 5 is a graph illustrating the relationship between the temperature and viscosity of the processing liquid, and FIG. 6 is a schematic diagram showing a conventional example of the processing liquid circulation device. 1... Processing tank, 2... Heater, 3... Pump, 6... Filter, 11... Valve body, 12... Inflow pipe, 13... Discharge pipe, 14... Valve seat, 15...
Valve body, 16... Partition wall, 18, 20... Communication portion, 2
1...Packing, 22...Socket, 23...
Plug, 24, 26... Partition membrane, 27... Lower air chamber, 28... Upper air chamber, 30... Air compressor, 31... Pressure reducing valve, 32... Distribution valve, 35...
Socket, 36...flange, 37...packing, 41...processing tank, 42...heater, 44...
... pump, 46 ... filter, 49 ... air-operated valve, 51 ... overflow tank, 52 ... bulkhead.

Claims

[Claims for Utility Model Registration] A valve body 11 provided with a valve seat 14 and a fluid inlet and outlet, and a valve body 11 divided into two by an airtight partition wall 16, one of which is attached to the valve body 11 and the other. includes a valve body 15 in which air chambers 27 and 28 for operation are formed, and valve bodies 22 and 2 that penetrate the partition wall 16 and are supported so as to be movable toward and away from the valve seat 14.
3, 25 or 35 and the valve body 22 in the air chambers 27, 28,
an airtight partition member 26 or 36 that is connected between the protruding end of 23, 25, or 35 and the wall of the air chamber and divides the air chambers 27, 28 into two in the direction of movement of the valve body; . An air-operated valve, wherein the valve body is pressed against the valve seat with a pressure corresponding to a difference in air pressure supplied to the valve body.