JPH0210468U - - Google Patents
Info
- Publication number
- JPH0210468U JPH0210468U JP8229488U JP8229488U JPH0210468U JP H0210468 U JPH0210468 U JP H0210468U JP 8229488 U JP8229488 U JP 8229488U JP 8229488 U JP8229488 U JP 8229488U JP H0210468 U JPH0210468 U JP H0210468U
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- silicon particles
- single crystal
- hopper
- screw feeder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 239000011856 silicon-based particle Substances 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000005303 weighing Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8229488U JPH0210468U (enrdf_load_stackoverflow) | 1988-06-23 | 1988-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8229488U JPH0210468U (enrdf_load_stackoverflow) | 1988-06-23 | 1988-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0210468U true JPH0210468U (enrdf_load_stackoverflow) | 1990-01-23 |
Family
ID=31307053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8229488U Pending JPH0210468U (enrdf_load_stackoverflow) | 1988-06-23 | 1988-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210468U (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04362088A (ja) * | 1991-06-06 | 1992-12-15 | Nkk Corp | 粒状シリコン供給装置 |
| KR970062082A (ko) * | 1996-02-08 | 1997-09-12 | 와다 다다시 | 입상실리콘 원료의 공급방법과 그 방법에 이용되는 공급관 및 실리콘 단결정의 제조방법 |
| JP2013083389A (ja) * | 2011-10-07 | 2013-05-09 | Sinfonia Technology Co Ltd | 被処理物投入装置 |
-
1988
- 1988-06-23 JP JP8229488U patent/JPH0210468U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04362088A (ja) * | 1991-06-06 | 1992-12-15 | Nkk Corp | 粒状シリコン供給装置 |
| KR970062082A (ko) * | 1996-02-08 | 1997-09-12 | 와다 다다시 | 입상실리콘 원료의 공급방법과 그 방법에 이용되는 공급관 및 실리콘 단결정의 제조방법 |
| JP2013083389A (ja) * | 2011-10-07 | 2013-05-09 | Sinfonia Technology Co Ltd | 被処理物投入装置 |
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