JPH0210468U - - Google Patents

Info

Publication number
JPH0210468U
JPH0210468U JP8229488U JP8229488U JPH0210468U JP H0210468 U JPH0210468 U JP H0210468U JP 8229488 U JP8229488 U JP 8229488U JP 8229488 U JP8229488 U JP 8229488U JP H0210468 U JPH0210468 U JP H0210468U
Authority
JP
Japan
Prior art keywords
silicon
silicon particles
single crystal
hopper
screw feeder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8229488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8229488U priority Critical patent/JPH0210468U/ja
Publication of JPH0210468U publication Critical patent/JPH0210468U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8229488U 1988-06-23 1988-06-23 Pending JPH0210468U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8229488U JPH0210468U (enrdf_load_stackoverflow) 1988-06-23 1988-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8229488U JPH0210468U (enrdf_load_stackoverflow) 1988-06-23 1988-06-23

Publications (1)

Publication Number Publication Date
JPH0210468U true JPH0210468U (enrdf_load_stackoverflow) 1990-01-23

Family

ID=31307053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8229488U Pending JPH0210468U (enrdf_load_stackoverflow) 1988-06-23 1988-06-23

Country Status (1)

Country Link
JP (1) JPH0210468U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04362088A (ja) * 1991-06-06 1992-12-15 Nkk Corp 粒状シリコン供給装置
KR970062082A (ko) * 1996-02-08 1997-09-12 와다 다다시 입상실리콘 원료의 공급방법과 그 방법에 이용되는 공급관 및 실리콘 단결정의 제조방법
JP2013083389A (ja) * 2011-10-07 2013-05-09 Sinfonia Technology Co Ltd 被処理物投入装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04362088A (ja) * 1991-06-06 1992-12-15 Nkk Corp 粒状シリコン供給装置
KR970062082A (ko) * 1996-02-08 1997-09-12 와다 다다시 입상실리콘 원료의 공급방법과 그 방법에 이용되는 공급관 및 실리콘 단결정의 제조방법
JP2013083389A (ja) * 2011-10-07 2013-05-09 Sinfonia Technology Co Ltd 被処理物投入装置

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