JPH02104628U - - Google Patents
Info
- Publication number
- JPH02104628U JPH02104628U JP1329589U JP1329589U JPH02104628U JP H02104628 U JPH02104628 U JP H02104628U JP 1329589 U JP1329589 U JP 1329589U JP 1329589 U JP1329589 U JP 1329589U JP H02104628 U JPH02104628 U JP H02104628U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- hot plate
- semiconductor
- baking
- heats
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1329589U JPH02104628U (en, 2012) | 1989-02-07 | 1989-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1329589U JPH02104628U (en, 2012) | 1989-02-07 | 1989-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02104628U true JPH02104628U (en, 2012) | 1990-08-20 |
Family
ID=31223478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1329589U Pending JPH02104628U (en, 2012) | 1989-02-07 | 1989-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02104628U (en, 2012) |
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1989
- 1989-02-07 JP JP1329589U patent/JPH02104628U/ja active Pending