JPS6223445U - - Google Patents
Info
- Publication number
- JPS6223445U JPS6223445U JP11370485U JP11370485U JPS6223445U JP S6223445 U JPS6223445 U JP S6223445U JP 11370485 U JP11370485 U JP 11370485U JP 11370485 U JP11370485 U JP 11370485U JP S6223445 U JPS6223445 U JP S6223445U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- wafers
- hot plate
- baking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11370485U JPS6223445U (en, 2012) | 1985-07-26 | 1985-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11370485U JPS6223445U (en, 2012) | 1985-07-26 | 1985-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6223445U true JPS6223445U (en, 2012) | 1987-02-13 |
Family
ID=30995761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11370485U Pending JPS6223445U (en, 2012) | 1985-07-26 | 1985-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6223445U (en, 2012) |
-
1985
- 1985-07-26 JP JP11370485U patent/JPS6223445U/ja active Pending