JPH0210459U - - Google Patents
Info
- Publication number
- JPH0210459U JPH0210459U JP8551988U JP8551988U JPH0210459U JP H0210459 U JPH0210459 U JP H0210459U JP 8551988 U JP8551988 U JP 8551988U JP 8551988 U JP8551988 U JP 8551988U JP H0210459 U JPH0210459 U JP H0210459U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- attached
- forms
- heater
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図は第１図にパネルを２枚取り付ける面板を設置
し、パネルを取り付けた状態を示す断面図、第３
図は第２図の電極２と３，４と５にヒーターコイ
ルを取り付けたところを開口部より見た時のヒー
ターコイルの位置を示した平面図、第４図は、電
極１と２，５と６にヒーターコイルを設置しパネ
ルを１枚取り付ける面板を用いたところを開口部
より見た時のヒーターコイルの位置を示した平面
図、第５図および第６図は従来の蒸着装置の一例
の断面図と平面図、第７図および第８図は従来の
蒸着装置の他の例の断面図と平面図である。
１，２，３，４，５，６…電極、７…ヒーター
コイル、８…アルミペレツト、９，１０…パネル
、１１，１２…面板、１３…釜。
Figure 1 is a plan view showing one embodiment of the present invention;
The figure is a cross-sectional view showing the state in which the face plate for attaching two panels is installed in Figure 1, and the panel is attached, and Figure 3 is a cross-sectional view showing the state in which the panels are attached.
The figure is a plan view showing the position of the heater coils when viewed from the opening when the heater coils are attached to electrodes 2, 3, 4, and 5 in Figure 2. A plan view showing the position of the heater coil when viewed from the opening using a face plate with heater coils installed at and 6 and one panel attached, and Figures 5 and 6 are examples of conventional vapor deposition equipment. FIGS. 7 and 8 are a sectional view and a plan view of other examples of the conventional vapor deposition apparatus. 1, 2, 3, 4, 5, 6... electrode, 7... heater coil, 8... aluminum pellet, 9, 10... panel, 11, 12... face plate, 13... pot.
Claims (1)
を形成させる真空蒸着装置において、真空容器の
一部を形成している蒸着釜の内部に蒸着材料を加
熱するヒーターコイルを取り付ける電極を多数配
置し、ガラスパネルのサイズ又は数量に応じてヒ
ーターコイルを任意の位置に設定できる構造とし
たことを特徴とする金属膜蒸着装置。 In a vacuum evaporation device that forms a metal thin film on the back side of the phosphor screen on the inner surface of a glass panel, a large number of electrodes are placed inside the evaporation pot, which forms part of the vacuum container, to which heater coils are attached to heat the evaporation material. A metal film deposition apparatus characterized by having a structure in which a heater coil can be set at any position depending on the size or quantity of glass panels.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8551988U JPH0210459U (en) | 1988-06-27 | 1988-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8551988U JPH0210459U (en) | 1988-06-27 | 1988-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0210459U true JPH0210459U (en) | 1990-01-23 |
Family
ID=31310187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8551988U Pending JPH0210459U (en) | 1988-06-27 | 1988-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210459U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997039160A1 (en) * | 1996-04-18 | 1997-10-23 | Kabushiki Kaisha Toshiba | Method of producing a cathode-ray tube and apparatus therefor |
-
1988
- 1988-06-27 JP JP8551988U patent/JPH0210459U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997039160A1 (en) * | 1996-04-18 | 1997-10-23 | Kabushiki Kaisha Toshiba | Method of producing a cathode-ray tube and apparatus therefor |
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