JPH02104566U - - Google Patents
Info
- Publication number
- JPH02104566U JPH02104566U JP1298289U JP1298289U JPH02104566U JP H02104566 U JPH02104566 U JP H02104566U JP 1298289 U JP1298289 U JP 1298289U JP 1298289 U JP1298289 U JP 1298289U JP H02104566 U JPH02104566 U JP H02104566U
- Authority
- JP
- Japan
- Prior art keywords
- concave spherical
- sphere
- spherical surface
- sample stage
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 150000002736 metal compounds Chemical class 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1298289U JPH02104566U (en, 2012) | 1989-02-08 | 1989-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1298289U JPH02104566U (en, 2012) | 1989-02-08 | 1989-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02104566U true JPH02104566U (en, 2012) | 1990-08-20 |
Family
ID=31222903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1298289U Pending JPH02104566U (en, 2012) | 1989-02-08 | 1989-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02104566U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017013790A1 (ja) * | 2015-07-23 | 2017-01-26 | 株式会社日立製作所 | 試料ステージおよびそれを用いた荷電粒子線装置 |
-
1989
- 1989-02-08 JP JP1298289U patent/JPH02104566U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017013790A1 (ja) * | 2015-07-23 | 2017-01-26 | 株式会社日立製作所 | 試料ステージおよびそれを用いた荷電粒子線装置 |
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