JPH02104353U - - Google Patents
Info
- Publication number
- JPH02104353U JPH02104353U JP1342689U JP1342689U JPH02104353U JP H02104353 U JPH02104353 U JP H02104353U JP 1342689 U JP1342689 U JP 1342689U JP 1342689 U JP1342689 U JP 1342689U JP H02104353 U JPH02104353 U JP H02104353U
- Authority
- JP
- Japan
- Prior art keywords
- case body
- pellicle
- reticle
- case
- fixed position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1342689U JPH02104353U (zh) | 1989-02-06 | 1989-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1342689U JPH02104353U (zh) | 1989-02-06 | 1989-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02104353U true JPH02104353U (zh) | 1990-08-20 |
Family
ID=31223723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1342689U Pending JPH02104353U (zh) | 1989-02-06 | 1989-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02104353U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05197135A (ja) * | 1991-08-26 | 1993-08-06 | Yung-Tsai Yen | 光学ペリクルを保持する保持装置及び光学ペリクル使用方法 |
-
1989
- 1989-02-06 JP JP1342689U patent/JPH02104353U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05197135A (ja) * | 1991-08-26 | 1993-08-06 | Yung-Tsai Yen | 光学ペリクルを保持する保持装置及び光学ペリクル使用方法 |