JPH02103178U - - Google Patents

Info

Publication number
JPH02103178U
JPH02103178U JP1325089U JP1325089U JPH02103178U JP H02103178 U JPH02103178 U JP H02103178U JP 1325089 U JP1325089 U JP 1325089U JP 1325089 U JP1325089 U JP 1325089U JP H02103178 U JPH02103178 U JP H02103178U
Authority
JP
Japan
Prior art keywords
cryopump
conductance
bellows
variable
buttful
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1325089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1325089U priority Critical patent/JPH02103178U/ja
Publication of JPH02103178U publication Critical patent/JPH02103178U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1325089U 1989-02-06 1989-02-06 Pending JPH02103178U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1325089U JPH02103178U (enrdf_load_stackoverflow) 1989-02-06 1989-02-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1325089U JPH02103178U (enrdf_load_stackoverflow) 1989-02-06 1989-02-06

Publications (1)

Publication Number Publication Date
JPH02103178U true JPH02103178U (enrdf_load_stackoverflow) 1990-08-16

Family

ID=31223396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1325089U Pending JPH02103178U (enrdf_load_stackoverflow) 1989-02-06 1989-02-06

Country Status (1)

Country Link
JP (1) JPH02103178U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10006451B2 (en) 2015-03-31 2018-06-26 Sumitomo Heavy Industries, Ltd. Cryopump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178982A (ja) * 1984-02-27 1985-09-12 Toshiba Corp クライオポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178982A (ja) * 1984-02-27 1985-09-12 Toshiba Corp クライオポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10006451B2 (en) 2015-03-31 2018-06-26 Sumitomo Heavy Industries, Ltd. Cryopump

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