JPH0210316Y2 - - Google Patents
Info
- Publication number
- JPH0210316Y2 JPH0210316Y2 JP1986003779U JP377986U JPH0210316Y2 JP H0210316 Y2 JPH0210316 Y2 JP H0210316Y2 JP 1986003779 U JP1986003779 U JP 1986003779U JP 377986 U JP377986 U JP 377986U JP H0210316 Y2 JPH0210316 Y2 JP H0210316Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- voltage
- gas introduction
- flow rate
- piezo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986003779U JPH0210316Y2 (OSRAM) | 1986-01-14 | 1986-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986003779U JPH0210316Y2 (OSRAM) | 1986-01-14 | 1986-01-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62116180U JPS62116180U (OSRAM) | 1987-07-23 |
| JPH0210316Y2 true JPH0210316Y2 (OSRAM) | 1990-03-14 |
Family
ID=30783853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986003779U Expired JPH0210316Y2 (OSRAM) | 1986-01-14 | 1986-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210316Y2 (OSRAM) |
-
1986
- 1986-01-14 JP JP1986003779U patent/JPH0210316Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62116180U (OSRAM) | 1987-07-23 |
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