JPH02102463U - - Google Patents
Info
- Publication number
- JPH02102463U JPH02102463U JP1190889U JP1190889U JPH02102463U JP H02102463 U JPH02102463 U JP H02102463U JP 1190889 U JP1190889 U JP 1190889U JP 1190889 U JP1190889 U JP 1190889U JP H02102463 U JPH02102463 U JP H02102463U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- discharge surface
- spatter shield
- anode
- fact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190889U JPH02102463U (cs) | 1989-02-03 | 1989-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190889U JPH02102463U (cs) | 1989-02-03 | 1989-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102463U true JPH02102463U (cs) | 1990-08-15 |
Family
ID=31220876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1190889U Pending JPH02102463U (cs) | 1989-02-03 | 1989-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102463U (cs) |
-
1989
- 1989-02-03 JP JP1190889U patent/JPH02102463U/ja active Pending
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