JPH0198161U - - Google Patents
Info
- Publication number
- JPH0198161U JPH0198161U JP19235587U JP19235587U JPH0198161U JP H0198161 U JPH0198161 U JP H0198161U JP 19235587 U JP19235587 U JP 19235587U JP 19235587 U JP19235587 U JP 19235587U JP H0198161 U JPH0198161 U JP H0198161U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- vacuum chamber
- substrate
- thin film
- synthesis apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19235587U JPH0198161U (pt) | 1987-12-17 | 1987-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19235587U JPH0198161U (pt) | 1987-12-17 | 1987-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0198161U true JPH0198161U (pt) | 1989-06-30 |
Family
ID=31483217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19235587U Pending JPH0198161U (pt) | 1987-12-17 | 1987-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0198161U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006265692A (ja) * | 2005-03-25 | 2006-10-05 | Cyg Gijutsu Kenkyusho Kk | スパッタ装置 |
-
1987
- 1987-12-17 JP JP19235587U patent/JPH0198161U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006265692A (ja) * | 2005-03-25 | 2006-10-05 | Cyg Gijutsu Kenkyusho Kk | スパッタ装置 |
| JP4660241B2 (ja) * | 2005-03-25 | 2011-03-30 | 株式会社昭和真空 | スパッタ装置 |